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研究生: 王瑞慶
Ruan-Qing Wang
論文名稱: 砷化鋁鎵/砷化鎵異質接面雙極性電晶體之研製及壓控振盪器設計與製程
指導教授: 辛裕明
Yue-Ming Hsin
口試委員:
學位類別: 碩士
Master
系所名稱: 資訊電機學院 - 電機工程學系
Department of Electrical Engineering
畢業學年度: 89
語文別: 中文
論文頁數: 93
中文關鍵詞: 異質接面雙極性電晶體變容二極體本質接面雙極性電晶體單晶微波積體電路高頻壓控振盪器
外文關鍵詞: AlGaAs/GaAs, self-aligned, non-self-aligned, MMIC, VCO
相關次數: 點閱:11下載:0
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  • 在VCO電路的應用上,利用在製作HBT的過程中基極及集極的p-n接面製作變容二極體,以達成異質接面雙極性電晶體及變容二極體的整合製程。此外HBT比本質接面雙極性電晶體( BJT )元件有更好的頻率響應,如此可設計出在單晶微波積體電路(MMIC)上之高頻壓控振盪器(VCO)。文中介紹了1.8 GHz與5.8 GHz VCO的設計與模擬,並量測 1.8 GHz VCO的量測特性為:Varactor 電壓為0時,輸出的頻率為2.1 GHz,輸出功率為0.43 dBm,相位雜訊為-76 dBc/Hz。


    第一章導論…………………………………………….…..1 第二章異質接面雙極性電晶體之製程與測量……..…….4 2 - 1 元件原理………………………..…………….4 2 - 2 元件佈局之設計……………………..……….7 2 - 3 製程步驟…………………………….………10 2 - 4 元件特性的量測……………………….……23 2 - 4.1元件的結構……………………..23 2 - 4.2直流量測………………………..24 2 - 4.3高頻量測………………………..28 2 - 5 利用基-集極接面製作變容二極體……..…..33 2 - 6 結果分析與討論…………………..………...40 第三章壓控振盪器原理及設計………………………….41 3 - 1 振盪器之設計原理……………….…………42 3 - 2 壓控振盪器之設計步驟及模擬結果…….....48 3 - 2.1 MMIC…………………………..49 3 - 2.2 MIC………………………….....58 3 - 3 研究與討論…………………….…………....64 第四章壓控振盪器之實作與測量結果……………….....65 4 - 1 氧化鋁基板電路之製程步驟……….…..…..66 4 - 2 壓控振盪器之測量…………………….…....77 第五章結論………………………………………...……..90 參考文獻………………………………………………….…..92

    [1] Fresina, M.T.; Hartmann, Q.J.; Thomas, S.; Ahmari, D.A.; Caruth, D.; Feng, M.; Stillman, G.E. “InGaP/GaAs HBT with novel layer structure for emitter ledge fabrication” Electron Device Meeting, pp. 207-210, 1996.
    [2]Yue-Fei Yang, Chung-Chi Hsu, Edward S. Yang, Hai-Jiang Ou “A High-Frequency GaInP/GaAs Heterojunction Bipolar Transistror with Reduced Base-Collector Capacitance Using a Selective Buried Sub-Collector” IEEE Electron Device Letters, Vol. 17, NO.11, pp 531-533, Nov. 1996.
    [3]W.L.Chen, H.F. Chau, M. Tutt, M. C. Ho, T. S. Kim, T. Henderson “High-Speed InGaP/GaAs HBT’s Using a Simple Collector Undercut Technique to Reduce Base-Collector Capacitance” IEEE Electron Device Letters, Vol.18, NO.7, pp 355-357, July 1997.
    [4]S.M. SZE “High-Speed Semiconductor Devices” Wiley-Interscience, 1990.
    [5]WILLIAM LIU “HANDBOOK OF III-V HETEROJNCTION BIPOLAR TRANSISTORS” Wiley-Interscience, 1998.
    [6]S. M. Sze “Physics of Semiconductor Devices” John Wiley & Sons Central Book Company, 1981.
    [7]W. Scot Ruska, “MICROELECTRONIC PROCESSING” McGraw-Hill Book Company.
    [8]David R. Pehlke and Dimitris Pavlidis, “Evaluation of the Factors Determining HBT High-Frequency Performance by Direct Analysis of S-Parameter Data” IEEE Transactions On Microwave Theory And Techniques, Vol. 40. NO. 12. December 1992.
    [9]Yoshiki Yamauchi, Hideki Kamitsuna, Masashi Nakatsugawa, “A 15-GHz Monolithic Low-Phase-Noise VCO Using AlGaAs/GaAs HBT Technology” IEEE Journal Of Solid-State Circuits. VOL. 27. NO. 10. October 1992.
    [10]Guillermo Gonzalez “Microwave Transistor Amplifiers” Prentice Hall 1997.
    [11]David M. Pozar “Microwave Engineering” Addison-Wesley Publishing Company 1990.
    [12]Konstantin A. Kouznetsov and Robert G. Meyer “Phase Noise in LC Oscillators” IEEE Journal Of Solid-State Circuits. Vol. 35. No. 8. August 2000.
    [13]Nhat M. Nguyen, Student Member, “A 1.8GHz Monolithic LC Voltage-Controlled Oscillator” IEEE Journal Of Solid-State Circuits. Vol. 27. NO. 3. March 1992.
    [14]Markus Zannoth, Bernd Kolb, Joseph Fenk, and Robert Weigel, “A Fully Integrated VCO at 2 GHz” IEEE Journal Of Solid-State Circuits. Vol. 33. NO. 12. December 1998.
    [15]John W. M. Rogers, Strudent Member, “The Effect Of Varactor Nonlinearity on the Phase Noise Of Completely Integrated VCOs” IEEE Journal Of Solid-State Circuits. Vol. 35. NO. 9. September 2000.
    [16]本城 和彥 “微波通訊半導體電路” 全華科技圖書股份有限公司 1996.

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