設計半導體設備維護系統的決策架構｜國立中央大學博碩士論文系統

簡易檢索 / 詳目顯示

回結果列表

研究生：	卓佳慧 Chia-Hui Cho
論文名稱：	設計半導體設備維護系統的決策架構 Design a decision framework of semiconductor equipment maintenance system
指導教授：	高信培 Hsing-Pei Kao
口試委員:
學位類別：	碩士 Master
系所名稱：	管理學院 - 工業管理研究所 Graduate Institute of Industrial Management
論文出版年：	2019
畢業學年度：	107
語文別：	英文
論文頁數：	87
中文關鍵詞：	半導體設備、決策支援系統、設計結構矩陣、失效模式與影響分析、作業基礎成本制
外文關鍵詞：	semiconductor equipment, decision support system, design structure matrix, failure mode and effect analysis, activity-based costing
相關次數：	點閱：26 下載：0
分享至:	分享至facebook 分享至twitter

查詢本校圖書館目錄查詢臺灣博碩士論文知識加值系統勘誤回報

設備在使用過程中性能會隨時間而退化，當異常隨著時間累積，將會造成產品不良率竄升、故障停機等嚴重後果。預診斷與健康管理和預防維護等不同維護策略被探討如何應用以降低設備發生非預期性故障的風險，使得適當維護策略的選用成為一個重要的議題。
現今的設備維護管理系統著重考量設備的可靠度，較少考量流程的資源成本與維修策略的潛在成本與效益。因此，本研究透過決策支援系統(Decision Support System)的決策制定流程，提出一個考量流程的資源成本與維修策略的潛在成本與效益的決策架構，協助決策者在不同維修方案選擇上，能得到更佳的決策品質。
本研究為半導體設備的維護管理系統設計一套決策架構，以設計結構矩陣(Design Structure Matrix)探討維修執行流程的流程循環，進而便於使用者管理維修流程。另一方面，應用失效模式與影響分析(Failure Mode and Effect Analysis)分析設備裡高潛在的失敗模式並讓使用者方便安排維護資源。最後透過作業基礎成本法的展開維修資源成本與和維修策略的潛在成本與效益，給予使用者維修方案選擇的建議。

The performance of the equipment will degrade over time during usage. When the abnormality value exceeds the tolerance range, it will have serious consequences such as soaring defect rate and breakdown. Different maintenance strategies such as Prognostic and Health Management and Preventive Maintenance are explored to apply to reduce the risk of unanticipated failures in equipment, which makes the selection of appropriate maintenance strategies become an essential issue.
Nowadays, the equipment maintenance management system focuses on the reliability of equipment, paying less consideration of the resource cost of the process and the potential cost and benefit of the maintenance strategy. Therefore, through the decision-making process of the Decision Support System (DSS), this research proposes a decision-making framework that considers these factors to assist decision makers to get better quality of decision making in the selection of maintenance plans.
In the research, designs structure matrix (DSM) is used to discuss the process cycle of the maintenance process. Besides, Failure Mode and Effect Analysis (FMEA) is utilized to analyze the high potential component in the equipment. Finally, through using Activity-Based Costing (ABC), the resource cost of the maintenance process and the potential cost and benefit of the maintenance strategy are calculated to advise the users the choice of maintenance plan.

中文摘要    i
Abstract    ii
Table of content    iii
List of figures    vi
List of tables    vii
Chapter 1 Introduction    1
1-1 Research background and motivation    1
1-2 Research objective    2
1-3 Research workflow    3
Chapter 2 Literature Review    4
2-1 Semiconductor equipment industry    4
2-1-1 Semiconductor ecosystem and operating model    4
2-1-2 Semiconductor Manufacturing Equipment    7
2-2 Equipment maintenance management    8
2-2-1 Definition of maintenance    8
2-2-2 Related research of equipment maintenance management    9
2-3 Decision support system    13
2-3-1History of DSS    13
2-3-2 Development framework of DSS    14
2-3-3 Components of DSS    15
Chapter 3 Methodology    16
3-1 Methodology framework    16
3-2 Design Structure Matrix    17
3-2-1 Introduction    17
3-2-2 Fundamental types of relationships in DSM    18
3-2-3 Analytical methods of DSM    20
3-2-4 Types of DSM    21
3-2-5 DSM summary    22
3-3 Failure mode and effects analysis    22
3-3-1 Introduction    22
3-3-2 Types of FMEA    23
3-3-3 Risk priority number    24
3-3-4 FMEA summary    24
3-4 Activity-Based Costing    28
3-4-1Introduction    28
3-4-2Steps of development    30
3-4-3 ABC summary    31
Chapter 4 Case application    32
4-1 Case introduction and Problem definition    32
4-1-1Case introduction    32
4-1-2 Problem definition    34
4-2 Maintenance process and modules design by using DSM    34
4-2-1 Information of maintenance process and modules    34
4-2-2 Analysis    39
4-3 Functional modules with FMEA and ABC    46
4-3-1 Modules implementation with FMEA    46
4-3-2 Modules implementation with ABC    49
Chapter 5 Conclusion and future research    61
5-1 Conclusion    61
5-2 Limitations of the Research    62
5-3 Future Research and Recommendations    62
Reference    64
Chinese Reference    67
Appendix FMEA of ECD equipment    68


                                

〔1〕 Akintola, Y. & V. Senthilkumar. ‘‘Identification of process, team and tool dependencies in building information modelling (BIM) implementation using multi-domain mapping (MDM) – A theoretical framework.’’ Fort Worth,Texas,USA: 17 th interational dependency and structure modeling conference,2015
〔2〕 Browning, T.R. “Using the Design Structure Matrix (DSM) for Process Integration. ”,2000
〔3〕 Browning, T. R., “Applying the design structure matrix to system decomposition and integration problems: a review and new directions. ” IEEE Transactions on Engineering Management, 48(3), 292-306,2001.
〔4〕 Browing, T.R. and S.D. Eppinger, Design Structure Matrix Methods and Applications,Cambridge, MA, USA: MIT Press,2012.
〔5〕 Beaudry,C.L. & Dukovic,J.O. Faraday in the Fab: A Look at Copper Plating Equipment for On-Chip Wiring. The Electrochemical Society Interface, 40-44,2009
〔6〕 E. Turban, R. Sharda, D. Delen, Decision Support and Business Intelligence Systems, ninth ed., Prentice Hall, 2011.
〔7〕 Failure Mode and Effects Analysis FMEA Handbook (with Robustness Linkages) v4.2, Ford Motor Company, 2011
〔8〕 Hou-bo, H., Jian-min, Z., & chang-an, X. “Cost-benefit Model for PHM”. Procedia Environmental Sciences, 10, 759-764.,2011
〔9〕 Haddad, G., Sandborn, P. A., & Pecht, M. G. “An Options Approach for Decision Support of Systems With Prognostic Capabilities”. IEEE Transactions on Reliability, 61(4), 872-883.,2012
〔10〕 Haroun, A. E., “Maintenance cost estimation: application of activity-based costing as a fair estimate method”, Journal of Quality in Maintenance Engineering, 21(3), 258-270.,2015
〔11〕 Sage, A.P. Decision Support Systems Engineering. John Wiley & Sons, Inc., New York, 1991.
〔12〕 Stamatics, D. Failure mode and effect analysis: FMEA from theory to execution. USA: ASQ Quality Press.,1995
〔13〕 Stenström, C., Norrbin, P., Parida, A., & Kumar, U. “Preventive and corrective maintenance – cost comparison and cost–benefit analysis”, Structure and Infrastructure Engineering, 12(5), 603-617.,2016
〔14〕 Shi, Z., Lee, J., & Cui, P. “Prognostics and health management solution development in LabVIEW: Watchdog agent® toolkit and case study”. Paper presented at the 2016 Prognostics and System Health Management Conference (PHM-Chengdu).,2016 Oct
〔15〕 Kwon, D., Hodkiewicz, M. R., Fan, J., Shibutani, T., & Pecht, M. G. “IoT-Based Prognostics and Systems Health Management for Industrial Applications.” IEEE Access, 4, 3659-3670.,2016
〔16〕 Mahal, l.,& Hossain, M. A. . “Activity-Based Costing (ABC) –An Effective Tool for Better Management”, Research Journal of Finance and Accounting,Vol.6,2015
〔17〕 Nathan Associates, & Semiconductor Industry Association. Beyond Borders The Global:Semiconductor Value Chain.,2016
〔18〕 Ruschel, E., Santos, E., & Rocha Loures, E. “Industrial maintenance decision-making: A systematic literature review”, Journal of Manufacturing Systems,Vol. 45, 2017
〔19〕 Vogl, G. W., Weiss, B. A., & Helu, M. “A review of diagnostic and prognostic capabilities and best practices for manufacturing. ”, Journal of Intelligent Manufacturing. 2016
〔20〕 Yang,C.-S., Sylvain Letourneau, Elizabeth Scarlett, & Zaluski, M. “APU FMEA Validation Using Operation and Maintenance Data.” In: Annual Conference of the Prognostics and Health Management Society,2009
〔21〕吳安妮，「作業基礎成本制之發展與整合」，會計研究月刊，263，60-73，2007。
〔22〕許明哲，詹印豐，&顏錫鴻，半導體晶圓及電化學沉積系統之設計考量，電子月刊，15(3)，88-96，2009
〔23〕連志晨，「整合FMEA與ABC成本法於衡量設備生命週期成本之研究-以半導體產業實證分析」，國立屏東科技大學企業管理研究所，碩士論文，民國99年。
〔24〕陳慧君，安全變更管理-以半導體廠電化學電鍍製程設備系統風管改置為例，國立交通大學，碩士論文，新竹市，民國98年。
〔25〕菊地正典，圖解半導體製造裝置，台北縣新店市:世茂出版，2008。
〔26〕楊子明等編著，半導體製程設備技術，臺北市:五南，2017。
〔27〕鄭達才，設備維護管理:現在與未來，台北縣汐止市:中國生產力中心，2000

簡易檢索 / 詳目顯示

相關論文