二氧化鈦基表面增強拉曼基板之製作與檢測｜國立中央大學博碩士論文系統

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研究生：	蔡睿翰 Jui-han Tsai
論文名稱：	二氧化鈦基表面增強拉曼基板之製作與檢測 Fabrication and Characterizations of TiO2 Based Surface-Enhanced Raman Scattering Substrates
指導教授：	李勝偉 Sheng-Wei Lee
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學與工程研究所 Graduate Institute of Materials Science & Engineering
畢業學年度：	99
語文別：	中文
論文頁數：	85
中文關鍵詞：	二氧化鈦、表面增強拉曼
外文關鍵詞：	TiO2, SERS
相關次數：	點閱：7 下載：0
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本研究利用不同管徑之二氧化鈦奈米管陣列製作二氧化鈦基表面增強拉曼基板，研究內容主要可分為三大部分，第一部分為二氧化鈦奈米管陣列基板的製作，藉由控制陽極氧化之電壓與溶液組成，製作出管徑15nm～150nm之奈米管陣列。
第二部分為沉積金製作表面增強拉曼基板；在此比較了沉積金在不同管徑的基板上，及改變金的量所得到的SERS強度，並以RTA退火進行表面改質，比較退火溫度對SERS的影響。結果得知在50nm管徑的基板上沉積金，可得到最強的SERS強度；而沉積金的量對於SERS強度並無太大影響； RTA退火後，將金由薄膜改變為金奈米粒子散佈在基板上，增強了其表面電漿場，而強化了基板SERS強度為未退火的2倍以上。且在600℃時有最強的SERS強度。且我們所製作之基板可量測到濃度最低達10-8M。
第三部分改變沉積金屬為銀，比較沉積銀在不同管徑的基板上，所得到的SERS強度，再以RTA退火進行表面改質，比較退火溫度對SERS的影響。結果得知在75nm管徑的基板，可獲得最強的SERS強度，退火後同樣增強了SERS的強度至2倍以上。比較不同管徑之二氧化鈦奈米管基板在不同溫度下退火的結果，可得知適當的退火溫度可使原先SERS強度不強的管徑之基板，在退火後得到與75nm管徑之基板差不多的強度，而證明了適當的表面改質，可使原先SERS效應不強的基板，得到與SERS效應較強之基板同樣的強度。

In this study, we fabricated TiO2 based surface-enhanced Raman scattering substrates with TiO2 nanotube arrays. This thesis includes three parts; the first part was related to the fabrication of TiO2 nanotube array substrates. We have successfully fabricated TiO2 nanotube with diameter from 15 nm to 150 nm by controlling anodic voltage and the electrolyte composition.
The second part was related to the fabrication of Au-decorated TiO2-nanotube substrates. We compared the SERS activity of substrates with different tube diameters. We also used RTA to further improve the SERS activity. From the experimental results, we found that the TiO2 nanotube substrate with 50 nm tube diameter have the highest SERS performance. The highest SERS activity, which can effectively detect the concentration of R6G as low as to 10-8M, appeared with the annealing temperature of 600℃.
The third part was related to the fabrication of Ag-decorated TiO2-nanotube substrates. We compared the SERS activity of substrates with different tube diameters. We also employed RTA to enhance the SERS activity. From the experimental results, we found that the TiO2-nanotube substrate with the tube diameter of 75 nm have the highest SERS activity. The highest SERS activity, which can detect the concentration of R6G as low as to 10-8M, appeared at annealing temperature of 400℃. In addition, with the tube diameter of 26 nm and annealing temperature of 500 ℃, the SERS substrate can detect the concentration of R6G as low as to 10-9M.

摘要 ....................................................................................................................................... I
Abstract ............................................................................................................................... II
致謝 .................................................................................................................................... III
目錄 .................................................................................................................................... IV
圖目錄 ............................................................................................................................... VII
第一章 簡介 ....................................................................................................................... 1
1前言 ......................................................................................................................... 1
2拉曼散射 ................................................................................................................. 1
2.1拉曼散射發展歷史........................................................................................ 1
2.2拉曼散射原理 ............................................................................................... 1
3表面增強拉曼散射 .................................................................................................. 6
3.1表面增強拉曼散射歷史 ................................................................................ 6
3.2表面增強拉曼散射原理 ................................................................................ 6
4表面電漿共振效應 .................................................................................................. 9
4.1傳播式表面電漿共振 .................................................................................. 11
4.2侷域化表面電漿共振 .................................................................................. 14
4.3金屬奈米粒子的組合 .................................................................................. 16
5二氧化鈦奈米管 .................................................................................................... 17
6研究動機 ............................................................................................................... 21
參考文獻 ..................................................................................................................... 22
第二章 實驗步驟 ............................................................................................................... 24
1以陽極氧化法製備二氧化鈦奈米管陣列 ............................................................. 25
2表面增強拉曼基板製作 ........................................................................................ 26
2.1以金為增強金屬製作表面增強拉曼基板 ................................................... 26
2.2以銀為增強金屬製作表面增強拉曼基板 ................................................... 26
3實驗設備 ........................................................................................................ 26
3.1二氧化鈦奈米管陣列製備系統 .................................................................. 26
3.2電子槍蒸鍍系統（Electron Beam Evaporation） ....................................... 27
4分析及性質量測 .................................................................................................... 27
4.1掃描式電子顯微鏡...................................................................................... 27
4.2 XRD繞射分析 ............................................................................................ 27
4.3紫外光-可見光光譜儀 ................................................................................ 27
4.4拉曼光譜量測 ............................................................................................. 28
第三章 結果與討論 ............................................................................................................ 29
1陽極氧化法製備二氧化鈦奈米管陣列 ................................................................. 29
1.1二氧化鈦奈米管陣列SEM影像分析 ........................................................ 29
1.2不同管徑大小對紫外光–可見光之吸收光譜之影響 .................................. 32
1.3不同退火溫度的XRD繞射分析 ................................................................ 32
1.4接觸角分析 ................................................................................................. 33
2沉積10 nm金製作二氧化鈦基表面增強拉曼基板 .............................................. 34
2.1 SEM影像分析 ............................................................................................ 34
2.2紫外光–可見光吸收光譜分析 .................................................................... 36
2.3接觸角分析 ................................................................................................. 37
2.4表面增強拉曼強度分析 .............................................................................. 38
2.5濃度與表面增強拉曼強度關係 .................................................................. 41
3沉積20 nm金製作二氧化鈦基表面增強拉曼基板 .............................................. 42
3.1 SEM影像分析 ............................................................................................ 42
3.2紫外光–可見光之吸收光譜分析 ................................................................ 43
3.3接觸角分析 ................................................................................................. 44
3.4表面增強拉曼強度分析 .............................................................................. 45
3.5濃度與表面增強拉曼強度關係 .................................................................. 46
4退火溫度對金之表面拉曼增強效應之影響 .......................................................... 47
4.1 SEM影像分析 ............................................................................................ 47
4.2紫外光–可見光之吸收光譜分析 ................................................................ 49
4.3接觸角分析 ................................................................................................. 50
4.4表面增強拉曼強度分析 .............................................................................. 51
4.5濃度對表面增強拉曼強度關係 .................................................................. 52
5沉積20 nm銀製作二氧化鈦基表面增強拉曼基板 .............................................. 52
5.1 SEM影像分析 ............................................................................................ 53
5.2紫外光–可見光之吸收光譜分析 ................................................................ 54
5.3接觸角分析 ................................................................................................. 55
5.4表面增強拉曼強度分析 .............................................................................. 56
5.5濃度對表面增強拉曼強度關係 .................................................................. 58
6退火溫度對銀之表面拉曼增強效應之影響 .......................................................... 58
6.1 SEM影像分析 ............................................................................................ 59
6.2紫外光–可見光吸收光譜分析 .................................................................... 62
6.3接觸角分析 ................................................................................................. 65
6.4表面增強拉曼強度分析 .............................................................................. 68
6.5濃度對表面增強拉曼強度關係 .................................................................. 68
參考文獻 ..................................................................................................................... 70
第四章 結論與未來展望 .................................................................................................... 71

                                

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