非準直系統下Shack-Hartmann波前檢測器的校正補償｜國立中央大學博碩士論文系統

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研究生：	陳琮夫 Tsung-Fu Chen
論文名稱：	非準直系統下Shack-Hartmann波前檢測器的校正補償 The Calibration of Non-collimating Shack-Hartmann Wavefront Sensor
指導教授：	梁肇文 Chao-Wen Liang
口試委員:
學位類別：	碩士 Master
系所名稱：	理學院 - 光電科學與工程學系 Department of Optics and Photonics
論文出版年：	2014
畢業學年度：	102
語文別：	中文
論文頁數：	63
中文關鍵詞：	Shack-Hartmann 波前檢測器、波前補償
外文關鍵詞：	Shack-Hartmann Wavefront Sensor, Calibration
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本篇論文主要提出一個方法改進傳統的 Shack-Hartmann 波前檢測器。
此非準直系統下的量測系統大幅的減少系統中光學元件的數量，改善下列幾個傳統 Shack-Hartmann 波前檢測系統的幾樣缺點，以達到跟傳統Shack-Hartmann 波前檢測系統有相同效果：（1）光學元件自身帶有的像差（2）校準系統過程中光學元件錯位影響導致其他像差引入量測結果（3）縮短不同 NA 的量測鏡片時置換匹配的光學元件耗損的時間。

This thesis provide a new method improving the classical Shak-Hartmann wavefront sensor system(SHWS).
Compare with the classical SHWS system, there are two advantages in this new measurement system :
1. Avoiding the wavefront aberration error by removing the collimator lens and the optical elements of the image system in the SHWS.
2. Increasing the measurement efficiency during we replace tested lens with different numerical aperture .

目錄 
中文摘要 .................................................. i
Abstract................................................. ii
致謝.................................................... iii
目錄   ................................................... v
圖目錄 .................................................. vii
表目錄 .................................................... x
第一章 緒論
1-1 研究動機............................................... 1
1-2 歷史回顧............................................... 3
第二章 基本原理
2-1 像差介紹............................................... 5
2-1-1 波前像差............................................. 6
2-1-2 橫向像差............................................. 6
2-1-3 光點圖............................................... 7
2-1-4 Zernike Polynomial ................................. 9
2-1-5 初階像差介紹......................................... 10
2-1-6 補償原理............................................ 11
2-2 Classical Shack-Hartmann Wavefront Sensor............ 13
2-2-1 SHWS 的工作原理..................................... 13
2-2-2 Lensarray size and dynamic range .................. 15
2-2-3 Shack-Hartmann 量測架構 ............................ 17
2-3 Non-collimating Shack-Hartmann Sensor ............... 18
2-3-1 Non-collimating SHWS 系統架構........................18
2-3-3 Non-collimating SHWS 工作原理....................... 19
第三章 元件校準與模擬
3-1 微型透鏡陣列和 CCD的校準................................ 20
3-2 微型透鏡陣列座標系的建立................................. 25
3-2-1 絕對座標系的建立...................................... 25
3-2-2 座標系對位方法....................................... 27
3-3 Centroiding algorithm................................ 28
3-4 光學軟體模擬........................................... 30
第四章 實驗與數據分析
4-1 鏡片樣品量測........................................... 33
4-1-1 Effect of the calibration ......................... 34
4-1-2 Fizeau interferometer Measurement.................. 37
4-2 精準性（Precision）和精確性（Accuracy）.................. 40
4-2-1 精確性（Precision） ................................ 41
4-2-2 精準性（Accuracy）.................................. 41
4-3 2.5 吋物鏡組量測....................................... 43
第五章 結論
5-1 實驗總結.............................................. 45
5-2 未來展望.............................................. 46
Reference ............................................... 47

                                

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