在本篇論文中，我們使用C語言，建立一套可以精確模擬半導體元件之網格，其為增點式立方體網格。我們發現在傳統立方體網格在不同接面方向上會造成誤差，為此我們設計此一新的網格。接著使用簡易電阻做理論計算，並與模擬值結果比較來驗證，確認此新式網格的可行性。最後，將增點式網格應用在二極體、圓弧接面及內含氧化區塊之半導體，並將這些應用做理論的推導與程式模擬結果做比較分析，所有模擬證實此增點式網格的可靠度。

In this thesis, we use C language to develop a new point-added cube element for 3D device simulation. We found that the traditional cube element cause errors due to the low accuracy. For this reason we design a point-added cube element. We compared the traditional cube element with the point-added cube element. A simple resistor will be used to verify our result with theoretical value. Finally, we applied the point-added cube element to PN diodes and 3D semiconductor including an internal oxide block. The simulation results match the theoretical derivation.

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