摘 要
在微細加工的領域中，微細放電加工法可有效地用來製造孔徑小於100μm的微細孔，但以微細放電加工法在金屬板上製作微細孔時，因孔壁的表面會形成再鑄層，其包含了微裂痕與放電坑等缺陷，孔壁表面粗度不佳，嚴重影響微細孔的品質。
因此，本研究擬以高鎳合金為工件材料，結合微細放電與電解拋光兩種加工法，進行微細孔加工，期能改善在放電後的高鎳合金微細孔的孔壁表面品質，使其符合精密工業的需求。
由實驗結果顯示，採用電解拋光法加工微細孔時，孔壁表面可獲得顯著的拋光效果。以放電電流500mA加工後的微細孔為例，在輸入電解電壓2V、電極不轉動、電解液濃度比例1：10、電解液不流動、加工時間約5分鐘時，即可獲得孔壁表面平整光滑的微細孔。此法亦可應用於各式微細異形孔的孔壁表面之改善。

Abstract
Micro-holes with diameter less than 100μm can be effectively fabricate by micro-EDM in micro-machining. But using micro-EDM to manufacture micro-holes on metal plate, the recast layer include micro-crack and crater was formed on the hole-wall will lead to poor surface roughness to affect quality of micro-hole seriously.
For this reason, the Hymu-80 was chosen as the workpiece material in this study, using micro-EDM combined with electropolishing to machine micro-holes. It expected to improve the quality of micro-holes after EDM to satisfy the precision engineering. The results showed that, using electropolishing to machine the surface of the hole-wall could obtain obviously improvement.

參 考 文 獻
1. Seong.S.Choi , Jung , D.W.Kim , M.A.Yakshin , J.Y.Park , Y.Kuk , “Frabrication and microelectron gun arrays using laser micromachining” , Microelectronic Engineering , 41/42 ,pp167-170, 1998.
2. D. M. Allen, A. Lecheheb ,”Micro electro-doscharge machining of ink jet nozzles : optimum selection of material and machining parameters” , Journal of Materials Processing Technology , 58 , pp53-66 , 1996.
3. T, Masuzawa, J. Tsukamoto and M. Fujino;I.I.S., “Drilling of Deep Microholes by EDM” , Annals of the CIRP , 38 , 1 , pp.195-198, 1989.
4. T, Masuzawa , M. Fujino , K. Kobayashi and T.Suzuki, “Wire Electro-Discharge Grinding for Micro-Machining “ , Annals of the CIRP, 34 , 1 , pp.431-434 ,1985.
5. K.Kagaya , Y.Oishi,K.Yada , “Micro-electrodischarge machining Using Water as a working Fluid-2: Narrow Slit Fabrication “, Precision Engineering , 12 , 4 , pp.213-217 , 1990.
6. Xi-Qing Sun , T.Masuzawa , M.Fjino ,” Micro ultrasonic machining and its applications in MEMS”, Sensors and actuators, A57 , pp159-164 , 1996.
7. W. Ehrfeld and H. Lehr ,” Deep X-Ray Lithography for the production of three-dimensional microstructures from metals, polymers and ceramics “ , Radiat .Phys.Chem Vol.45 No.3 pp349-365 , 1995.
8. Domoiniek Reynaerts , Paul-Henri’s Heeren , Hendrik Van Brussel , “Microstructuring of silicon by elelctro - discharge machining(EDM) Part I : theory “, Sensors and actuators , A60 , pp.212-218 , 1997.
9. C.L. Kuo and T. Masuzawa ,“ A Micro-Pipe Fabrication Process”, Proc. Of IEEE MEMS’91 , pp.80-85 , 1991
10. A.C.Wang, B.H.Yan, X.T.Li, F.Y.Huang, Use of micro ultrasonic vibration lapping to enhance the precision of microholes drilled by micro electro-discharge machining, International Journal of Machine Tools and Manufacture, Vol.42, pp. 915-923, 2002.
11. C.T.Yang, S.S.Ho and B.H.Yan, Micro Hole Machining of Borosilicate Glass through Electrochemical Discharge Machining, Key Engineering Materials, Vol.196, pp.149-166, 2001.
12. T.Masuzawa, M.Yamamoto and M.Fujino, “A Micropunching System Using Wire-EDM”, Proc. Of Int’l Symposium for Electromachining(ISME-9), pp.86-89, 1989.
13. T. Masuzawa , “An Approach to Micromachining through Machine Tool Technology” , Annals of the CIRP, 34 , 1 , pp.419-425,1985.
14. H. Ramasawmy and L. Blunt, “3D surface characterisation of electropolished EDMed surface and quantitative assessment of process variables using Taguchi Methodology”, International Journal of Machine Tools and Manufacture, Vol.42, pp. 1129-1133, 2002.
15. Iva Betova, Martin Bojinov and Tzvety Tzvetkoff,“Role of surface reactions in the transpassive dissolution of ferrous alloys in concentrated H3PO4”,Applied Surface Science, Vol. 220, pp. 273-287, 2003.
16. C.A. Huang, W. Lin and S.C. Lin, “The electrochemical polishing behaviour of P/M high-speed steel (ASP 23) in perchloric-acetic mixed acids” Corrosion Science, Vol. 45, pp.2627-2638, 1980.
17. V.B. Singh and Archana Gupta, “Active, passive and transpassive dissolution of In-718 alloy in acidic solutions”, Materials Chemistry and Physics, Vol. 85, pp.12-19, 2004.
18. 倉藤尚雄、鳳誠三郎著，鄒大鈞譯，“放電加工”，復漢出版社。
19. 陳建良著， ”結合微細放電與高頻抖動研磨之微孔加工研究” ，國立中央大學碩士論文，2003。
20. 蘇品書編著，“線切割放電加工”，復漢出版社。
21. 李東山著，“臥式微小放電加工機之開發與10μm以下微細電極加工之研究”，國立雲林科技大學碩士論文，1999。
22. 偕義弘著，”電解與磁力研磨之複合加工應用於內壁表面改善之研究”，國立中央大學論文，2003
23. S. Magaino, M. Matlosz and D. Landolt, “An Impedance Study of Stainless Steel Electropolishing ”, J Electrochem. Soc. Vol.140, No.5, pp.1365- 1372, 1993.
24. 謝逸凡著，”全靜不銹鋼電化學拋光表面特性研究” ，長庚大學碩士論文，2002。
25. M. Matlosz and D. Landolt, “Shape Changes in Electrochemical Polishing Part I: Anodic Leveling of Ni and Fe24Cr under Mass Transport Control”, J. Electrochem. Soc.,Vol.136, p.919, 1989.
26. 蘇品書譯著，”特殊加工” ，復漢出版社印行
27. 賴狄陽譯著，”應用電化學” ，復漢出版社印行
28. 劉晉春、趙家齊主編，”特種加工”，哈爾濱工業大學