本論文之主要目標為微環型陀螺儀分析，並建立一研究流程以此設計新型的微環型陀螺儀，目的在於藉由感測位移訊號以求得到轉速，並利用轉速與位移的靈敏度進行陀螺儀設計改良。本文首先以有限元素軟體ANSYS對不同外型的微環型振動壓電陀螺儀進行自由振動、位移及感測訊號分析。藉由改變常用的原始設計微環型陀螺儀之幾何參數與外型得到各種不同的陀螺儀，並進行陀螺儀驅動方向頻率與感測方向頻率模擬以找到二者差值較小的外型。接著預估不同驅動力大小的情況下是否造成吸附現象，並藉此判斷驅動電壓大小的選擇；最後對陀螺儀進行感測訊號分析，得到各轉速下的位移由轉速與位移的關係，並進行設計變更以改善轉速與位移的靈敏度，由數值結果得到改良型陀螺儀之設計，即原始陀螺儀之圓環寬度變窄且於內部加入支撐圓環設計，其感測位移較大即訊號較強、轉速與位移的靈敏度較好且驅動方向頻率與原始設計相近故驅動能量亦相近，此為本研究之較佳化設計。

This thesis presents the analysis of a micro ring-type gyroscope. Firstly, the natural frequencies of the gyroscope are calculated by using a finite element software ANSYS. Then, the transient response of the gyroscope is obtained for the amplitude of displacement in the sensing direction. The harmonic force must apply with the corresponding natural frequency in the driving direction in order to achieve the maximum sensing signal. Then, the design and the geometry of the original gyroscope are modified to give a gyroscope with improving characteristics.

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