光學濾波器，雖然不易觀察到，但在光學領域中，卻是最重要的，
它可以篩選出想要之波長，或是摒除不要之波長，而在傳統製作之濾
波器，都是利用薄膜堆積產生之干涉所達到濾波之效果，但由於其為
多層薄膜堆疊，因此相對而言製程容忍度低。本論文利用了新形式的
方式產生濾波的效果，其主要是利用次波長光柵加上波導在其相位匹
配時，會產生之共振情形，因而使得其穿透頻譜具有篩選波長的能
力，達到濾波的效果。
現今的台灣，全世界半導體的重鎮，對於製作在矽基版上面的
元件非常得心應手，現階段的製成對於製作次波長的線寬來說也不是
問題，而且已經朝向幾十奈米的線寬邁進。因此，本文利用目前已經
發展成熟的半導體製程技術與微光機電系統
（Micro-Optical-Electro-Mechanical-Systems，MOEMS）製程技術來
製作矽基版波導模態共振濾波器。而且由於其製作在矽基版上，容易
和其他矽基元件整合，因此可以容易整合成SoC（System on a Chip）系統。

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