本論文提出以高分子聚合物光波導製程適用於4通道 x 25-Gbps 低密度分波多工器(Coarse Wavelength Division Multiplexing)單模光學收發模組之光學引擎。此光學引擎之輸入端於矽基板上整合了分佈回饋式雷射(Distributed Feedback Laser)、高分子聚合物光波導陣列波導光柵(Polymer Waveguide Based Array Waveguide Grating)作為多工器；接收端於玻璃基板上整合了高分子聚合物光波導陣列波導光柵(Polymer Waveguide Based Array Waveguide Grating)作為解多工器、1 x 4陣列PIN光電二極體(1 x 4 Array PIN Photodiode)。此高分子聚合物四波長陣列波導光柵之輸入及輸出埠光學界面，包含輸入端：雷射與高分子聚合物光波導之界面、高分子聚合物光波導與單模光纖之界面；接收端：單模光纖與高分子聚合物光波導之界面、高分子聚合物光波導與1 x 4陣列PIN光電二極體之界面。上述光學界面之間皆無透鏡設計，藉以簡化封裝製程。且在最惡劣條件下，輸入端通道中傳輸光的能量為 -0.64 dBm大於MSA所規範至少 -6.5 dBm；接收端通道中傳輸光的能量為 -7.08 dBm大於MSA所規範至少 -11.5 dBm。
以黃光製程製作長直高分子聚合物光波導，並藉由控制<100>矽基板晶向面之劈裂方向創造自然劈裂面，取代傳統與光波導端面研磨製程。設計光波導為矩形光波導，但實際製程為鐘形光波導。量測光波導尺寸W × H = 12 × 12 um^2的長直高分子聚合物光波導其平均插入損耗為 -7.23 dB，而模擬值為 -4.45 dB；波導尺寸W × H = 12 × 7 um^2的長直高分子聚合物光波導其平均插入損耗為 -8.13 dB，而模擬值為 -5.25 dB；波導尺寸W × H = 7 × 7 um^2的長直高分子聚合物光波導其平均插入損耗為 -9.95 dB，而模擬值為 -8.26 dB。

In this thesis, a none-lens-coupling optical interfaces using polymer optical waveguides is proposed to simplify the optical system of Coarse Wavelength Division Multiplexing 4-channel optical transceiver (CWDM4 optical Tx/Rx) with an aggregate data rate of 100 Gbps. The optical interface at the transmitting end of CWDM4 optical Tx/Rx including 4-channel distributed feedback lasers aligned to a polymer-based 4-wavelength Array Waveguide Grating (AWG) Multiplexer integrated on the silicon substrate. Between Multiplexer and Demultiplexer, a single-mode fiber is adopted to align. The optical interface at the receiving end of CWDM4 optical Tx/Rx, a 4-channel PIN Photodiodes assembled on a glass substrate is aligned to the polymer-based 4-wavelength AWG Demultiplexer.
The results of numerical simulation show that the optical efficiencies at interfaces of transmitting and receiving ends are -0.64 and -7.08 dBm, respectively for the worst cases. Both values are superior to the specifications of -6.5 and -11.5 dBm of Multi-Source Agreement (MSA) of CWDM4 optical Tx and Rx, respectively.
The pattern of a straight polymer optical waveguide is developed using the photo-lithography process. By defining the end facets of waveguide parallel to the crystal plane direction of <100> silicon wafer and cleaving it along the <100> direction, the end facets of waveguide is formed directly without the polish process. Although the rectangular contour is designed for original waveguides, however bell-shaped optical waveguides is obtained due to over exposure in photo-lithography process. The average measured insertion losses of bell-shaped optical waveguides are -7.23, -8.13, and -9.95 dB for various end facets W×H of 12×12, 12×7, and 7×7 um2, respectively. The corresponding simulated results are -4.45, -5.25, and -8.26 dB, respectively.

[1] J.Clement, “Global number of internet users 2005-2018”, Statista. Jan 2019.
[2] 福永勇二，“MIS一定要懂的網路技術知識,旗標科技股份有限公司”，May 2018
[3] 李揚漢、許立根、洪鴻文、曹士林，“光纖通信網路”，教育部顧問室"通訊科技人才培育先導型計畫，2006
[4] 鄒志偉，“光纖通訊”，五南出版社，April 2011
[5] “Gigalight Optical Transceivers Catalog”, Shenzhen Gigalight Technology Co.,Ltd, August 2018
[6] Alice. Gui, “100G Optical Transceivers Links: PSM4 vs CWDM4”, http://www.cables-solutions.com/100g-optical-transceivers-links-psm4-vs-cwdm4.html , Feb 2017
[7] 林山霖，“平面光波導技術及其應用”，CTIMES，Feb 2003
[8] Yu LIU, Hao-tian BAO,Yi-ming ZHANG, “1.3-μm 4×25-Gb/s hybrid integrated TOSA and ROSA”, Frontiers of Information Technology & Electronic Engineering 2019
[9] Yoshiyuki,Manabu Oguma,Toshihide Yoshimatsu, “Compact High-Responsivity Receiver Optical Subassembly With a Multimode-Output-Arrayed Waveguide Grating for 100-Gb/s Ethernet” , Journal of Lightwave Technology 2015
[10] 王崗嶸， “光通訊主動元件產業現況及發展”，CTIMES，Sep 2001
[11] K.S. Yee, “Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media”, IEEE, 1966
[12] John Wiley & Sons, “Introduction to Optical Waveguide Analysis”, 2001
[13] Xin Chen, Jason E. Hurley, “Demonstration of Full System Reaches of 100G SR4, 40GsWDM, and 100G CWDM4 Transmissions over Universal Fiber”, IEEE, 2016
[14] T. Nakajima, T. Fukamachi, “25.8 Gbps Error Free Transmission over 10 km at Wavelength from 1271 to 1331 nm by Uncooled (25 to 85℃) Directly Modulated DFB Lasers for 100G-CWDM4”, Optical Society of America, 2015
[15] M.A. Wistey, S.R. Bank, H.B. Yuen, “Monolithic, GaInNAsSb VCSELs at 1.46 lm on GaAs by MBE”, ELECTRONICS LETTERS, 2003
[16] “241S-type Data Sheet”, AVAGO TECHNOLOGIES, 2016
[17] 李銘淵， “光纖通信概論第二版”，全華圖書，2009
[18] “LPD3030-4 Data Sheet”, BROADCOM, 2017
[19] “ITU-T G.652 Characteristics of a single-mode optical fibre and cable 9th”, International Telecommunication Union, 2016
[20] “Corning SMF-28 Ultra Optical Fiber Product Information”, Corning, 2014
[21] “Processing Guidelines – OrmoCore and OrmoClad”, Micro Resist Technology, 2016
[22] David Lewis, JDSU, “100G CWDM4 MSA Technical Specifications 2km Optical Specifications”, MSA, 2014
[23] A. Klehr, F. Bugge, G. Erbert, “High power broad area 808 nm DFB lasers for pumping solid state lasers”, Proc. of SPIE Vol. 6133, 2006
[24] Niranjan Sahu, B Parija, S Panigrahi, “Fundamental understanding and modeling of spin coating process : A review”, Indian J. Phys., 2009
[25] MOHAMMAD SYUHAIMI AB-RAHMAN, FAZLINDA AB-AZIZ, NOOR AZIE AZURA MOHD ARIF, “The study of the good polishing method for polymer SU-8 waveguide”, Optica Applicata, Vol. XXXIX, No. 3, 2009
[26] 蕭宏，“半導體製程技術導論 第二版”，全華圖書，2012