| 研究生: |
黃柏諭 Bo-yu Huang |
|---|---|
| 論文名稱: |
以奈米壓印改善陽極氧化鋁週期性 Fabrication of Periodic AAO Films Pre-Patterned by Nanoimprint Technology |
| 指導教授: |
李正中
Cheng-Chung Lee 陳昇暉 Sheng-Hui Chen |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程學系 Department of Optics and Photonics |
| 畢業學年度: | 96 |
| 語文別: | 中文 |
| 論文頁數: | 58 |
| 中文關鍵詞: | 奈米壓印 、陽極氧化鋁 |
| 外文關鍵詞: | nanoimprint, Anodic Aluminum Oxide, AAO |
| 相關次數: | 點閱:15 下載:0 |
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本篇論文利用奈米壓印系統和多次陽極處理改善磷酸型之陽極氧化鋁(Anodic Aluminum Oxide;AAO )孔洞的週期性。
首先我們分別嘗試重量百分濃度1wt%與5wt%以不同電壓(90V~180V)進行陽極處理,找出適合奈米壓印母模週期的參數後,將鋁片預先以適當溫壓進行壓印,之後再進行陽極處理,陽極處理次數為五次,透過多次陽極處理以及奈米預壓印可得到較整齊的大孔洞陽極氧化鋁膜,其光子能隙可落在可見光波段。
A nanoimprint system and multi-step anodization were applied to improve the arrangement of phosphoric acid type of anodic aluminum oxide (AAO).
The proper anodizing parameter to match the period of the stamp mold was found out experimentally. After that, the AAO film was carried out by 5-step anodization. The pore configuration was well arranged and could have photonic band gap in visible range.
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