雙光子聚合(Two-photon Polymerization, TPP)微製造技術由於可製作任意三維外形之微/奈米尺寸級之結構，因而逐漸受到矚目。目前主要的研究，集中在以添加式製造技術中常見的層加工方式(即所謂的2.5維度(2.5dimension)加工方法)來製作微結構。然而TPP微製造是屬於純三維加工技術，理應據此獨特性質發展一套創新方法，來提高製造效率與良率。首先利用實驗室所發展之製造微產品之電腦輔助製造系統產生雷射加工路徑檔案，該系統具有自動切層、規劃加工路徑以及體素大小設定等功能。本論文提出一種創新的想法為體素為基(voxel based)之雷射調整方法，利用高斯光束公式推導出不同能量之體素大小，本論文稱為能量均勻橢圓體，藉由此方法來提高微結構製成效率與品質。其次利用本論文所開發之軟體MicFom來進行雷射加工路徑模擬，研究內容包含能量均勻橢圓體(Energy Uniform Ellipsoid)重疊率之計算、雷射路徑加工模擬、最佳化模擬等。最後利用本實驗室設備製造出幾項微產品，以證明所提出之方式可以有效的提高微結構產品之製成效率與尺寸精準度。

The Two-photon Polymerization (TPP) micro-fabrication technique draws everyone’s attention gradually because of its fabrication capability of arbitrary-shaped and complex three-dimensional (3D) micro/nano-structures. Up to present, most of researches are used the layer-by-layer method, as known as two-and-half-dimensional (2½D) method which is a common manner in additive manufacturing technology, along one specific direction to produce 3D microstructures. However, the TPP micro-fabrication technique can produce microstructures in pure 3D way. This unique characteristic should be taken into account to develop a novel manner for increasing the manufacturing efficiency and yield. The final purpose of this research is developing a 3D and multi-scale (mm/μm/nm) micro-manufacturing method based on TPP micro-fabrication technique. First, a Computer-aided manufacturing (CAM) system with automatic slicing, path planning, voxel setting is developed for manufacturing of micro products by TPP. This paper prove a new way to improve the quality of micro-structure. Second, using the software to simulation the laser paths. Study of research content, including calculate the overlap of energy uniform ellipsoid. Simulation the laser paths. Optimization laser paths. In the end, fabricating micro-structure by TPP to prove that the proposed method can effectively improve the efficiency of micro-structure and size of products made of precision.

[1] Goepper, M.-M., “ Elementary processes with two quantum jumps” , Annalen der Physik, Vol. 9, No. 2, pp. 273-294, 1931.
[2] Kaiser, W. and Garrett, C. -G., “ Two-photon excitation in CaF2:Eu2+” , Physical Review Letters, Vol. 7, No. 6, pp. 229-231,1961.
[3]潘恩亞、蒲念文、董玉平與游漢輝，「雙光子吸收光致聚合技術應用於微元件製作之研究」，中正嶺學報，34卷，1-16頁，2005。
[4] Maruo, S. and Kawata, S.,“Two-photonabsorbed near-infrared photopolymerization for three-dimensional microfabrication”, Journal of Microelectromechanical Systems, Vol.7, No.4, pp.411-415, 1998.
[5] Maruo, S., Nakamura, O. and Kawata, S., “Three-dimensional microfabrication with two-photon-absorbed photopolymerization”, Optics Letters, Vol. 22, pp. 132-134 ,1997.
[6] Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B. -N., Houbertz, R., Domann, G., Schulz J., Cronauer, C., Frohlich, L. and Popall, M., “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics”, Optics Letters, Vol. 28, pp. 301-1303, 2003.
[7]Maruo, S., Ikuta, K., and Korogi, H., “Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography”,Journal of Microelectromechanical Systems, Vol. 12, pp. 533-539 , 2003.
[8] Maruo, S. and Inoue, H., “Optically driven micropump produced by three-dimensional two-photon microfabrication”, Applied Physics Letter , 89 , 144101.
[9] Lin, C.-L., Lee, Y.-H., Lin, C.-T., Liu, Y.-J., Hwang, J.-L., Chung, T.-T. and Baldeck, P. L., “Multiplying optical tweezers force using a micro-lever” , Optics Express , Vol.19 , pp.20604-20609 , 2011.
[10] Baldeck, P.L., Lin, C.-L., Lin, Y.-S., Lin, C.-T., Chung, T.-T., Bouriau, M. annd Vitrant, G., “Optically driven archimedes micro-screws for micropump applications: multiple blade design” , Proceedings of the SPIE , Vol.8097 , pp.809713-809713-5,2011.
[11] Cumpston, B.H., Ananthavel, S.P., Barlow, S., Dyer, D.L., Ehrlich, J.E., Erskine, L.L., Heikal, A.A., Kuebler, S.M., Lee, I.Y.S., McCord-Maughon, D., Qin, J.Q., Rockel, H., Rumi, M., Wu, X.L., Marder, S.R. and Perry, J.W., “Two photon polymerization initiators for three-dimensional optical data storage and microfabrication” , Nature , Vol.398 , pp.51–54 , 1999.
[12] Borisov, R.A., Dorojkina, G.N., Koroteev, N.I., Kozenkov, V.M., Magnitskii, S.A., Malakhov, D.V., Tarasishin, A.V., and Zheltikov, A.M., “Fabrication of three-dimensional periodic microstructures by means of two-photon polymerization” , Applied Physics, Vol.67, pp.765–767 , 1998.
[13] Sun, H.-B., Matsuo, -S. and Misawa, H., “Three-dimensional photonic crystal structures achieved with two-photonabsorption photopolymerization of resin” , Applied Physics Letter , 74 , pp.786–788 , 1999.
[14] Deubel, M., Von Freymann, G., Wegener, M., Pereira, S., Busch, K. and Soukoulis, C.M., “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications” , Nature Mater , Vol. 3 , pp.444–447 , 2004.
[15] Guo, R., Li, Z.Y., Jiang, Z.W., Yuan, D.J., Huang, W.H. and Xia, A.D., “Log-pile photonic crystal fabricated by twophoton photopolymerization” , Journal of Optics:Pure and Applied Optics , Vol.7, pp.396–399 , 2005.
[16] Serbin, J., Ovsianikov, A. and Chichkov, B., “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties” , Opical Express , Vol.12 , pp.5221–5228 , 2004.
[17] Kaneko, K., Sun, H.B., Duan, X.M. and Kawata, S., “Submicron diamond-lattice photonic crystals produced by twophoton laser nanofabrication” , Applied Physics Letter , Vol.83 , pp.2091–2093 , 2003.
[18] Deubel, M., Wegener, M., Kaso, A. and John, S., “Direct laser writing and characterization of “slanted pore” photonic crystals” , Applied Physics Letter , Vol. 85 , pp.1895–1897 , 2004.
[19] Seet, K.K., Mizeikis, V., Matsuo, S., Juodkazis, S. and Misawa, H., “Three-dimensional spiral-architecture photonic crystals obtained by direct laser writing” , Advanced Materials , Vol.17 , pp.541–545 , 2005.
[20] Seet, K.K., Mizeikis, V., Juodkazis, S. and Misawa, H., “Three-dimensional horizontal circular spiral photonic crystals with stop gaps below 1μm” , Applied Physics Letter , Vol. 88 , pp. 221101 , 2006.
[21] Grossman, N., Ovsianikov, A., Petrov, A., Eich, M. and Chichkov, B., “Investigation of optical properties of circular spiral photonic crystals” , Optical Express , Vol.15 , pp.13236–13243 , 2007.
[22] Deubel, M., Wegener, M., Linden, S., von Freymann, G. and John, S., “3D-2D-3D photonic crystal heterostructures fabricated by direct laser writing” , Optical Letter , Vol.31 , pp.805–807 , 2006.
[23] Tetreault, N., Von Freymann, G., Deubel, M., Hermatschweiler, M., Perez-Willard, F., John, S., Wegener, M. and Ozin, G.A., “New route to three-dimensional photonic bandgap materials: silicon double inversion of polymer templates” , Advanced Materials , Vol.18 , pp.457–460 , 2006.
[24] Kawata, S., Sun, H.-B. , Tanaka, T. and Takada, K., “Finer features for functional microdevices” , Nature , Vol.412 , pp.697-698 , 2001.
[25] Wang, I., Bouriau, M., Baldeck, P.L., Martineau, C. and Andraud, C., “Three-dimensional microfabrication by two-photon-initiated polymerization with a low-cost microlaser” , Optics Letters , Vol.27 , pp.1348-1350 , 2002.
[26] Wu, S.H., Serbin, J., and Gu, M., “Two-photon polymerisation for three-dimensional micro-fabrication” , Journal of Photochemistry and Photobiology A:Chemistry , Vol.181 , pp. 1-11 , 2006.
[27] Sun, H.-B., and Kawata, S., “Two-photon laser precision microfabrication and it’s applications to micro-nano devices and systems” , Journal of Lightwave Technology, Vol. 21, pp. 624-633, 2003.
[28] Kawata, S., and Sun, H.-B., 2003, “Two-photon photopolymerization as a tool for making micro-devices” , Applied Surface Science , Vol.208-209 , pp. 153-158.
[29] Park, S.-H., Lee, S.-H., Yang, D.-Y., Kong, H.-J. and Lee, K.-S., “Subregional slicing method to increase three-dimensional nanofabrication efficiency in two-photon polymerization” , Applied Physics Letter , Vol.87 , pp.154108-154108-3, 2005.
[30] Liao, C.-Y., Bouriauand, M., Baldeck, P. L., Léon, J.-C., Masclet, C., and Chung, T.-T., “Two-dimensional slicing method to speed up the fabrication of micro-objects based on two-photon polymerization” , Applied Physics Letter , Vol.91 , pp.033108-033108-3 , 2007.
[31] Fan, H., Liao, C.-Y., Léon, J.-C., Masclet, C., Bouriau, M., Baldeck, P. L. and Chung, T.-T., “2D/3D spiral hatching generation and surface roughness observation in TPP micro-fabrication” , in Proceedings of IDMME – Virtual Concept 2008, Beijing, China, 69IDMME, 2008.
[32] Hasegawa, T. and Maruo, S., “Two-photon microfabrication with a supercritical CO2 drying process toward replication of three-dimensional microstructures” , Micro-nanomechatronics and Human Science , pp.12–15 , 2007.
[33] Tseng, C.-L., “Design and fabrication of micro devices by two-photon polymerization technology” , Master Dissertation , National Taiwan University ,Taipei.
[34] https://en.wikipedia.org/wiki/Supercritical_fluid.
[35] Maruo, S. and Fourkas, J. T., “Recent progress in multiphoton microfabrication”, Laser & Photonics Reviews, Rev.2, No. 1-2, pp. 100-111, 2008.
[36] Park, S.-H., Kim, K.-H., Lim,T.-W., Yang, D.-Y. and Lee,K.-S., “Investigation of three-dimensional pattern collapse owing to surface tension using an imperfection finite element model” , Microeletronic Enginnering, Vol.85 , pp.432-439 ,2008.
[37] Takada, K., Sun, H.-B. and Kawata, S., “The study on spatial resolution in two-photon induced polymerization” , Proceedings of SPIE , Vol.6110 , pp.61100A-1-61100A-7 ,2006.
[38] Sun, H.-B., Suwa, T., Takada, K., Zaccaria, R. P., Kim, M.-S., Lee, K.-S. and Kawata, S., “Shape precompensation in two-photon laser nanowriting of photonic lattices” , Applied Physics Letter , Vol.85 , pp. 3708-3710 ,2004.
[39] Lim, T. W., Son, Y., Yang, D.-Y., Pham, T. A.,Kim, D.-P.,Yang, B.-I., Lee, K.-S., Park. S.U., “Net shape manufacturing of three-dimensional SiCN ceramic microstructures using an isotropic shrinkage method by introducing shrinkage guiders” , International Journal of Applied Ceramic Technology , Vol.5 ,pp.258-264,2008.
[40] Sun, H.-B., Takada, K., Kim, M.-S., Lee, K.-S. and Kawata, S., “Scaling laws of voxels in two-photon photopolymerization nanofabrication” , Applied Physics Letters , Vol.83 , pp. 1104-1106 , 2003.
[41] Park, S.-H., Lim, T.-W., Lee, S.-H., Yang, D.-Y., Kong, H.-J. and Lee, K.-S., “Fabrication of microstructures using double contour scanning (DCS) method by two-photon polymerization” , Polymer-Korea , Vol.29 , pp.146-150 , 2005.
[42] Yang, D.-Y., Park, S.-H., Lim, T.-W., Kong, H.-J., Yi, S.-W., Yang, H.-K. and Lee, K.-S., “Ultraprecise microreproduction of a three-dimensional artistic sculpture by multipath scanning method in two-photon photopolymerization” , Applied Physics Letters , Vol.90 ,pp.013113-013113-3 , 2007.
[43] Park, S.-H., Yang, D.-Y. and Lee, K.-S., “Two-photon stereolithography for realizing ultraprecise three-dimensional nano/microdevices” , Laser & Photonics Reviews , Vol.3 , pp.1-11,2009.
[44] Lim, T.-W., Park, S.-H., Yang, D.-Y., Yi, S.-W., Kong, H.-A. and Lee, K.-S., “Contour offset algorithm (COA) in nano replication printing (nRP) for fabricating nano-precision features” , Journal of Mechanical Science and Technology , Vol.19 , pp.2105-2111,2005.
[45] Lin, C.-T., Fan, H., Bouriau, M., Liao, C.-Y., Lin, C.-L.,Masclet, C., Leon, J.-C., Chung, T.-T., Baldect , P. L., “Simulation and correction of angular defects in two-photon lithography” , Journal of Photopolymer Science and Technology ,Vol.24 , PP.651-655,2011.
[46] Sun, H.-B., Maeda, M., Takada, K., Chon, J. W. M., Gu, M. and Kawata, S., “Experimental investigation of single voxels for kaser nanofabrication via two-photon photopolymerization”, Applied Physics Letters , Vol.83 , pp. 819-821, 2003.
[47] Lim, T.-W., Park, S.-H., and Yang, D.-Y., “Contour offset algorithm for precise patterning in two-photon polymerization” , Microelectronic Engineering , Vol.77 , pp. 382-388, 2005.
[48] Liao, C.-Y., “Product model creation and simulation for two-photon polymerization
micro-manufacturing” , Doctoral Dissertation , University of Joseph Fourier and National Taiwan University, France and Taiwan, 2008.
[49] Thiel, M., Fischer, J., Von Freymann, G., and Wegener, M., “Direct laser writing of three-dimensional submicron structures using a continuous-wave aaser at 532 nm” , Applied Physics Letters , No.22 , Vol.97 , pp. 221102- 221102-3, 2010.
[50] Lai, H.-C., “On the development of triangle meshes processing techniques for geometric models” , Doctoral Dissertation , National Central University, Taiwan, 2010.
[51]http://zh.wikipedia.org/wiki/%E9%AB%98%E6%96%AF%E5%85%89%E6%9D%9F.
[52]https//zh.wikipedia.org/wiki/%E5%A4%9A%E9%A1%B9%E5%BC%8F%E6%8F%92%E5%80%BC.