脈衝式離子源助鍍氟化鑭薄膜之研究｜國立中央大學博碩士論文系統

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研究生：	張逸謙 Yi-chien Chang
論文名稱：	脈衝式離子源助鍍氟化鑭薄膜之研究 The research of pulse ion beam-assisted deposition of lanthanum fluoride
指導教授：	李正中 Cheng-Chung Lee
口試委員:
學位類別：	碩士 Master
系所名稱：	理學院 - 光電科學與工程學系 Department of Optics and Photonics
畢業學年度：	97
語文別：	中文
論文頁數：	65
中文關鍵詞：	脈衝式、離子助鍍、氟化鑭
外文關鍵詞：	IAD, pulse, ion-assisted, LaF3
相關次數：	點閱：19 下載：0
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本研究以熱阻舟蒸鍍氟化鑭（LaF3）薄膜，輔以持續式或脈衝式離子助
鍍，主要探討此兩種離子源助鍍對於熱蒸鍍氟化鑭在紫外波段（190nm~350n
m）特性的影響，例如穿透率、折射率、光學耗損較持續式離子助鍍低14%，
脈衝離子助鍍能夠降低表面rms大約1/3消光係數等光學特性。利用脈衝式離
子源助鍍能夠使波長190nm時薄膜折射率由1.68上升至1.70、且因氟化鑭薄膜
的非均勻性得以改善而使光學厚度為1/2波長的穿透率回到基板。
另外觀察薄膜的微觀結構與結晶特性等，分析對薄膜特性的影響。利用
量測薄膜的光學特性、微觀結構、結晶特性等等，分析氟化鑭薄膜在紫外光
區產生光學耗損的原因，以了解持續性或脈衝式的離子助鍍在改善氟化鑭薄
膜膜質，且降低光學耗損上的差異。

Thermal boat evaporation was employed to prepare LaF3 single-layer coatings
for UV applications. Optical properties and microstructure, including transmittance,
index refraction, extinction coefficient, and surface properties, were measured by
spectrophotometer, ellipsometric, SEM, and AFM. With pulse mode IAD, we can
make lanthanum fluoride thin film to have higher packing density and decrease
annoying absorption at wavelength rage190 to 350nm caused by constant IAD.
With optimized parameters, refraction index of lanthanum fluoride thin film
was raised from 1.68 to 1.7 at 190nm, extinchomogeneity of tion coefficient was
reduced 14%, and surface roughness was reduced 1/3. Since thin film’s quality was
improved to reduce the inhomogeneous phenomenon, the transmittances of halfwave
optical thickness go back to the transmittance of substrate.

第一章 緒論.................................................................................................................. 1
1-1 前言...................................................................................................................................................................................1
1-2 文獻回顧..........................................................................................................................................................................1
1-3 實驗動機..........................................................................................................................................................................3
第二章 實驗原理.......................................................................................................... 6
2-1 熱阻舟蒸鍍原理...........................................................................................................................................................6
2-2 氟化鑭（LaF3）材料特性.........................................................................................................................................6
2-3 能帶間隙 （Energy Band Gap）............................................................................................................................7
2-4 持續式與脈衝式離子助鍍........................................................................................................................................8
第三章 實驗架構與量測儀器...................................................................................... 10
3-1 實驗流程....................................................................................................................................................................... 10
3-2 實驗架構....................................................................................................................................................................... 11
3-2-1 實驗前準備....................................................................................................................................................................11
3-2-2 蒸鍍系統.........................................................................................................................................................................12
3-2-3 脈衝式離子源系統.....................................................................................................................................................13
3-3 量測儀器....................................................................................................................................................................... 18
3-3-1 光學特性的量測...........................................................................................................................................................18
3-3-2 微觀結構的量測...........................................................................................................................................................19
3-3-3 實驗參數..........................................................................................................................................................................20
3-3-4 熱蒸鍍氟化鑭，未加離子助鍍.............................................................................................................................21
3-3-5 熱蒸鍍氟化鑭，輔以持續式氬離子助鍍.........................................................................................................21
3-3-6 熱蒸鍍氟化鑭，輔以脈衝式離子源...................................................................................................................22
第四章 實驗結果與討論............................................................................................. 24
4-1 氟化鑭穿透率光譜圖............................................................................................................................................... 24
4-1-1 熱蒸鍍氟化鑭，未加離子助鍍.............................................................................................................................24
4-1-2 熱蒸鍍氟化鑭，輔以持續式氬離子助鍍.........................................................................................................25
4-1-3 熱蒸鍍氟化鑭，輔以脈衝式氬離子助鍍.........................................................................................................28
4-2 氟化鑭折射率與消光係數..................................................................................................................................... 30
4-2-1 熱蒸鍍氟化鑭，輔以持續式氬離子助鍍.........................................................................................................30
4-2-2 熱蒸鍍氟化鑭，輔以脈衝式氬離子助鍍.........................................................................................................32
4-3 表面粗糙度[20] .............................................................................................................................................................. 34
4-3-1 未加離子助鍍...............................................................................................................................................................34
4-3-2 熱蒸鍍氟化鑭，輔以持續式氬離子助鍍.........................................................................................................35
4-3-3 熱蒸鍍氟化鑭，輔以脈衝式氬離子助鍍.........................................................................................................38
4-4 微觀結構....................................................................................................................................................................... 43
4-4-1 未施加離子助鍍..........................................................................................................................................................43
4-4-2 熱蒸鍍氟化鑭，輔以持續式氬離子助鍍.........................................................................................................44
4-4-3 熱蒸鍍氟化鑭，輔以脈衝式氬離子助鍍.........................................................................................................46
4-5 結晶狀態的分析........................................................................................................................................................ 49
4-5-1 持續式離子助鍍..........................................................................................................................................................50
V
4-5-2 脈衝式離子助鍍..........................................................................................................................................................52
第五章 結論................................................................................................................ 54
第六章 參考文獻........................................................................................................ 56

                                

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