| 研究生: |
何聰慧 Tsung-Hui Ho |
|---|---|
| 論文名稱: |
光學薄膜常數之計算 Optical constant calculation by envelope method |
| 指導教授: |
李正中
Cheng-Chung Lee |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學研究所碩士在職專班 Executive Master of Optics and Photonics |
| 畢業學年度: | 90 |
| 語文別: | 中文 |
| 論文頁數: | 115 |
| 中文關鍵詞: | 光學常數 、包絡法 |
| 外文關鍵詞: | optical constants, envelope method |
| 相關次數: | 點閱:15 下載:0 |
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光學薄膜的鍍製,最迫切的為得到穩定的光學特性,即希望在蒸鍍完成後立即知道薄膜的光學常數。本文研究的主要目的,即在於撰寫計算光學常數的應用程式,供鍍膜工程師們能夠快速的分析。本文採用C + + Builder 5.0程式語言做為程式開發之工具。
本文研究之方法,主要係以光學薄膜穿透率之監控圖為藍圖,以波包之方法所發展而得。本研究具體的提出以三次 Spline 雲形線為基礎的曲線密合之方法並視基板為有限厚度,考慮基板兩側多重的反射與透射之效應,可輕易的得到具相當精確度之膜層折射率與消光係數之波形。
To get the correct optical constants of the coated films immediately after coating is very important for coating process . The major purpose of this research is to write a computer program to calculate the optical constants , and the computer program can enable coating engineers to analysis the result of the coating quickly . Here I adopt the program language of C++ Builder 5.0 to develop the computer program of coating.
The main way of this research is using the monitoring curve as a database , and then developed from the curve fitting to computer program . The text not only specifies the method on the basis of cubic spline curve fitting , but also regards the substrate as finite , at the same time consider the effect of two-sided of the substrate in which multiple reflection and transmission take place . This program makes it easy to get the precise profile of the refractive index and extinction coefficient of the thin film .
1.H. A. Macleod , " Thin Film Optical Filters ", Chap. 9 Production method and
thin-film materials , Chap. 10 Layer uniformity and thickness monitoring ,
Adam Hilger Ltd.
2.李正中 編著 , " 薄膜光學與鍍膜技術 ", 第二章 基本理論 ,第十二章 薄膜厚度之均勻
性及鍍膜厚度之監控 , 第十三章 光學薄膜特性的量測 ,藝軒圖書出版社 , 台北 , 1999
3.R Swanepoel ., 1983 " Determination of the thickness and optical constants of
amorphous silicon ", J. Phy. E. Sci. Inst. 16, 1214-1222
4.J. C. Manifacier, J. Gasiot and J. P. Fillard, 1976, " A simple method for
determination of the optical constant n , k and the thickness of weekly
absorbing thin films ", J. Phy. E. Sci. Inst 9 , 1002-1004
5.J. P. Borgogno, F. Flory, P. Roche, B. Schmitt, G.. Albert, E. Pelletier, and
H. A.Macleod, 1984, " Refractive index and inhomogeneity of thin films ",
Appl. Opt. 23, 3567-3570
6.Bertrand Bovard., Fred J. Van Milligen., Michael J. Messerly ., Steven G.
Saex, and H. Angus Macleod., 1985, "Optical constants derivation for an
inhomogeneous thin film from in situ transmission measurements ",Apple. Opt.
24, 1803-1827.
7.Liou Y. Y., Lee C. C., Jaing C. C. and Chu C. W., 1995, " Determination of
the optical constant profile of thin weekly absorbing inhomogeneous films ",
Jpn. J. Appl. Phys. 34, 1952-1957.
8.A. V. Tikhonravov, et al " Influence of small inhomogeneities on the
spectral characteristics of single thin films ", 1997 Optical Society of
America, 7188-7198
9.M. Nowak , " Determination of optical constants and average thickness of
inhomogeneous-rough thin films using spectral dependence of optical
transmittgance ",Thin Solid Films 254 (1995) 200-210.
10.Dorian Minkov ., Ryno Swanepoel., 1993, " Computerization of the optical
characterization of a thin dielectric film ", Society of Photo-Optical
Instrumentation Engineers (12) 3333-3337.
11.Zhuomin M. Zhang ., " Optical properties of a slightly absorbing film for
oblique incidence " , 1999 Optical Society of America, 205-207.
12.Ivan Ohlidal ., Daniel Franta ., Miloslav Ohlidal ., and Karel Navratil., "
Optical characterization of nonabsorbing and weakly absorbing thin films
with the wavelengths related to extrema in spectral reflectances ", 2001
Optical Society of America, 5711-5717.
13.Erwin Kreyszig., 8th edition , " Advanced Engineering Mathematics ",
Chap. 17 , Chap.18
14.鄭明哲 編譯," 工程數值方法 ",第十章最小平方回歸法、第十一章內插法,全華科
技圖書股份有限公司,台北,1987
15.蔣崑旭 著," 數值方法 ",第四章差值法、第五章近似法,波前電腦圖書公司,
台北, 1987
16.袁帝文 編著," 應用數值方法 ",第六章數值內差、第七章曲線調適與近似值,
儒林圖書公司,台北,1997
17.劉裕永,1995," 光學薄膜之非均勻性研究 ",國立中央大學光電科學研究所博士論文