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研究生: 曾國偉
Kuo-Uei Tseng
論文名稱: 氮化銦鎵卅氮化鎵多層量子井發光二極體之電性研究
The electrical properties of InGaN/GaN MQWs LED
指導教授: 徐子民
Tu-Min Hsu
口試委員:
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
畢業學年度: 90
語文別: 中文
論文頁數: 61
中文關鍵詞: 氮化銦鎵卅氮化鎵多層量子井電容電壓量測
外文關鍵詞: MQW, C-V, InGaN/GaN
相關次數: 點閱:12下載:0
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  • 本篇論文主要是針對氮化銦鎵卅氮化鎵多層量子井發光二極體(In0.23Ga0.77N/GaN MQWs LED)的結構以電容電壓量測與導納量測探討其電性。
    在本研究中,主要是利用電容電壓量測檢測多層量子井中的載子分佈情形。並分析在不同溫度與量測頻率的條件下,載子凍結與樣品所含的缺陷對於電容電壓量測之影響。另外,利用空乏近似法的計算來模擬電容電壓譜線,並探討在氮化銦鎵卅氮化鎵異質結構中所產生的壓電場效應,對於多層量子井的能帶結構與載子分佈所帶來的影響。
    而由導納量測的結果發現,樣品中含有來自於n型摻雜的矽(Si)、p型摻雜的鎂(Mg)和一個可能與氮空缺(N-vacancy)有關的缺陷。


    We use capacitance-voltage measurement and admittance spectroscopy to study the electrical properties of InGaN/GaN MQWs LED.
    We use C-V measurement to study the carrier distribution of MQWs. And we analyze the influence of the carrier freeze-out and defect on the different temperature and frequency C-V measurement. Besides, we study the influence of piezoelectric field on the band profile and carrier distribution of MQWs by depletion approximation.
    Then we found the n type dopant (Si), the p type dopant (Mg), and the defect N-vacancy related with admittance measurement.

    第一章:簡介 第二章:基本原理 2-1 電容電壓量測 2-2 電容電壓譜線的近似計算 2-2-1 單層量子井之計算 2-2-2 多層量子井加入壓電場之計算 2-3 導納量測 第三章:樣品結構及實驗裝置 3-1樣品結構 3-2實驗裝置 第四章:實驗結果與討論 4-1電容電壓量測 4-1-1 不同溫度之電容電壓量測 4-1-2 不同量測頻率之電容電壓量測 4-2 載子分佈圖 4-3不同樣品之電容電壓量測 4-4 導納量測 第五章:結論 參考文獻

    [1] S. Nakamura, M. Senoh, N. Iwasa, S. Nagahama, T. Yamada, and T.Mukai, Jpn. J. Appl. Phys. Part2 34, L1332 (1995).
    [2] S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T.Matsushita, Y. Sugimoto, and H. Kiyoku, Appl. Phys. Lett. 69, 4056 (1996).
    [3] Norio Yamamoto, Kiyoyuki Yokoyama, and Mitsuo Yamamoto, Appl. Phys. Lett. 62, 252 (1993).
    [4] X. Letartre, and D. Stievenard, J. Appl. Phys. 69, 7912 (1991).
    [5] P. N. Brounkov, T. Benyattou, and G. Guillot, J. Appl. Phys. 80, 864 (1996) .
    [6] C. R. Moon, In Kim, Jeong Seok Lee, and Byung-Doo Choe, Appl. Phys. Lett. 70, 3284 (1997).
    [7] C. R. Moon, and Byung-Doo Choe, J. Appl. Phys. 84, 2673 (1998).
    [8] C. R. Moon, and Byung-Doo Choe, Appl. Phys. Lett. 72, 1196 (1998).
    [9] C. R. Moon, and H.Lim, Appl. Phys. Lett. 74, 2987 (1999).
    [10] C. R. Moon, Byung-Doo Choe, S. D. Kwon, and H.Lim, Appl. Phys. Lett. 70, 2987 (1997).
    [11] See for example, D. V. Lang, J. Appl. Phys. 45, 3023 (1974).
    [12] S. M. Sze, SEMICONDUCTOR DEVICES Physics and Technology; (Wiley, New York, 1985).
    [13] V. Swaminathan, and A. T. Macrander, Materials Aspects of GaAs and InP Based Structures; (1991).
    [14] W. -H. Chang, Ph.D. thesis, Department of Physics, National Central University Taiwan, 2001.
    [15] J. L. Sánchez-Rojas, J. A. Garrido, and E. Muňoz, Phys. Rev. B 61, 2773 (2000).
    [16] C. Y. Lai, T. M. Hsu, W. -H. Chang, K.-U. Tseng, C. -M. Lee, C. -C. Chuo, and J. -I. Chyi, J. Appl. Phys. 91, 531 (2002).
    [17] D. V. Singh, K. Rim, T. O. Mitchell, J. L. Hoyt, and J.F. Gibbons, J. Appl. Phys. 85, 985 (1999).
    [18] Y. C. Yeo, T. C. Chong, and M. F. Li, J. Appl. Phys. 83, 1429 (1998).
    [19] A. S. Barker, and M. Ilegems, Phys. Rev. B7 743 (1973).
    [20] W. Götz, N. M. Johnson, C. Chen, H. Liu, C. Kuo, and W. Imler, Appl. Phys. Lett. 68, 3144 (1996).
    [21] D. C. Look, D. C. Reynolds, J. W. Hemsky, J. R. Sizelove, R. L. Jones, and R. J. Molnar, Appl. Phys. Lett. 79, 2570 (2001).
    [22] W. Götz, N. M. Johnson, C. Chen, H. Liu, C. Kuo, and W. Imler, Appl. Phys. Lett. 68, 3144 (1996).
    [23] Y. J. Wang, R. Kaplan, H. K. Ng, K. Doverspike, D. K. Gaskill, T. Ikedo, H. Amano, and I. Akasaki, J. Appl. Phys. 79, 8007 (1996).
    [24] D. J. Kim, D. Y. Ryu,N. A. Bojarczuk, J. Karasinski, S.Guha, S. H. Lee, and J. H. Lee, J. Appl. Phys. 88, 2564 (2000).
    [25] J. W. Huang, T. F. Kuech, Hongqiang Lu, and Ishwara Bhat Appl. Phys. Lett. 68, 2392 (1996).
    [26] Z. -Q. Fang, D. C. Look, P. Visconti, D. -F. Wang, C.-Z Lu, H. Morkoc, S. S. Park, and K. Y. Lee, Appl. Phys. Lett. 78, 2178 (2001).

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