由於絕對式測長具有在量測長度時不須移動量測物體的優點，因此廣泛
運用於大尺度的量測之上，如飛機、工廠等等長距離的量測，論文中採
用波長掃描外差干涉術(Wavelength scanning heterodyne
interferometery)，至於干涉光源的選用，則是運用雷射二極體(laser diode)
易於調變波長的特性來達到波長掃描的能力。
論文將研究著重於短距離的量測，並藉由適當的精度估算選擇適當
的量測架構，最後採用波長儀來量測雷射二極體的波長；並藉由誤差分
析考慮了空氣色散特性、餘弦誤差、整型稜鏡以及光源波長不穩定性對
於量測結果的精度影響，最後經實驗本系統在公分等級的量測精度為
2.82×10-5，且解析度可達1μm。並將此系統運用於玻璃折射率的量測，
且經過誤差分析得知量測折射率的精度小於0.5﹪。

Abstract
In this paper, using the wavelength scanning heterodyne method to
establish the absolute distance interferometer (ADI), in this ADI system
applied the tunable external cavity laser diode to achieve the wavelength
scanning instead of using many laser in the ADI system.
By using some analysis we chose the wavemeter to measure the
wavelength of the laser diode and after the error analysis we calculated the
effect of air dispersion、the cosine error、the anamorphic prism pair and the
wavelength unstable to the ADI system.
In the ADI system, this research focus on the distance in the range of
10-2 meter order and by the experiment got the result of 1-micrometer
resolution and accuracy of 2.85×10-5.
Finally also applied the ADI system to measure the index of some kinds
of glass, and after the analysis the accuracy of index measurement is smaller
then 0.5﹪.

43
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