| 研究生: |
丁于真 Yu-Chen Ting |
|---|---|
| 論文名稱: |
氮化鎵光子晶體共振腔 |
| 指導教授: |
陳啟昌
Chii-Chang Chen |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程學系 Department of Optics and Photonics |
| 畢業學年度: | 93 |
| 語文別: | 中文 |
| 論文頁數: | 79 |
| 中文關鍵詞: | 共振腔 、光子晶體 、氮化鎵 |
| 外文關鍵詞: | GaN, resonator, Photonic crystal |
| 相關次數: | 點閱:6 下載:0 |
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本論文中,以有限差分時域法與平面波展開法模擬分析氮化鎵光子晶體結構與特性,利用電子束微影技術定義出所設計尺寸,再以乾蝕刻方式將圖樣轉移至氮化鎵材料上,成功製作出氮化鎵二維光子晶體結構,在此利用二維光子晶體結構在平面上當作共振腔,有效抑制二維平面上之自發輻射,使光有效侷限於結構中缺陷的位置,並架設微光致螢光系統,量測氮化鎵二維光子晶體共振腔之光致螢光光譜,由最後結果可發現經由二維光子晶體共振腔的製作,其光致螢光光譜之譜線與未做光子晶體結構之氮化鎵光致螢光光譜譜線之明顯差異,
在此論文中成功量得氮化鎵光子晶體之缺陷模態。在共振波長的光譜強度明顯有增益現象並且半高寬縮小至約為3nm左右。
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