聲波感測元件的基本原理是利用聲波與物質作用時，將影響聲波波傳的傳遞性質，所造成的特性變化可用來感測某一特定性質之物理量。從理論上推斷，在不同的波速對於液體的感測靈敏度有影響，但最大的影響是在於不同角度上由於晶格排列的不同，所引起波傳模態亦將有所不同，不同的波傳模態與物質之間的作用，其影響會有很大的差異。
本文提出藉由雷射超音波量光學檢測技術，針對非等向性矽晶片<1,0,0>材料進行不同角度的波速測量，利用所得的結果，探討矽晶片在不同角度的波速與波傳模態對蘭姆波(Lamb Wave)的影響，期以找出作為液體感測器，對不同液體性質的感測有最佳的靈敏度。
利用Nd：YAG 雷射激發矽晶片彈性應力波，以雷射刀緣量測技術測得材料的表面波波速，此非接觸式光學檢測法可獲得精確的量測值。實驗結果得知，非等向性矽晶片基板在各個不同角度的方向上，最大的波速與最小的波速差大約在10% ~20%左右。相關理論、系統架設方法、實驗程序及量測結果等將有詳盡之說明。
製作矽基FPW 聲波感測元件，其中也說明元件設計基本原理、製程製作及量測結果討論。對於FPW 元件應用在液體黏滯度及質量負載之檢測理論及靈敏度計算等進行簡單的推導。同時亦製作出具輕巧、即時且易於操作的FPW 液體質量量測的電子系統雛型，亦可應用於黏滯度的量測，該系統可激發聲波信號，並測得經過FPW 元件後衰減的訊號頻率及相位偏移量。利用此雛型及所製作的FPW 元件，進行液體質量與相位變化的測試實驗，實驗結果發現液體質量增加，相位差成正比變化。
最後，從構想提出到理論探討、設計、製程實驗到電子系統製作及測試，已初步完成了整個系統建構，包括：
1.以雷射超音波波速檢測技術，對<1,0,0>晶格方向的非等向性矽基材量測出不同角度的波速。
2.初步完成FPW 聲波感測元件及其應用在流體偵測的系統雛型。

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