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研究生： 吳忠諭
Chung-Yu Wu
論文名稱： 光纖通訊用彈道傳輸單載子光偵測器超高速和高功率的表現
指導教授： 許晉瑋
Jin-Wei Shi
口試委員:
學位類別： 碩士
Master
系所名稱： 資訊電機學院 - 電機工程學系
Department of Electrical Engineering
畢業學年度： 93
語文別： 中文
論文頁數： 61
中文關鍵詞： 行波式光偵測器 、單載子傳輸光偵測器
外文關鍵詞： Traveling Wave Type Photodiode, Uni-Traveling-Carrier Photodiode
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    • 高速光偵測器最重要的指標為輸出功率¬-頻寬乘積，一般傳統的p-i-n 光偵測器，在高功率操作時，因為外加電場被內部光激發載子所感應的空間電場遮蔽所以會有速度表現變差，輸出功率無法上升的缺點，然而這缺點可經由使用將吸光層轉移到p型參雜層的單載子傳輸光偵測器來獲得解決，但此單載子傳輸光偵測器卻依然面臨 電子速度因過大的外加偏壓而降低及最大功率/效率和頻寬在面積上的互相牴觸。
    本論文提出一種新穎的元件結構—近彈道傳輸單載子光偵測器(Near-Ballistic Uni-Traveling Carrier Photodiode) 來克服單載子傳輸光偵測器所遭遇的問題並配合光波導的結構設計，近彈道傳輸單載子光偵測器可達到破世界紀錄的效率、頻寬和輸出RF功率。

    摘要.........................................Ⅲ 致謝........................................ Ⅳ 目錄.........................................Ⅵ 圖目錄.......................................Ⅷ 表目錄.......................................XI 第一章、序論 ◎ 1.1光纖通訊之發展趨勢............................... 1 ◎ 1.2光偵測器之發展與應用..............................5 ◎ 1.3論文動機與架構....................................7 第二章、彈道傳輸單載子光偵測器設計......................8 ◎ 2.1 傳統P-I-N光偵測器工作原理........................8 ◎ 2.2 單載子傳輸光偵測器工作原理......................11 ◎ 2.3 彈道傳輸單載子光偵測器之磊晶層設計..............15 ◎ 2.4 彈道傳輸單載子光偵測器之幾何結構................19 ◎ 2.5 光波導之模擬與設計..............................23 第三章、彈道傳輸單載子光偵測器之製作...................26 ◎ 3.1彈道傳輸單載子光偵測器之製程.....................26 ◎ 3.2 P-Type 金屬製作.................................29 ◎ 3.3定義主動區.......................................30 ◎ 3.4 N-Type 金屬製作.................................32 ◎ 3.5 定義光波導區域..................................34 ◎ 3.6 元件平坦化與鈍化層成長..........................37 ◎ 3.7 傳導金屬接線製作................................41 ◎ 3.8 晶片研磨與劈裂..................................42 第四章、彈道傳輸單載子光偵測器之量測與結果討論.........43 ◎ 4.1 Heterodyne-Beating 量測系統之架設...............43 ◎ 4.2 光響應度量測結果................................45 ◎ 4.3 頻寬量測結果....................................47 ◎ 4.4電流-頻寬量測結果................................50 ◎ 4.5 高功率產生量測結果..............................53 第五章、結論與未來研究方向.............................55 參考文獻...............................................57 Publication List.......................................61

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