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研究生: 洪珮芳
Pei-Fang Hung
論文名稱: 高分子光柵應用於太陽光分光元件
指導教授: 韋安琪
An-Chi Wei,
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 光機電工程研究所
Graduate Institute of Opto-mechatronics Engineering
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 71
中文關鍵詞: 聚亞醯胺光柵光微影技術分光元件
外文關鍵詞: polyimide, division element, grating, Lithography
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  • 因全球暖化和能源危機對再生能源的需求,太陽能成為乾淨能源的發展重點。然而,太陽光譜具有寬波段特性,對於種類不同之太陽能電池其主要光電轉換波段也不同,故發展太陽光分光技術有助於太陽光能利用之最佳化。
    本論文開發一具有耐熱性之太陽能分光元件,並於其上設計特定之光柵,使太陽光譜藉由該分光元柵而達到分光的效果。在此選用聚亞醯胺作為分光元件之材料,並以光微影技術方式製作光柵圖案。分光元件製作完成後,則運用太陽光模擬器量測元件效率,並與模擬結果進行分析比較。
    藉由理論推導、軟體模擬和量測實驗,證實聚亞醯胺穿透率達94%,適合為光學元件。且光柵具有分光功能,繞射效率量測值:在405nm,其繞射效率69%、在635nm,其繞射效率46%,在830nm,其繞射效率36%,與模擬結果趨勢相符。藉由熱分析已驗證元件溫度300℃以下為穩定態,故此元件適用於戶外。


    In this research, polyimide is the substrate of the spectrum splitter because of its thermal stability, while the designed grating on the substrate is for splitting sun light. To realize the pattern of the grating, optical lithography has been used. Then, the fabricated spectrum splitter has been measured by using a solar simulator, and the measured results have been compared with those from simulation.
    The experiment results have shown that polyimide has the transmittance of 94% and is appropriate for optical applications. The diffraction efficiency of the spectrum splitter has been measured by multiple laser beams with the values of 69% at 405nm, 46% at 635nm, and 36% at 830nm, agreeing with the trend predicted in simulation. Also, according to the thermal experiment, the fabricated spectrum splitter is stable below 300 ℃. Thus, this spectrum splitter is suitable for outdoor usages.

    摘要 I Abstract II 致謝 III 目錄 IV 圖目錄 VI 第一章 緒論 1 1-1 研究背景 1 1-2 文獻回顧 2 1-2-1 太陽分光元件 2 1-2-2 高分子光柵製作技術 4 1-3 研究目的 6 1-4 論文架構 7 第二章 基礎理論 8 2-1 薄膜光學基本理論 8 2-1-1 電磁波 8 2-1-2 界面之透射 12 2-1-3 非相干性之透射 14 2-2 繞射式光柵理論 15 2-2-1 純量繞射理論 16 2-2-2 二元光柵繞射效率 17 2-3 小結 18 第三章 實驗架構 19 3-1 聚亞醯胺光柵材料介紹 19 3-2 儀器介紹 21 3-3 光柵元件製作 27 3-4 參數建立 29 3-4-1 高分子分光元件之厚度 29 3-4-2 高分子分光元件之折射率 30 3-5 高分子分光元件量測 31 3-6 熱重分析 33 3-7 小結 33 第四章 實驗結果與討論 34 4-1 高分子光柵基本性質 34 4-1-1 高分子光柵折射率 34 4-2 高分子分光元件模擬與分析 40 4-2-1 高分子分光元件厚度 40 4-2-2 高分子分光元件週期 41 4-3 元件繞射效率頻譜分析 43 4-3-1 元件厚度之建立 43 4-3-2 元件週期之建立 44 4-3-3 元件效率模擬之建立 45 4-3-4 高分子光分光元件之效率 45 4-4 熱重分析 50 4-5 小結 51 第五章 誤差分析 52 5-1 元件表面輪廓誤差 52 5-2 粗糙度 54 第六章 結論 56 6-1 結論 56 6-2 未來展望 57 參考文獻 58

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