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研究生： 盧立瑋
Li-Wei Lu
論文名稱： 相位移動器校正之研究
Calibration of the phase-shifting adapter
指導教授： 歐陽盟
Mang Ou-Yang
口試委員:
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Optics and Photonics
畢業學年度： 94
語文別： 中文
論文頁數： 89
中文關鍵詞： 相位移動器 、相位移校正 、壓電材料
外文關鍵詞： phase-shifting adapter, phase-shifting calibration, piezoelectric ceramic
相關次數： 點閱：10  下載：0 
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    • 相移精度於相移干涉術之量測，是最可代表樣品資料之可靠度。對利用相移干涉術來量測樣品之干涉儀而言，不準確之相移會在計算物體相位上產生誤差。本系統之相位移動器係由三個壓電致動器所構成，因為壓電致動器本身之差異與結構上受到不同應力之影響，在移動的過程中會產生移動不均的問題，意即在推進過程中改變參考面之法線向量，最直接的觀察方式為推動一週期後比較前後之干涉圖，干涉條紋有旋轉與間隔改變之現象，此現象亦反應在相位移之標準差。
    針對此問題之解決方式，本論文提出一種校正相位移動器的方式，從理論推導出壓電致動器位移與條紋斜率之關係，從此關係中找出一特殊情況來校正，此方式利用條紋之變化來對壓電致動器之差異進行個別調校，從比對第一張與最後一張影像之差異變化，可發現利用此方法所得到之權重比例，的確改善了移動不均之現象。

    The error of the movements of the phase-shifting adapter(PSA) determines the accuracy of measurement to a large degree. For large-apeture and weighty optical elements, we usually use an adapter with three PZTs to hold the tested optical element. It is very important to keep the adapter stretched as a flat. Otherwise, the shifting fringe patterns will rotate, and the distance between fringes will be changed. These phenomena will decrease the precision of phase-shifting interferometry.
    In this thesis, a method to calibrate a phase-shifting adapter with three piezoelectric ceramics based on the relationship between the displacement of PZT and the slope of interference fringe is proposed to increase the testing precision of phase-shifting interferometer. Observing the first and the last interferograms, the unequal movement of the PSA is improved by this method.

    摘要.............................................................................................................I 致謝..........................................................................................................III 目錄..........................................................................................................IV 圖目錄.....................................................................................................VII 表目錄......................................................................................................XI 第一章 緒論..............................................................................................1 1.1 前言.....................................................................................................1 1.2 研究動機與目的.................................................................................2 第二章 理論與工作原理..........................................................................4 2.1 干涉儀工作原理.................................................................................4 2.1.1 光干涉原理....................................................................................4 2.1.2 相移干涉術....................................................................................7 2.1.3 各式相移演算法............................................................................8 2.1.3.1 三步相移演算法.......................................................................9 2.1.3.2 四步相移演算法.......................................................................9 2.1.3.3 Carré演算法.............................................................................10 2.1.3.4 五步相移演算法.....................................................................11 2.1.4 相位重建技術..............................................................................14 2.2 壓電致動器工作原理.......................................................................16 2.2.1 壓電材料......................................................................................17 2.2.2 壓電現象......................................................................................19 2.2.3 壓電材料之應用..........................................................................20 2.3 干涉圖像之處理...............................................................................22 2.3.1 中值濾波器................................................................................22 2.3.2 低通濾波器..................................................................................23 2.3.3 一種直線干涉圖之優化..............................................................23 2.3.4 二值化處理..................................................................................25 2.3.5 細線化處理..................................................................................26 2.3.6 計算斜率......................................................................................26 第三章 文獻探討....................................................................................28 3.1 採用適當之演算法...........................................................................28 3.1.1 線性誤差......................................................................................28 3.1.2 非線性誤差..................................................................................29 3.2 校正相位移動裝置...........................................................................31 3.2.1 光學條紋投射器之步進馬達......................................................31 3.2.2 干涉儀之相位移動器..................................................................32 3.3 直接計算相位變化...........................................................................34 第四章 相位移動器校正之理論............................................................36 4.1 建立PZT空間分佈...........................................................................36 4.1.1 一般分佈情況..............................................................................36 4.1.2 特殊分佈情況..............................................................................42 4.2 校正相位移動器之方法...................................................................44 第五章 模擬干涉條紋............................................................................46 5.1 模擬干涉條紋...................................................................................46 5.1.1 由光程差模擬干涉條紋..............................................................46 5.1.2 由條紋間隔與方向模擬干涉條紋..............................................46 5.2 模擬與實際比較...............................................................................47 5.3 模擬五步相移...................................................................................49 第六章 實驗與分析................................................................................50 6.1 實驗系統...........................................................................................50 6.2 實驗步驟...........................................................................................54 6.3 實驗結果...........................................................................................63 第七章 結論與未來展望........................................................................69 7.1 結論...................................................................................................69 7.2 未來展望...........................................................................................70 參考文獻..................................................................................................71

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