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研究生：	李大衛 David Legrand
論文名稱：	On fabrication of Al,Sn co-doped ZnO thin film by sol-gel technique and their properties
指導教授：	林景崎
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學與工程研究所 Graduate Institute of Materials Science & Engineering
論文出版年：	2013
畢業學年度：	101
語文別：	英文
論文頁數：	81
中文關鍵詞：	溶膠凝膠法、氧化鋅、鋁錫共摻雜
外文關鍵詞：	Al–Sn co-doped ZnO
相關次數：	點閱：13 下載：0
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查詢本校圖書館目錄查詢臺灣博碩士論文知識加值系統勘誤回報

本研究為探討利用溶膠凝膠法，藉由鋁及錫在氧化鋅的共摻雜，製作出新穎的透
明導電薄膜。
薄膜的微結構、組成、光電及化學性質在本研究中將被深入討論。
溶膠凝膠法被認為是製備薄膜並頗受注目的技術之一，因此學生可從中了解以浸
鍍(dip‐coating)法配置前驅物溶液及一連續的步驟製備出所需的薄膜。
此外，也可學習X‐Ray 繞射、掃描式電子顯微鏡等儀器進一步探討薄膜的晶體結
構以及表面形貌。

The goal of this Master Research would be concentrated on the fabrication of a new transparent conductive
thin films of zinc oxide co-doped with Al and Sn by sol-gel method. The micro-structure,
composition, optical, electrical properties and chemical properties of these films will be investigated.
The sol-gel method is one of the most popular techniques to prepare thin solid films so that the student
may learn the skill how he could prepare the thin films from the precursor solutions through a sequence
of procedures such as dip-coating and heat treatment on a glass substrate. In addition, he will conduct
the instrumental analysis such x-ray diffraction, scanning electron microscopy to examine the crystal
structure and surface morphology. Finally, he will learn how to characterize the films.

Contents
Abstract i
Acknowledgements ii
Nomenclature iv
Contents vi
List of Tables vii
List of Figures viii
Introduction 1
1 Theoretical background 2
1.1 Properties of ZnO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1.1 Crystal structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1.2 Electronic structure of Zinc Oxide . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1.3 Conductivity in zinc oxide by theoretical computation . . . . . . . . . . . . . . . . 4
1.1.4 Resistivity treated by the hall effect . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.1.5 Elementary excitations in the Zinc Oxide . . . . . . . . . . . . . . . . . . . . . . . 12
1.2 Fabrication methods of ZnO thin films . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.2.1 Sol-gel process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.2.2 Dip coating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1.3 Motivation and goals of this study . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2 Literature review 18
2.1 On the doping of zinc oxide, II-VI semi-conductor . . . . . . . . . . . . . . . . . . . . . . 18
2.1.1 Group I . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.1.2 Group III . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.1.3 Group IV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.1.4 Group V . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.1.5 Group VII . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.2 On the fabrication of doped (Al,Sn) ZnO thin films by sol gel technique . . . . . . . . . . 21
2.2.1 Fabrication of the colloidal solution . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.2.2 Deposition of thin films . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
2.3 On the fabrication of co-doped ZnO thin films by sol gel technique . . . . . . . . . . . . . 26
2.4 Advantages taken by Aluminium and Tin as dopants . . . . . . . . . . . . . . . . . . . . 27
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3 Experimental procedure, results and discussion 32
3.1 Flowchart of the experiment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.2 Drying and annealing process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
3.3 Fabrication of samples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.4 Morphology and micro-structure of the thin films . . . . . . . . . . . . . . . . . . . . . . . 36
3.4.1 Samples doped Tin (TZO) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.4.2 Samples doped Aluminium (AZO) . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
3.4.3 Samples co-doped Tin-Aluminium SAZO . . . . . . . . . . . . . . . . . . . . . . . 41
3.5 Optical properties of the thin film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3.5.1 Samples doped Aluminium (AZO) . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3.5.2 Samples doped Tin (TZO) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.5.3 Samples co-doped Tin-Aluminium SAZO . . . . . . . . . . . . . . . . . . . . . . . 48
3.6 Electrical properties of the thin film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
3.6.1 Samples doped Aluminium (AZO) . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
3.6.2 Samples co-doped Tin-Aluminium SAZO . . . . . . . . . . . . . . . . . . . . . . . 51
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Conclusion 53
Appendix 54
A Review of the Drude model and the Hall effect for semi-conductor doped with electrons
and holes 54
B Review of the classical treatment of the lattice vibration for one and two atoms 57
C Summary formatted tabular of the literature survey 61
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
D More SEM cross-section of co-doped sample 70
                                

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