微電化學深孔加工之研究與分析｜國立中央大學博碩士論文系統

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研究生：	洪智育 Chih-Yu Hung
論文名稱：	微電化學深孔加工之研究與分析
指導教授：	洪勵吾 Lih-Wu Hourng
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
畢業學年度：	94
語文別：	中文
論文頁數：	73
中文關鍵詞：	深寬比、微電化學加工
外文關鍵詞：	depth-width ratio, Electrochemical micro-machining
相關次數：	點閱：6 下載：0
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摘要
在眾多非傳統特殊微加工中，微電化學（Electrochemical Micro-Machining，簡稱EMM）擁有加工速度快、無表面應力集中及表面粗糙度佳的優勢，具有相當的發展潛力和高附加價值。
本研究採用300μm之中空銅管作為刀具，電解液流動採內部流，希望藉由脈衝式直流電源，提供有規律的間歇供電進行間歇加工，配合橫向水流，以改善成品精度以及增加深寬比。本文採用單一因子法探討微電化學加工相關參數（操作電壓、加工能率、脈衝週期、電解液濃度、進給速率）對加工孔徑的影響程度。
本文最後以最佳參數進行5600μm之深孔加工，得到加工孔徑約900μm，深寬比約為6.2。

Abstract
In numerous non-traditional, micro-machining, the electrochemical micro-machining ( abbreviated as EMM ) has the advantage of quick processing speed, good convergence in surface stress , and nice smoothness in workpiece surface with enormous potentialities and highly added value.
A　copper　tube with 300 - micron meter of diameter is selected as electrode tool. The inner flowing vein, pulse power supply which supplies a regular intermittent power to machine the product intermittently, and with the water flowing sidelong are employed for improving the precision of products and increasing the depth –width ratio. In this research, Single Variable Method is used to analyze the influence level on the hole diameter of workpiece by relevant parameters ( such as voltage, duty, pulse period, density of the electrolyte, and feed rate).
Finally, we take the best parameters to machine the depth of 5600 micron - meter then we obtain about 900 micron - meter of hole diameter
and 6.2 depth-width ratio.

目錄
摘要 …………………………………………………………………… I
目錄 ………………………………………………………………… III
表目錄 ……………………………………………………………… VII
圖目錄 ………………………………………………………………VIII
符號說明 ……………………………………………………………… X
第一章 緒論 ……………………………………………………………1
1-1 前言 …………………………………………………………… 1
1-2 文獻回顧 ……………………………………………………… 3
1-2-1 數值模擬方面 …………………………………………… 3
1-2-2 實驗結果方面 …………………………………………… 5
1-3 研究目的 ……………………………………………………… 9
第二章 理論基礎 …………………………………………………… 10
2-1 電化學加工之基本理論 ………………………………………10
2-1-1 電流效率 …………………………………………………11
2-1-2 過電壓 ……………………………………………………11
2-1-3 電化學反應式 ……………………………………………12
2-1-4 歐姆定律 …………………………………………………13
2-2 空隙分數、導電度、導電度與濃度之關係、電流密度…… 14
2-2-1 空隙分數 …………………………………………………14
2-2-2 導電度 ……………………………………………………14
2-2-3 導電度與濃度關係 ………………………………………15
2-2-4 電流密度 …………………………………………………16
2-3 電解間隙 ………………………………………………………16
2-3-1 靜止電極刀具之間隙 ……………………………………16
2-3-2 進給電極刀具之間隙 ……………………………………17
2-4 柏努力定律 ……………………………………………………18
2-5 電雙層的現象 …………………………………………………19
2-5-1 電解 …………………………………………………… 19
2-5-2 電雙層 ………………………………………………… 19
2-5-3 時間常數 ……………………………………………… 20
第三章 實驗裝置與步驟 …………………………………………… 21
3-1 實驗設備 ………………………………………………………21
3-1-1 機台結構設計 ……………………………………………21
3-1-2 刀具近給系統 ……………………………………………22
3-1-3 脈衝式直流電源供應系統 ………………………………23
3-1-4 高壓鋼瓶 …………………………………………………23
3-1-5 沉水馬達 …………………………………………………24
3-1-6 浮子流量計 ………………………………………………24
3-2 實驗材料 ………………………………………………………24
3-2-1 陰極刀具 …………………………………………………24
3-2-2 陽極試片 …………………………………………………24
3-2-3 硝酸鈉粉末 ………………………………………………25
3-3 實驗步驟及注意事項 …………………………………………25
3-3-1實驗步驟 ………………………………………………… 26
3-3-2 注意事項 …………………………………………………27
第四章 結果與討論 ………………………………………………… 29
4-1 操作電壓之參數分析 …………………………………………29
4-2 加工能率之參數分析 …………………………………………31
4-3 電解液濃度之參數分析 ………………………………………32
4-4 脈衝週期之參數分析 …………………………………………33
4-5 進給速率之參數分析 …………………………………………34
4-6 側邊絕緣 ………………………………………………………35
4-7 實驗加工發展現況 ……………………………………………36
第五章 結論 ………………………………………………………… 37
5-1 結論 ……………………………………………………………37
5-2 未來展望 ………………………………………………………38
參考文獻 ………………………………………………………………40
表 ………………………………………………………………………49
圖 ………………………………………………………………………54
附錄A ………………………………………………………………… 73

                                

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