本研究是採用超音波輔助微電化學鑽孔鎳基合金Inconel 718，進行一系列加工特性之研究，希望獲得較佳加工能力與較小擴孔量。本研究採用於微電化學鑽孔時，藉由超音波振動刀具電極之方式進行，探討各種加工參數如工作電壓、進給速率、超音波振幅段數以及脈衝休止時間等對於鎳基合金Inconel 718之各種加工特性影響，加工特性包含出口孔徑、雜散電流腐蝕區直徑及孔錐度。
實驗結果顯示，採用超音波振動輔助微電化學鑽孔加工時，超音波振動會促使附著在刀具電極周圍的氣泡快速脫離刀具電極表面，且刀具電極的振動，會使在加工間隙中的電解液受到擠壓作用，上述二種行為造成電解液擾動，可促使陽極溶解物與廢熱有效離開電化學反應區，並使加工間隙中電解液能快速更新，進而提升加工能力與材料移除率，而根據參數實驗結果顯示，利用超音波輔助微電化學鑽孔鎳基合金Inconel 718時，除了可提升微電化學鑽孔加工能力外，有超音波輔助加工後之出口孔徑能減少11%、雜散電流腐蝕區直徑則能減少27%，改善了出口孔徑擴大量及雜散電流腐蝕現象。

This research proposes micro electrochemical drilling of nickel-based alloy Inconel 718 by ultrasonic vibration assisted. The experiment was performed to realized the machining capability and the hole expansion. The processing parameters include working voltage, feed rate, amplitude level of ultrasonic vibration and pulse off-time. After completing the experiments, the quality characteristics such as the outlet diameter of the holes, the diameter of the stray current corrosion zones and the taper of the holes were also analyzed.
When micro electrochemical drilling with ultrasonic vibration assisted was performed, the bubbles on the tool electrode will be vibrated away from the tool surface rapidly and squeeze the reaction products such as sludge and Joule heat out of the machining zone, facilitating the renewal of the electrolyte. Cavitation is also generated due to ultrasonic vibration and produces the bubbles which can agitate the electrolyte and renew the electrolyte.
The experimental results reveal that micro electrochemical drilling with ultrasonic vibration assisted can improve the machining capability and the material removal rate. The outlet diameter of the hole is reduced by 11%. The diameter of the stray current corrosion zone is reduced by 27%. The hole expansion and stray current corrosion are improved.

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