直接監控石墨烯成長之研究｜國立中央大學博碩士論文系統

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研究生：	魏雅芳 Ya-Fang Wei
論文名稱：	直接監控石墨烯成長之研究 Research of the Graphene Growth by Directly Monitoring
指導教授：	郭倩丞
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 能源工程研究所 Graduate Institute of Energy Engineering
論文出版年：	2017
畢業學年度：	105
語文別：	中文
論文頁數：	59
中文關鍵詞：	石墨烯、快速升溫系統、長焦距光學顯微鏡、暗場
相關次數：	點閱：7 下載：0
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目前普遍觀測石墨烯的方法為石墨烯生長完後，使用原子力顯微
鏡(Atomic Force Microscope， AFM)、掃描式電子顯微鏡(Scanning
Electron Microscope， SEM)、穿透式電子顯微鏡(Transmission Electron Microscope，TEM)觀測石墨烯晶粒，卻無法觀測成長中的石墨烯。本研究主要目標在快速升溫系統(Rapid Thermal Process, RTP)上
觀測石墨烯生長，使用長焦距光學顯微鏡做為觀測鏡頭，再以生長在
銅箔上的石墨烯使用光學顯微鏡的暗場與長焦距光學顯微鏡系統的
暗場影像相互比較。為此目標，採用光學顯微鏡與長焦距顯微鏡相同
倍率 100 倍做比較分析。使用工作距離 180mm 之長焦距顯微鏡的暗
場效果在 RTP 上升溫至 700 度以內，皆可觀測到已生長的石墨烯，
本研究成功地在 RTP 上使用長焦距光學顯微鏡的暗場模式觀測到石
墨烯。

Graphene is the popular materials that get the attention in recent
years. It is also known as monolayer graphite with hexagonal honeycomb
structure of carbon atoms, the thickness of graphene is equal to an atom.
It possesses good electrical properties, high transmittance and high
thermal conductivity.
Some research shows most of the instruments is used to observe
graphene after growing graphene, such as atomic force microscope
(AFM), scanning electron microscope (SEM), and transmission electron
microscope (TEM). But these instruments can’t observe the graphene.
In order to observe the growth graphene on the rapid thermal process
(RTP) system, in this study, the long focal length optical microscope with
dark field system is put above rapid thermal process system as an
observation. After compared the image of optical microscope with dark
field, the results shows it is successful to observe the growth graphene in
700 ℃ at 100 x magnifications with working distance 180mm.

摘要 ............................... I 
Abstract .......................... II 
致謝 ................................III 
目錄 ............................... IV 
圖目錄 .............................. I 
表目錄 .............................. I 
第一章 緒論........................... 1 
1-1 前言 ............................ 1 
1-2 研究動機 ......................... 1 
1-3 論文架構 ......................... 2 
第二章 理論介紹 ....................... 3 
2-1 光學顯微鏡 ....................... 3 
2-2 顯微鏡系統-放大倍率 ............... 4 
2-3 物鏡系統架構 ..................... 5 
2-3-1 物鏡放大倍率 ................... 5 
2-4 目鏡系統 ......................... 6 
2-5 顯微鏡系統焦距、等效焦距、視場角 ........... 6 
2-5-1 焦距的概念 ...................... 7 
2-5-2 等效焦距的概念 .................. 7 
2-5-3 視場角的概念 .................... 7 
2-5-4 視場角與焦距的關係 ............... 8 
2-6 進光量與倍率 ...................... 8 
2-7 光學顯微鏡成像系統 ................. 9 
2-7-1 明場工作原理(Bright Field)............ 9 
2-7-2 暗場工作原理(Dark Field) ..............10 
2-8 石墨烯製程方法 .......................11 
2-8-1 膠帶剝離法 ........................11 
2-8-2 石墨烯還原法 ......................13 
2-8-3 化學氣相沉積法 ....................14 
第三章 儀器介紹及實驗方法 ................17 
3-1 快速升溫系統(Rapid Thermal Processing ,RTP) ..............................17 
3-1-1 快速升溫系統-功能原理 .................18 
3-1-2 快速升溫系統-石墨烯製程流程 ..........................................19 
3-2 長焦距光學顯微鏡系統架構 ..........................................20 
3-3 電荷耦合元件(Charge-coupled Device, CCD) .....................................22 
3-3-1 CCD 工作原理....................22 
3-4 環形光源 ..........................23 
3-5 光學顯微鏡(Optical Microscope ,OM) ......................................23 
3-6 實驗設計 ..........................24 
第四章 實驗結果與討論 .................26 
4-1 觀測孔 ...........................26 
4-2 長焦距光學顯微鏡-工作距離 ......................................26 
4-3 未長滿石墨烯- RTP-外-暗場 ......................................27 
4-4 未長滿石墨烯-RTP-內-暗場-未升溫 ......................................28 
4-4-1 未長滿石墨烯-RTP-內-暗場-升溫觀測 ......................................30 
4-4-2 RTP 紅外輻射光-暗場 ......................................34 
4-5 石墨盒 ............................36 
4-5-1 石墨盒-RTP 內-暗場 .......................................37 
4-6 石英基板-減少震動 .......................................38 
4-7 解析度 ............................39 
第五章 結論.............................41 
參考文獻 ...............................43 
                                

[1] 陳政熙, (2016) 暗場顯微鏡系統監控石墨烯成長之研究, 中央大
學機械工程學系碩士論文.
[2] 廖文琪, (2012), 光學顯微鏡之鏡頭設計,中央大學光電科學與工
程學系碩士論文.
[3] https://zh.wikipedia.org/wiki/%E7%9B%AE%E9%95%9C.
[4] 從GOOGLE網站中可取得顯微鏡系統焦距、視場角之資訊
https://read01.com/dkB23B.html
[5] 第四章顯微鏡之構造、原理及使用的網頁中，可以獲得相關資訊
(http://web.nchu.edu.tw/~rootdis/plant%20pathology/97Session/002970926/ch4microscope.pdf)
[6] K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, A.A. Firsov. (2004). Electric field effect in atomically thin carbon films, Science. 666-669.
[7] Bolotin, K. I., Sikes, K. J., Jiang, Z., Klima, M., Fudenberg, G., Hone, J., ... & Stormer, H. L. (2008). Ultrahigh electron mobility in suspended graphene. Solid State Communications, 146(9), 351-355.
[8] Frank, I. W., Tanenbaum, D. M., van der Zande, A. M., & McEuen, P. L. (2007). Mechanical properties of suspended graphene sheets. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 25(6), 2558-2561. [9] Geim, A. K., & Novoselov, K. S. (2007). The rise of graphene. Nature materials, 6(3), 183-191.
[10] X. Li, G. Zhang, X. Bai, X. Sun, X. Wang, E. Wang, H. Dai. (2008). Highly conducting graphene sheets and Langmuir–Blodgett films, Nature Nanotechnology, 538-542.
[11] Zhu, Y., Murali, S., Cai, W., Li, X., Suk, J. W., Potts, J. R., & Ruoff, R. S. (2010). Graphene and graphene oxide: synthesis, properties, and applications. Advanced materials, 22(35), 3906-3924.
[12] Eda, G., Fanchini, G., & Chhowalla, M. (2008). Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material. Nature nanotechnology, 3(5), 270-274.
[13] Kim, K. S., Zhao, Y., Jang, H., Lee, S. Y., Kim, J. M., Kim, K. S., ... & Hong, B. H. (2009). Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature, 457(7230),706-710.
[14] X. Li, W. Cai, J. An, S., J. Nah, D. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S.K. Banerjee, L. Colombo, R.S. Ruoff. (2009). Large-area synthesis of high-quality and uniform graphene films on copper foils, Science, 1312-1314.
[15] Riikonen, J., Kim, W., Li, C., Svensk, O., Arpiainen, S., Kainlauri, M., & Lipsanen, H. (2013). Photo-thermal chemica l vapor deposition of graphene on copper. Carbon, 62, 43-50.
[16] http://iword.biz/topicdetail.php?id=99&p=1172

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