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研究生： 陳俊亦
Chun-Yi Chen
論文名稱： 錐狀平面波導光柵結構與微米小球共振腔之光耦合效率研究
High-Q Whispering Gallery Mode Coupler Utilizing a Tapered Wavwguide with a Side-tap grating Structure
指導教授： 戴朝義
Chao-Yi Tai
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學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Optics and Photonics
畢業學年度： 94
語文別： 中文
論文頁數： 60
中文關鍵詞： 耦合 、平面波導 、球型共振腔 、光柵 、錐狀波導
外文關鍵詞： grating, microsphere, planar waveguide, taper, whispering gallery mode
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    • 本論文提出可晶片化（on-chip）之球型共振腔耦合器，可應用在光的訊號轉換及光相位延遲等研究。我們利用標準的光微影技術，在矽基板上製作此微光學元件，使其達到高穩定性與可批次製造等優點。
    在設計上，波導與微米球型共振腔的耦合效率可達26％，且此元件具有波長選擇性，此元件設計波長為1550nm，耦合效率隨輸入波長偏移設計波長，當波長偏移量達100nm 時，耦合效率降至最大值之60﹪。最後，實驗上也印證了與模擬設計相同的結果。

    Most of the demonstrated devices utilize a tapered fiber to excite the Whispering gallery modes (WGMs), however this coupling architecture not only lacks of rigid stability but inhibits dense integration. In this thesis, we report an alternative scheme based on a tapered waveguide in company with a side-tap grating structure. This approach provides better mechanical stability and is compatible with existing Si fabrication process.
    The calculated coupling efficiency is a function of the input wavelength at various grating periods. And the highest coupling efficiency reaches ~26% with the grating period Λ=5.486 μm at λ~1530 nm, which is in close agreement with the phase matching condition predicted by the grating theory. It is worth mentioning that the smallest feature size in this design is well beyond 1μm, indicating that less stringent fabrication tolerance over the tapered fiber and the standard photolithography process can accomplish the task.

    目 錄 論文摘要 …………………………………………………………… I Abstract …………………………………………………………II 目錄 ………………………………………………………………… III 圖目錄……………………………………………………………V 表目錄…………………………………………………………………VII 第一章 緒論…………………………………………………………1 1-1 前言………………………………………………………1 1-2 球型共振腔優點………………………………………………1 1-3 現有球型共振腔耦合技術……………………………………4 1-4 研究動機與論文大綱…………………………………………7 第二章 光學模擬方法介紹…………………………………………8 2-1 光束傳播法 (Beam Propagation Method，BPM)…………8 2-2 近軸BPM ………………………………………………………8 2-3 數值解與邊界條件…………………………………………11 2-4 BPM基本特性及限制 ………………………………………13 2-5 結論…………………………………………………………14 第三章 耦合器相關原理……………………………………………16 3-1 耦合基本概念………………………………………………16 3-2 光柵耦合……………………………………………………20 3-3 耳語廊模式 (Whispering Gallery Mode，WGM)…………23 第四章 元件設計與製作……………………………………………29 4-1 材料特性與幾何結構…………………………………………29 4-2 元件製作流程…………………………………………………32 第五章 元件特性模擬與量測………………………………………37 5-1 模擬方法與實驗儀器架構…………………………………38 5-2 波導結構與耦合效率………………………………………42 5-3 錐狀波導斜率分析…………………………………………44 5-4 光柵波長響應………………………………………………45 5-5 光柵週期與光輻射角度關係………………………………47 5-6 光柵角度之影響……………………………………………52 5-7 整理與討論…………………………………………………54 第六章 結論與未來展望……………………………………………56 參考文獻 ………………………………………………………………57 著作列表……………………………………………………………60

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