具自行對準凹陷電極1x4矽質金屬-半導體-金屬光偵測器陣列的特性

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研究生：	賴威任 Wei-Jen Lai
論文名稱：	具自行對準凹陷電極1x4矽質金屬-半導體-金屬光偵測器陣列的特性 Characteristics of 1x4 Si MSM-PD Array With Self-Aligned Trench Electrodes
指導教授：	洪志旺 Jyh-Wong Hong
口試委員:
學位類別：	碩士 Master
系所名稱：	資訊電機學院 - 電機工程學系 Department of Electrical Engineering
畢業學年度：	89
語文別：	中文
論文頁數：	49
中文關鍵詞：	光偵測器、陣列、矽質、非晶矽、自行對準、凹陷電極
外文關鍵詞：	MSM, photodetector, array, self-aligned, trench electrodes, amorphous Si
相關次數：	點閱：18 下載：0
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本論文的主題是利用自動對準製程製作具凹陷電極及非晶矽氫薄膜的一列四行金屬-半導體-金屬光偵測器陣列，並且探討其交、直流特性及各頻道間的交越失真，以利光偵測器的實際運用。

The obtained device had the higher responsivity and faster response speed than those of conventional planar Si MSM-PDs with non-self-aligned trench-electrodes. The responsivity of the device with self-aligned trench-electrodes was 0.30 A/W, which was higher than that (0.15 A/W) of the conventional planar one having no trench. The device knee voltage was decreased from 5 V to less than 1 V by using self-aligned trench-electrodes, and the FWHM (full width at half maximum) of temporal response was reduced from 66.6 ps to 56.0 ps. This would be due to the self-aligned trench-electrodes resulting in a more uniform lateral electric field in the light absorption region of device.
Cross-talks among channels were not obvious because of the employed properly recessed isolation lanes. Different finger spacings and widths of interdigitated electrodes resulted in different responsivities of the MSM-PDs. The narrower the finger spacings and widths, the higher the device responsivity due to the larger device effective active area.
The obtained 1x4 Si MSM-PD array with self-aligned trench-electrodes had good characteristics and could easily be integrated with Si OEIC (Opto-Electronic IC). It was expected that the MSM-PD array would be used in optical fiber communication system.

Abstract……………………………………………………….…….…(Ⅲ)
Table Caption……..………………………………………………….(V)
Figure Captions………………………………………………………..(VI)
Chapter 1 INTRODUCTION………………..…………….…………1
Chapter 2 DEVICE OPERATION PRINCIPLES AND
FABRICATION PROCESSES……………………………7
2-1Operation Principles of MSM-PD…………………..7
2-2Array Fabrication Processes……………………….12
Chapter 3 MEASUREMENT TECHNIQUES……………....……..21
3-1Responsivity……………..……………..………...21
3-2 Response Speed…….……….………………..……21
Chapter 4 EXPERIMENTAL RESULTS AND DISCUSSIONS….25
4-1Design and Process Considerations…………….….25
4-2DC Response of 1x4 MSM-PD Array……………..26
4-3AC Response of 1x4 MSM-PD Array……………..31
4-4Cross-Talks Among Channels……………..………36
4-5Dark-Current Comparison Between Devices with Self-Aligned and Non-Self-Aligned Trench-electrodes…………………………………………...37
4-6DC Response of Devices with Different Finger Spacings and Widths…………………………..…...37
Chapter 5 CONCLUSIONS…………………………………………..45
REFERENCES……………………………………………………….….47

                                

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