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研究生: 林世偉
SHIH-WEI LIN
論文名稱: 影像導引電鍍可控柱徑及可變螺距雙螺旋之研究
指導教授: 黃衍任
YAN-REN HUANG
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 光機電工程研究所
Graduate Institute of Opto-mechatronics Engineering
論文出版年: 2019
畢業學年度: 108
語文別: 中文
論文頁數: 75
中文關鍵詞: 局部電化學沉積即時影像控制雙螺旋柱電場模擬可變螺距雙螺旋可控柱徑雙螺旋
外文關鍵詞: Localized Electrochemical Deposition(LECD), variable pitch double helix, Controllable column diameter double helix
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  • 科技發展突飛猛進的今日,芯片技術的成熟帶來了科技的大躍進,現代人已經幾乎不可能不用到芯片,不管是電腦、手機或是其他智能家電已成為生活中不可缺少的一部份。而芯片的突破主要仰賴在半導體製程,而局部電化學沉積即是一種,局部電化學沉積容易製作高深寬比的立體結構物、能使用不同原料、能常溫常壓下製作、利用堆積材料成型能降低更多成本、減少浪費,可說此技術是種高應用性、低成本、低耗能、低汙染又安全製造技術。
    本論文延續了「影像導引局部電化學沉積」及「異軸式雙螺旋演算法」之概念,在其基礎上改善陰陽極製做方式,使其能夠製作微米等級尺寸雙螺旋微結構物,並減少出錯機會。打造實驗數據紀錄模組,紀錄並分析各參數之改變對於成品之影響。模擬電鍍過程中,各種電化學沉積參數對雙螺旋影響。改良設備與製程,提高此系統的可靠度及成功率。發展可變螺距雙螺旋及可控柱徑雙螺旋電鍍系統。最後由形貌、電鍍時間、表面電場模擬、最大步進旋轉角度測試以及柱徑變化這幾方面來做分析與討論。


    Nowadays, thanks to the well-developed chip technology, the science and technology has been improved by leads and bounds. Any smart home appliance that is made of chip has become indispensable part of modern life, such as computers, smartphones, et cetera. In fact, the breakthrough of chip technology mainly depends on the semiconductor processes, one of which is Local Electrochemical Deposition. Local Electrochemical Deposition is prone to produce a high aspect ratio stereo structure. Moreover, it can also use different materials and can be conducted under normal temperature and pressure. Furthermore, this process can form products by using stacked materials, which can lower the cost and reduce the waste at the same time. Consequently, Local Electrochemical Deposition is definitely a highly applicable, low-cost, low-energy, low-pollution, and safe manufacturing technology.
    This paper is based on the concept of "image-guided local electrochemical deposition" and "non-isoaxial double-helix algorithm". We improved the anode-anode manufacturing method, enabling it to fabricate micro-scale double-helix microstructures, thus reducing the chance of system errors. Apart from it, we created an experimental data record module which records and analyzes the impact of changes in each parameter on the finished product. In addition, we simulated the effects that various electrochemical deposition parameters caused on double helix during the electroplating process. Also, we made an improvement of the equipment and the manufacturing process to enhance the reliability and the success rate of this system. And developed variable pitch double helix and controllable cylindrical double spiral plating system. At last, we carried out the analysis and discussion on the aspects of morphology, plating time, surface electric field simulation, maximum step rotation angle test and column diameter change.

    摘要 i Abstract ii 誌謝 iv 目錄 vi 圖目錄 ix 表目錄 xii 第一章 緒論 1 1.1 研究背景 1 1.2 研究目的 3 1.3 論文架構 3 第二章 基本原理 5 2.1 電化學沉積 5 2.2 局部電鍍電場 5 2.3 影像處理 6 2.3.1. 二值化處理 6 第三章 實驗硬體設備 8 3.1 系統架構 8 3.2 局部電化學沉積系統 9 3.2.1. 陰極製作 9 3.2.2. 陽極製作 11 3.2.3. 電壓控制模組 12 3.3 電解液循環過濾系統 13 3.4 電解液調配 14 3.4.1. 膠囊型過濾器 14 3.4.2. 吹嘴 16 3.5 即時影像擷取系統 17 3.5.1. 工業攝影機及鏡頭 17 3.5.2. 光源 19 3.6 雙極間距控制系統 19 3.6.1. 微動平台 19 第四章 虛擬儀器控制軟體 21 4.1 人機介面 21 4.2 本實驗使用之LabVIEW函式(VI) 22 4.2.1. 影像處理部分 22 4.2.2. 輔助繪圖部分 24 4.2.3. 儀器控制部分 24 4.2.4. 資料儲存部分 25 第五章 電化學模擬與分析 27 5.1 COMSOL模擬電場模型建立 27 5.2 COMSOL電場模擬示意圖 27 第六章 實驗結果與討論 29 6.1 實驗流程及規劃 29 6.2 原系統改變步進距離長柱分析 29 6.2.1. 沉積時間 30 6.3 雙螺旋成品與製程改善 34 6.3.1. 雙螺旋中心定義修正 37 6.3.2. 校正法改良 37 6.3.3. 陰陽極間ROI選擇 40 6.3.4. 新程式流程圖 41 6.3.5. 新製程優勢 41 6.4 可控柱徑雙螺旋 43 6.4.1. 程式流程圖 44 6.4.2. 形貌比較 45 6.4.3. 時間比較 46 6.5 可變螺距雙螺旋 47 6.5.1. 程式流程圖 48 6.5.2. 雙螺旋銅柱表面電場模擬 48 6.5.3. 最大單步旋轉角度測試 53 6.5.4. 柱徑變化分析 53 第七章 結論與未來展望 58 7.1 結論 58 7.2 未來展望 58 第八章 參考文獻 60

    J. Hu, and M.F. Yu, "Meniscus-confined three-dimensional electrodeposition for direct writing of wire bonds," Science, pp. 313-316., 29 3 2010.
    J.D. Madden, and I.W. Hunter, "Three-dimensional microfabrication by localized electrochemical deposition.," Journal of Microelectromechanical Systems, pp. 24-32, 1 5 1996.
    S.H. Yeo, and J.H. Choo, "Effects of rotor electrode in the fabrication of high aspect ratio microstructures by localized electrochemical deposition.," Journal of Micromechanics and Microengineering, pp. 435-442, 5 11 2001.
    R.A. Said, "Shape Formation of Microstructures Fabricated by Localized Electrochemical Deposition.," Journal of The Electrochemical Society, p. C549, 15 8 2003.
    J.H. Yang,, "Assessing the degree of localization in localized electrochemical deposition of copper.," Journal of Micromechanics and Microengineering, 18 5 2008.
    C.Y. Lee, C.S. Lin, and B.R. Lin, "Localized electrochemical deposition process improvement by using different anodes and deposition directions.," Journal of Micromechanics and Microengineering, 18 10 2008.
    S.K. Seol, "Coherent microradiology directly observes a critical cathode-anode distance effect in localized electrochemical deposition.," Electrochemical and Solid State Letters, pp. C95-C97, 7 9 2004.
    S.K. Seol, "Localized electrochemical deposition of copper monitored using real- time X-ray microradiography.," Advanced Functional Materials, pp. 934-937, 15 6 2005.
    Ting-Chao Chen, Yan-Ren Huang, Jing-Chie Lin, Yong-Jie Ciou, "The Development of a Real- Time Image Guided Micro Electroplating System.," International Journal of Electrochemical Science, p. 10, 5 2010.
    Yean-Ren Hwang, J.-C. L., Ting-Chao Chen, "The Analysis of the Deposition Rate for Continuous Micro-Anode Guided Electroplating Process. Int.," J. Electrochem. Sci., pp. 1359 - 1370, 7 2012.
    Yean-Ren Hwang, Y.-J.C., Jing-Chie Lin, Ting-Chao Chen, Yao-Tien Tseng , “Research on Real-Time Image Processing Guided Micro-Anode Electroplating for Fabrication of Three-Dimensional Microstructure. World Academy of Science.,” Engineering and Technology, pp. 1615-1619, 7 7 2013.
    邱永傑,即時影像導引局部電化學沉積系統製作立體微結構物之研究,國立中央大學機械工程學系碩士論文,2016。
    王晨旭,雙陽極局部電化學之精度與類DNA雙螺旋結構控制法之研究,國立中央大學機械工程學系研究所碩士論文,2019。
    林景崎,鎳銅合金之微電鍍即崎結構、性質與應用研究成果報告,國立中央大學機械工程研究所,桃園市,2010。
    Wei-Hsiung Huang,2016年6月29日,取自:http://wei48221.blogspot.com/2016/06/how-to-use-4n25-optocoupler_27.html,
    光道視覺科技股份有限公司,取自:https://www.aisys.com.tw/web/product/category.php?category_id=1。
    肯定資訊科技股份有限公司,取自:http://www.surevision.com.tw/front/bin/ptdetail.phtml?Part=product02-2&Category=117819。
    坦聯企業有限公司,取自:http://www.tanlian.tw/ndex.files/motort.htm。
    K.Ikuta and K.Hirowateri, "Real three dimen sional micro fabrication using stereo lithography and metal moding," IEEE, pp. 42-47, 10 7 1993.

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