| 研究生: |
楊明棋 Ming-Chi Yang |
|---|---|
| 論文名稱: |
電化學微電極製程之最佳化參數分析 The analysis of influence level on fabricating micro-column electrode tool by using electrochemical maching |
| 指導教授: |
洪勵吾
Lih-Wu Hourng |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 畢業學年度: | 95 |
| 語文別: | 中文 |
| 論文頁數: | 70 |
| 中文關鍵詞: | 變異數分析法 、微電化學加工 、田口法 |
| 外文關鍵詞: | electrochemical micro-machining, Taguchi method, Analysis of Variance |
| 相關次數: | 點閱:6 下載:0 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
在許多非傳統加工微加工中,微電化學(Electrochemical Micro-Machining,EMM)擁有加工速度快、無表面應力殘留及表面光潔度佳的優勢,具有相當的發展潛力和高附加價值。
本研究採用510μm之鎢棒作為刀具,並且利用田口統計方法探討微電化學加工參數(操作電壓、加工能率、刀具轉速、電極間隙及電解液濃度)對於製作微圓柱電極刀具和金屬移除量的影響性程度,在運用穩健設計法加以評估設計最佳參數組合。
由變異數分析法(Analysis of Variance,ANOVA)加以分析,發現操作電壓及電解液濃度的改變將嚴重影響製作微圓柱電極刀具和金屬移除量的結果,同時從研究中順利取得一組最佳參數。
In numerous non-traditional, micro-machining, the electrochemical micro-machining (EMM) has the advantage of quick processing speed, no residual stress in surface, and nice smoothness in workpiece surface with enormous potentialities highly added value.
A tungsten filament with 510-micron meter of diameter is selected as electrode tool, and Taguchi Statistical Method of Quality-engineering is used to analyze the influence level on fabricating micron-column electrode tool and material removal rate by parameters(Such as : voltage, duty, rotation, gap, electrolyte concentration).Robust-Design technique is also used to estimate the best design combination of parameters in our experiment.
By analyzing the Analysis of Variance(ANOVA), the voltage and electrolyte concentration are found to affect apparently the fabricating micron-column electrode tool and material removal rate, and the best parameter combination is simultaneously acquired from the research.
1. D.J. Nagel and M.E. Zaghloul , “MEMS : Micro Techanology : Mega
Impact, ” IEEE Circuit Devices Mag., pp.14-25(2001).
2.木本康雄著,賴耿陽譯著,精密加工之電學應用,復漢出版社
(1982).
3. 佐藤敏一著,賴耿陽譯著,金屬腐蝕加工技術, 復漢出版社
(1986).
4. B. Bhattacharyya, B. Doloi and P. S. Sridhar, “Electrochemical
Micro-machining : New Possibilities : for
Micro-manufacturing, ”Journal of Materials Processing Technology,
Vol.113, pp.301-305 (2001).
5. T. Kurita, K. Chikamori, S. Kubota and M. Hattori, “A study of
three-dimensional shape machining with an ECμM
system,”International Journal of Machine Tools & Manufacture, Vol.46,
pp.1311-1318(2005).
6. J. C. S. Neto, E. M. Silva and M. B. Silva, “Intervening variables in
Electrochemical machining, ”Journal of Materials Processing
Technology, Vol.179, pp.92-96(2006).
7. H. Hocheng, Y.H. Sun, S.C. Lin and P.S. Kao, “A material removal
analysis of electrochemical machining using flat-end cathode, ” Journal
of Materials Processing Technology, Vol.140, pp.264-268(2003).
8. S. H. Ahn, S. H. Ryu, D. K. Choi and C. N. Chu, “Electro-chemical
micro drilling using ultra short pulses, ”Precision Engineering, Vol.28,
pp.129-134(2003).
9. E.S.Lee, S.Y. Baek and C.R. Cho, “A study of the characteristics for
electrochemical micromachining with ultrashort voltage pulses, ”
International Journal of Advanced Manufacture Technology, Vol.31,
pp.762-769(2007).
10. M. Kock, V. Kirchner and R. Schuster, “Electrochemical
micromachining with ultrashort voltage pulses-a versatile method
with lithographical precision, ” Electrochimica Acta, Vol.48,
pp.3213-3219(2003).
11. J. Kozak, K. P. Rajurkar and Y. Makkar, “Selected problems of
micro-electrochemical machining,” Journal of Materials Processing
Technology, Vol.149, pp.426-431(2004).
12. B. Bhattacharyya, M. Malapati and J. Munda, “Experimental study on
electrochemical micromachining,” Journal of Materials Processing
Technology, Vol.169, pp.485-492(2005).
13. 楊昌融,“微電化學加工參數之最佳化設計及評估,”國立中央大
學機械研究所碩士論文(2004).
14. R. Hunt, “The Numerical Solution of Elliptic Free Bounday Problems
Using Multi-grid Techniques, ”Comp Physics, Vol.65,
pp.448-461(1986).
15. R. Hunt, “An Embedding Method for the Numberical Solution of the
Cathode Design Problem in Electrochemical Machining, ” International
Journal for Numerical Methods in Engineering, Vol.29,
pp.1177-1192(1990).
16. 蔡和蒼,“反求法在店化學加工刀具設計上之應用,”國立中央大學
機械研究所碩士論文(1995).
17. 陳志誠,“電化學加工刀具之設計,”國立中央大學機械研究所碩士
論文(1987).
18. 張啟生,“二維熱流效應對電化學加工反求工具形狀之分析,” 國
立中央大學機械研究所博士論文(1991).
19. S. H. Choi, S.H. Ryu and C.N. Chu, “Fabrication of WC micro-shaft
by using electrochemical etching, ” International Journal of Advanced
Manufacture Technology, Vol.31, pp.682-687(2007).
20. Z. Wang, B. Zhu and G. Cao,“Fabricating microelectrode by
electrochemical micromachining,”Dept. of Mechatronic Engineering,
Harbin Institute of Technology, Harbin(2006).
21. Y. M. Lim and S. H. Kim, “An electrochemical fabrication
method for extremely thin cylindrical micropin,” International Journal of Machine Tools & Manufacture, Vol.41, pp.2287-2296(2001).
22. Y. M. Lim, H. J. Lim, J. R. Liu and S. H. Kim,“Fabrication of cylindrical micropins with various diameters using DC current density control,” Journal of Materials Processing Technology, Vol.141, pp.251-255(2003).
23. M. Datta , D. Landolt, “Fundamental aspects and applications of
electrochemical microfabrication”, Electrochimica Acta,Vol.45, pp.2535–2558(2000).
24. 柯賢文,腐蝕及其防治,全華科技 (1995).
25. J.F. Thorpe and R.D. Zerkle, “Theoretical Analysis of the Equilibrium
Sinking of Shallow, Axially Symmetric, Cavities by Electrochemical Machining,” Electrochemical Society Princeton pp.1-39(1971).
26. 吳浩青,李永舫編著,電化學動力學,科技圖書(2001).
27. J. L. Stojak and J. B. Talbot, “Effect of particles on polarization during electrocodeposition using a rotating cylinder electrode,” Journal of Applied Electrochemistry Vol.31, pp.559-564(2001).
28. Madhavv S. Phadke著,黎正中譯著,穩健設計之品質工程,台北圖書(1993).
29. 鍾清章等編著,品質工程(田口方法),中華民國品質管制學會(1994).
30. 鄭燕琴編著,田口品質工程技術理論與實務, 中華民國品質管制學會(1995).
31.蘇朝墩編著,產品穩健設計~田口品質工程方法地介紹和應用,中華民國品質管制學會(1997).