跳到主要內容

簡易檢索 / 詳目顯示

研究生: 官鼎洋
Ding-yang Guan
論文名稱: 雙光子光致聚合微製造技術以螺旋線雷射掃描路徑增強微結構強度研究
A Research of Spiral Laser Scanning Path for Strengthening Structure based on Two-photon Photopolymerization Micro-fabrication Technology
指導教授: 廖昭仰
Chao-yaug Liao
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2014
畢業學年度: 103
語文別: 中文
論文頁數: 88
中文關鍵詞: 雙光子聚合技術雙光子吸收結構增強雷射路徑生成法則
外文關鍵詞: Two-Photon Polymerization(TPP), micro-fabrication technology, strengthen structure, laser path processing
相關次數: 點閱:12下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 雙光子吸收光致聚合微製造技術(Micro-manufacturing Technology of Two-photon Absorption Photopolymerization)是一個可以製作任意外形之三維立體微結構的技術,可運用領域廣泛,因而成為熱門之研究。TPP微製造因其製作材料與材料強度的問題,通常運用於微奈米級尺寸之製造,當要製作高深寬比或相對大尺寸物體之結構在以溶劑洗滌未被聚合的樹酯時,常會因為表面張力發生倒塌等結構破壞之現象,增加結構體的壁厚是一個可行的辦法,但製造時間將會呈倍數增加,且過密的曝光亦可能發生過度聚合產生尺寸不精確甚至發生微爆炸。因此本論文開發了螺旋路徑結構增強演算法在顧及製造效率之外又能達到加強結構強度之目的,並在生成雷射掃描路徑時,規劃在結構外表產生平順的螺旋過度線,以保持物體輪廓外觀完整。而在最後本文以幾個範例顯示此方法增強之結構。


    Due to Two-Photon Polymerization(TPP) micro-fabrication technology, in any three-dimensional complex shape and structure can be made in micro/nano scale ,it can be used in a wide range of fields. There, TPP micro-fabrication has become a popular issue.
    Because of materials and its strength problems, TPP micro-fabrication is usually used to manufacture objects in micro-nano size. When the structure of the object has high aspect ratio or relative large size and being washed the unpolymerized resin with solvent, the surface tension will destroy the structure. Increasing the thick of wall is a feasible method but the time of manufacturing will increase exponentially. Due to the excessive exposure, the structure will be excessively polymeric. Lead to imprecise of the size of the structure and cause micro explosion. This paper developed an rotation path algorithm to increase its wall thickness and take into account the manufacturing efficiency to strengthen the structure . Furthermore, let the path smooth and maintain the appearance of a complete contours while planning its laser path. And in the end of this paper, this method of enhancing the structure will be demonstrated with a few examples.

    摘要 I ABSTRACT II 目錄 III 圖目錄 IV 表目錄 VIII 符號說明 IX 第一章 緒論 1 1-1發展背景 1 1-2雙光子微製造發展演進之文獻 2 1-3雙光子微製造之結構成形文獻 6 1-4研究動機與目的 10 1-5論文架構 11 第二章 理論說明 12 2-1雙光子吸收之光致聚合反應 12 2-2雙光子聚合微製造技術 15 2-3雙光子聚合微製造技術之結構強度分析 19 第三章 以螺旋線雷射掃描路徑增強微結構強度研究 22 3-1螺旋線基本介紹 22 3-2螺旋線結構增強演算法 24 3-3層與層間螺旋線圓形偏移規劃 43 3-4平面鋪點規劃 52 第四章 螺旋線加工路徑模擬結果 53 4-1螺旋線增強一維直線模擬結果 54 4-2螺旋線增強二維平面輪廓模擬結果 56 4-3層與層間偏移運算模擬結果 59 4-4螺旋線增強三維立體結構模擬展示 61 第五章 結論與未來展望 70 5-1結論 70 5-2未來展望 70 參考文獻 71

    [1] Goeppert-Mayer, M., “Elementary processes with two quantum jumps”, Ann Phys,Vol.9,No.2,pp.273-294, 1931.
    [2] Kaiser, W. and Garrett, C.-G., “Two-photon excitation in CaF2:Eu2+”, Physical Review Letters, Vol.7, No.6,pp.229-231, 1961.
    [3] Maruo, S. and Kawata,S.,“Two-photon absorbed Near-infrared Photopolymerization for Three-dimensional Microfabrication,”Journal of Microelectromechanical Systems, Vol.7, pp.411-415, 1998.
    [4] Maruo, S., Nakamura, O. and Kawata, S., “Three-dimensional microfabrication with two-photon-absorbed photopolymerization” ,Opt. Lett.,Vol.22,pp.132-134, 1997.
    [5] Kawata,S. and Sun, H.-B., “Two-Photon Photopolymerization as a Tool for Making Micro-Devices”, Applied Surface Science, Vol. 208-209, pp. 153-158, 2003.
    [6] Wu, S., Serbin, J., and Gu, M., “Two-Photon Polymerization for Three-Dimensional Micro-Fabrication”, Journal of Photochemistry and Photobiology A : Chemistry, Vol. 181, pp. 1-11, 2006.
    [7] Nanoscribe company, “News and Reviews Nov 2010”, News, 2010.
    [8] Nanoscribe company, “Dip-in Laser Lithography (DiLL)”, Data Sheet, 2012.
    [9] Nanoscribe company, “News and Reviews April 2012”, News, 2012.
    [10] Obata, K., El-Tamer, A., Koch, L., Hinze, U., and Chichkov, B. N., “High-aspect 3D two-photon polymerization structuring with widened objective working range”, Science and Application,Vol.2,pp2047-7538, 2013.
    [11] Cumpston, B.H., Ananthavel, S.P., Barlow, S., Dyer, D.L., Ehrlich, J.E., Erskine, L.L., Heikal, A.A., Kuebler, S.M., Lee, I.Y.S., McCord-Maughon, D., Qin, J.Q., Rockel, H., Rumi, M., Wu, X.L., Marder, S.R. and Perry, J.W., “Two photon polymerization initiators for three-dimensional optical data storage and microfabrication” , Nature,Vol.398, pp.51-54, 1999.
    [12] Borisov, R.A., Dorojkina, G.N., Koroteev, N.I., Kozenkov, V.M., Magnitskii, S.A., Malakhov, D.V., Tarasishin, A.V. and Zheltikov, A.M., “Fabrication of three-dimensional periodic microstructures by means of two-photon polymerization” , Appl. Phys., Vol.67, pp.765-767, 1998.
    [13] Sun, H.B., Matsuo, S. and Misawa, H., “Three-dimensional photonic crystal structures achieved with two-photonabsorption photopolymerization of resin”, Appl. Phys. Lett., Vol.74, pp.786-788, 1999.

    [14] Deubel, M., Von Freymann, G., Wegener, M., Pereira, S., Busch, K. and Soukoulis, C.M., “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications”, Nature Mater., Vol.3, pp.444-447, 2004.
    [15] Guo, R., Li, Z.Y., Jiang, Z.W., Yuan, D. J., Huang, W. H. and Xia, A. D., “Log-pile photonic crystalfabricated by two-photon photopolymerization”, J. Opt. A, Vol.7,pp.396-399, 2005.
    [16] Serbin, J., Ovsianikov, A. and Chichkov, B., “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties”, Opt. Express, Vol.12, pp.5221-5228, 2004.
    [17] Kaneko, K., Sun, H.B., Duan, X.M. and Kawata, S., “Submicron diamond-lattice photonic crystals produced by twophoton laser nanofabrication”, Appl. Phys. Lett., Vol.83, pp. 2091-2093, 2003.
    [18] Deubel, M., Wegener, M., Kaso, A. and John, S., “Direct laser writing and 82 characterization of “slanted pore” photonic crystals”, Appl. Phys. Lett., Vol.85, pp. 1895-1897, 2004.
    [19] Seet, K.K., Mizeikis, V., Matsuo, S., Juodkazis, S. and Misawa, H., “Three-dimensional spiral-architecture photonic crystals obtained by direct laser writing”, Adv. Mater., Vol.17, pp.541-545, 2005.
    [20] Seet, K.K., Mizeikis, V., Juodkazis, S. and Misawa, H., “Three-dimensional horizontal circular spiral photonic crystals with stop gaps below 1 um”, Appl. Phys. Lett., Vol.88, pp.221101, 2006.
    [21] Grossman, N., Ovsianikov, A., Petrov, A., Eich, M. and Chichkov, B., “Investigation of optical properties of circular spiral photonic crystals”, Opt. Express, Vol.15, pp.13236-13243, 2007.
    [22] Tetreault, N., Von Freymann, G., Deubel, M., Hermatschweiler, M., Perez-Willard, F., John, S., Wegener, M. and Ozin, G.A., “New route to three-dimensional photonic bandgap materials: Silicon double inversion of polymer templates”, Adv. Mater., Vol.18, pp.457-460, 2006.
    [23] Stichel, T., Hecht, B., Houbertz, R., and Sextl, G., “Two-photon Polymerization as Method for theFabrication of Large Scale Biomedical Scaffold Applications”, Journal of Laser Micro/Nanoengineering, Vol.5, pp.209-212, 2010.
    [24] Stichel, T., Hecht, B., Houbertz, R. and Sextl, G., “Two-Photon Polymerization as Method for the Fabrication of Large Scale Biomedical Scaffold Applications”, Journal of Laser Micro/ Nanoengineering, Vol.5, pp.209-212, 2010.
    [25] Park, S.H., Kim, K.H., Lim, T.W., Yang, D.Y., Lee, K.S., “Investigation of Three-dimensional Pattern Collapse Owing to Surface Tension Using an Imperfection Finite Element Model”, Microelectronic Engineering, Vol.85, pp.432-439, 2008.
    [26] Thiel, M., Hermatschweiler, M., “Three-dimensional laser lithography”, Journal of Optik & Photonik, 2011.
    [27] Nanoscribe company, “News and Reviews August 2012”, News, 2012.
    [28] Nanoscribe company, “News and Reviews May 2014”, News, 2014.
    [29] Liao, C.Y., Bouriau, M., Baldeck, P., Léon, J.C., Masclet, C. and Chung, T.T.,
    “Two-dimensional slicing method to speed up the fabrication of mirco-objects
    based on two-photon polymerization”, In Apply Physics Letter, 91, 033108, 2007.
    [30] 潘恩亞、蒲念文、董玉平與游漢輝,「雙光子吸收光致聚合技術應用於微元件製作之研究」,中正嶺學報,34卷,1-16頁,2005。
    [31] Maruo, S. and Fourkas, J.T., “Recent Progress in Multiphoton Microfabrication”, Laser & Photonics Reviews, Rev.2, No.1-2, pp.100-111, 2008.
    [32] Sun, H.B., Maeda, M., Takada, K., Chon, J., Wu., M., Gu, M., and Kawata, S., “Experimental Investigation of Single Voxels for Laser Nanofabrication via Two-photon Photopolymerization”, Applied Physics Letters, Vol.83, pp.819-821, 2003.
    [33] Sun, H.B. and Kawata, S., “Two-photon Laser Precision Microfabrication and Its Applications to Micro-nano Devices and Systems”, Journal of Lightwave Technology, Vol.21, pp.624-633, 2003.
    [34] Park, S.H., Kim, K.H., Lim, W.L., Yang, D.Y. and Lee, K.S.,“Investigation of three-dimensional pattern collapse owing to surface tension using an imperfection finite element model”, Microelectronic Engineering, Vol. 85, pp.432-439, 2008.
    [35] Liao, C.Y., Bouriau, M., Baldeck, P., Léon, J.C., Masclet, C. and Chung, T.T.,
    “Two-dimensional slicing method to speed up the fabrication of mirco-objects
    based on two-photon polymerization”, In Apply Physics Letter, 91, 033108, 2007.
    [36] Jeong, Y.J., Lim, T.W., S., Y., Yang, D.Y., Kong, H.J. and Lee, K.S., “Proportional enlargement of movement by using an optically driven multi-link system with an elastic joint”, Optics Express, Vol. 18, Issue 13, pp 13745-13753, 2010.
    [37] Park, S.H., Kim, K.H., Lim, T.W., Yang, D.Y., Lee, K.S., “Investigation of Three-dimensional Pattern Collapse Owing to Surface Tension Using an Imperfection Finite Element Model”, Microelectronic Engineering, Vol.85, pp.432-439, 2008.
    [38] Maruo, S., Hasegawa, T., and Yoshimura, N., “Single-anchor support and supercritical CO2 drying enable high-precision microfabrication of three-dimensional structures”, Optics Express , Vol.17, No.23, 2009.
    [39] Yang, D.Y., Park, S.H., Lim, T.W., Kong, H.J., Yi, S.W., Yang, H.K. and Lee, K.S., “Ultraprecise Microreproduction of a Three-dimensional Artistic Sculpture by Multipath Scanning Method in Two-photon Photopolymerization”, Applied Physics Letters, 90, 079903, 2007.
    [40] Teh, W.H., Dürig, U., Salis, G., Drechsler, U., Mahrt, R.F., Smith, C.G. and Güntherodt, H.J., “SU-8 for Real Three-dimensional Subdiffraction-limit Two-photon Microfabrication”, Applied Physics Letters, Vol.84, pp.4095-4097, 2005.
    [41] 林翰良,「雙光子聚合微製造技術之三維結構製造品質改進研究」,國立中央大學,碩士論文,民國102年。
    [42] 董家威,「雙光子聚合微製造技術以能量均勻橢圓體為基之曝光時間最佳化研究」,國立中央大學,碩士論文,民國103年。

    QR CODE
    :::