本研究我們使用新穎兩次陽極氧化製程成功製備出規則孔洞排列的超薄陽極氧化鋁膜。超薄陽極氧化鋁膜孔徑約為86 奈米，且厚度可調控在400-700奈米之間。將超薄陽極氧化鋁膜轉附至矽單晶基材上當作模板可成功於矽單晶基材上製備各式零維與一維金屬奈米結構。
本研究首先藉由超薄陽極氧化鋁模板與電子蒸鍍技術可於矽單晶基材上成功製備大面積規則有序排列的銀金屬奈米點，銀奈米點的直徑可經熱處理調控在41-24奈米之間。此外，本研究也結合直流電沉積與超薄陽極氧化鋁模板法成功地在矽單晶基材上製備準直有序排列之一維鎳金屬奈米線。鎳奈米線長度可由電沉積時間所調控，而所製備的鎳奈米線直徑約為82奈米，與超薄陽極氧化膜的孔徑大小相近，且其排列呈六方最密堆積，與陽極氧化鋁膜的孔洞排列結構相同。實驗中若藉由添加少量的Pluronic P123於鎳電鍍液中則可製備出高密度排列之鎳金屬奈米管，且鍍製時 Pluronic P123的濃度對鎳金屬奈米管的成長速率與外觀形貌影響十分顯著。不同實驗條件所製備各式金屬奈米結構之外觀形貌、晶體結構與組成成分變化，將利用SEM, TEM, SAED與EDS做有系統的分析探討。

In the study, we have proposed a novel two-step anodic oxidation method to fabricate ultra-thin anodic aluminum oxide (AAO) membranes with highly-ordered nanopore structures. The nanopore diameter of the ultra-thin AAO membrane was about 86 nm, and the thickness can be tuned from 400 nm to 700 nm. The ultra-thin AAO membranes were then transferred onto Si substrates and served as the template for the fabrication of various O-D and 1-D metal nanostructures on Si substrates.
By combining the ultra-thin AAO template and e-beam deposition techniques, large-area, well-ordered arrays of silver metal nanodots were successfully fabricated on Si substrates. After appropriate heat treatments, the diameter of the silver nanodots produced can be tuned from 41 nm to 24 nm. On the other hand, by using DC electrodeposition within the ultra-thin AAO templates, vertically-aligned periodic arrays of 1-D nickel metal nanowires on Si substrates were successfully obtained. The Ni nanowires array exhibits the same hexagonal arrangement as the AAO nanopore strictures.The length of Ni nanowires could be controlled by adjusting the electrodeposition time. The diameter of Ni nanowires was approximately 82 nm, corresponding to the nanopore size of ultra-thin AAO templates. By adding small amount of Pluronic P123 into the nickel electroplating electrolyte, high-density, well-aligned nickel nanotubes were successfully synthesized. The growth rate and morphologies of the nickel nanotubes were greatly affected by the concentrations of Pluronic P123. The morphologies, crystal structures, and compositions of the O-D nanodots and 1-D nanowires and nanotubes have been systematically investigated by SEM, TEM, SAED, and EDS analyses.

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