微奈米結構近年來的應用相當廣泛，如太陽能面板上的奈米多孔結構、氣體感測元件上的奈米線結構、生醫載體上的奈米孔洞結構等。而石英材料在半導體領域上有著不可取代的獨特性質，故在石英材料上製作出微奈米結構，其發展性相當高。常見的微結構製作方式大多會運用到昂貴的設備及複雜的製程；而濕蝕刻的方式在石英上製作微奈米結構，其方法相較於乾蝕刻，有更快速、簡單、便宜之優勢。
本研究利用直接還原法合成出奈米金粒子，並利用化學方式將其沉積在石英表面上，再對石英表面進行熱退火處理、鍍白金處理，增加奈米金粒子在石英上的附著性並將其做為濕蝕刻之遮罩，以飽和氟化氫銨在恆溫30℃的條件下進行蝕刻，最終目地為在石英上製作出微奈米結構。
我們將探討沉積時間與熱退火對奈米金粒子粒子的形貌影響，並以奈米金粒子微遮罩濕蝕刻而成之微奈米石英結構，進行高度、輪廓、面積的討論，期許能夠在石英微奈米結構之應用發展上做出貢獻。

Nano-microstructures have been widely utilized in recent years, such as the nanoporous structure on the solar panels, the nanowire structure on the gas sensor elements, and the nanopore structure on biomedical carriers. Quartz materials have irreplaceable values and unique feature in the semiconductors field, so manufacturing Nano-microstructures on quartz is developmental. Most of nano-microstructures process will demand expensive equipment and complicated processes. However, adopting the wet etching process on quartz to make Nano-microstructures is faster, simpler, and cheaper than dry etching.
This research used chemical reduction method to synthesis the gold nanoparticle, and use chemical method to deposit it on the quartz, then proceed thermal annealing and coating platinum on the quartz surface, to increase the adherence as the mask for wet etching on the quartz that we control the etching tempeture on 30 ℃ during the process.
We will discuss the influence of deposition time and thermal annealing on the morphology of gold nanoparticle, and produce nano-microstructures on quartz by wet etching which using gold nanoparticle for mask. Finally, conduct height, profile, and area discussion. We expect that we can create contribution to the quartz nano-microstructures application and development.

[1] Christer fledlund, Ulf Undberg, Urban Bucht, Jan Soderkvist, " Anisotropic etching of Z-cut quartz," Micromeoh. Microeng, vol. 3,pp.65-73,1993
[2] Pelle Rangsteny, Christer Hedlund, Ilia V Katardjiev, Ylva B¨acklund," Etch rates of crystallographic planes in Z -cut quartz experiments andsimulation," Micromeoh. Microeng, vol. 8,pp.1-6,1998
[3] Tanya Karakouz, Ben M. Maoz, Gilad Lando, Alexander Vaskevich, Israel Rubinstein" Stabilization of Gold Nanoparticle Films on Glass by Thermal Embedding," ACS Applied Materials & Interfaces, vol. 3,pp.978-987,2011
[4] M. Torrell, L. Cunhaa, A Cavaleirob, E. Alvesc, N.P. Barradasc, F. Vaz," Functional and optical properties of Au:TiO2 nanocomposite films: The influence of thermal annealing," Applied Surface Science, vol. 256,pp.6536-6542,2010
[5] William Clower, Ville Kaajakari, Chester G. Wilson," Laser-Assisted Wet Etching of Quartz Crystal Resonators," Journal of microelectromechanical systems, vol. 27,pp.1,2018
[6] Yuanna Zhu, Yongqiang Cao, Aiyu Zhang, Ping Yang," Synthesis and Properties of Au Nanoparticles with Various Sizes," Advanced Materials Research, vol. 710,pp.117-121,2013
[7] Jeong Hoon Lee, Kyo Seon Hwang, Ki Hyun Yoon, Tae Song Kim, Saeyoung Ahn," Microstructure and Adhesion of Au Deposited on Parylene-c Substrate With Surface Modification for Potential Immunoassay Application," Transactions on plasma science, vol. 32,pp.505-509,2004
[8] Haya Alhummiany, Samuel Jarvis, Richard A. J. Woolley, Andrew Stannard, Matthew Blunt, Philip Moriarty," Dewetting of Au nanoparticle assemblies," Materials Chemistry, vol. 21,pp.16983-16989,2011
[9] Mihir S. Patel, Bikash K. Sinha," A Dual-Mode Thickness-Shear Quartz Pressure Sensor for High Pressure Applications," Sensors Journal, vol. 18,pp.4893-4901,2018
[10] Bruno P. Azeredo, Saikumar R. Yeratapally, Josh Kacher, Placid M. Ferreira, Michael D. Sangid, Michael D. Sangid," An experimental and computational study of size-dependent contact-angle of dewetted metal nanodroplets below its melting temperature," Applied Physics Letters, vol. 109,pp.213101,2016
[11] Yu-Hsiang Tang, Yu-Hsin Lin, Po-Li Chen, Ming-Hua Shiao, Chien-Nan Hsiao," Comparison of optimised conditions for inductively coupled plasma-reactive ion etching of quartz substrates and its optical applications,," Micro & Nano Letters, vol. 9,pp.395-398,2014
[12] Yu-Hsiang Tang, Yu-Hsin Lin, Ming-Hua Shiao, Chih-Sheng Yu," Development of thin quartz glass utilising through-glass-via (TGV) formation by dry etching technology," Micro & Nano Letters, vol. 11,pp.568-571,2016
[13] S. Reymond-Laruinaz, L. Saviot, V. Potina, C. Lopes, F. Vaz, M.C. Marco de Lucas," Growth and size distribution of Au nanoparticles in annealed Au/TiO2 thin films," Thin Solid Films, vol. 533,pp.138-143,2014
[14] Xiaoge Hu, Tie Wang, Shaojun Dong," Thermal annealing of Au nanorod self-assembled nanostructured materials: Morphology and optical properties," Colloid and Interface Science, vol. 316,pp.947-953,2007
[15] Yiming Bai, Lingling Yan, Jun Wang, Bo Yang, Nuofu Chen, Zhan'ao Tan," Tuning driving forces for preparation of faceted single crystalline Au nanoparticles from Au films," Materials Characterization, vol. 218,pp.1-6,2017
[16] Yu. A. Vainer, M. V. Zorina, A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo, R. A. Khramkov," Evolution of the Roughness of Amorphous Quartz Surfaces and Cr/Sc Multilayer Structures upon Exposure to Ion-Beam Etching," Bulletin of the Russian Academy of Sciences: Physics, vol. 75,pp.61-63,2011
[17] G. Kopitkovasa, T. Lipperta, C. Davidb, A. Wokauna, J. Gobrecht," F abrication of micro-optical elements in quartz by laser induced backside wet etching," Microelectronic Engineering, vol. 67,pp.438-444,2003
[18] Takayuki FUKASAWA, Yasuhiro HORIIKE," Deep Dry Etching of Quartz Plate Over 100μm in Depth Employing Ultra-Thick Photoresist (SU-8)," The Japan Society of Applied Physics, vol. 42,pp.3702-3706,2003
[19] Yasuhiro Morikawa, Tooru Koidesawa, Toshio Hayashi, Koukou Suu," A novel deep etching technology for Si and quartz materials," Thin Solid Films, vol. 515,pp.4918-4922,2007
[20] Zhangliang Xu, Zhengqi He, YongJ.Yuan," Investigation of sacrificial layer masking fabrication of dual-frequency quartz crystal microbalance," Sensors and Actuators, vol. 218,pp.157-162,2018
[21] Joonas J. Heikkinen,Tiina Kaarela, Anastasia Ludwig, Tatiana Sukhanova," Plasma etched carbon microelectrode arrays for bioelectrical measurements," Diamond and Related Materials, vol. 90,pp.126-134,2018