| 研究生: |
林巧雯 Chew-Wen Lin |
|---|---|
| 論文名稱: |
利用穿隧式電子顯微鏡的探針產生在鎳鋁合金(100)面上的局部氧化反應 STM tip-induced local oxidation on the NiAl(100) substrate |
| 指導教授: |
羅夢凡
Meng-Fan Luo |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 物理學系 Department of Physics |
| 畢業學年度: | 98 |
| 語文別: | 中文 |
| 論文頁數: | 82 |
| 中文關鍵詞: | 氧化鋁 、氧化反應 、蝕刻 、穿隧式電子顯微鏡 |
| 外文關鍵詞: | STM, oxidation, lithography, alumina |
| 相關次數: | 點閱:9 下載:0 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
利用穿隧式電子顯微鏡(scanning tunneling microscopy, STM)在低曝氧量的鎳鋁合晶表面上進行蝕刻的實驗。首先發現氧化條紋的產生會以兩種不同的模式出現。其一是在低功率(降低偏壓)條件下,氧化條紋會出現在部分的掃描範圍內,但是出現的位置是我們無法預測的。另一種是在高功率(增高穿隧電流)條件下,氧化條紋生成的位置可以被移動的探針來控制。接著實驗利用高功率條件控制氧化條紋生成,發現條紋生成的寬度、高度特性會隨著增加外加偏壓、穿隧電流和樣品溫度而增長,不過當探針與表面間的距離超過某一限定的高度後,條紋的寬度會變窄,甚至沒有條紋生成。另外不同種的反應物也會影響氧化條紋的生成特性。在此實驗顯示曝水氣(H2O)會比曝氧氣(O2)能產生更寬且更高的氧化條紋。此外,在我們的實驗中發現最精細的氧化條紋寬度為3 nm。
Nano – strips formation produced on pre-oxidation surface and a NiAl (100) substrate, caused by STM tip under constant current feedback in ultrathin vacuum (UHV) conditions is reported. Firstly, we lower the tip toward the surface by either decreasing the bias or increasing the tunneling current. The former uses a lower power and the Al2O3 pattern is formed through a self-organized manner, exhibiting an Al2O3 strip of width as small as 3 nm, but locations of the strips can’t be predicted. The later uses a higher power; although broader Al2O3 strips (about 8 nm wide), the patterns can be controlled by the tip motion. Then we use the higher power approach to discuss the mechanism that is clarified through evolution of the grown Al2O3 strip with the bias voltage, tunneling current, temperature (100 K and 300 K) and reactants (oxygen / water). Generally, the width increases little with the bias. The width always increases with the tunneling current. At a higher temperature (~300 K), the strip can be grown with a power (I x V) smaller than that at a lower temperature (~100 K). The strips can also be grown in a water-rich environment (humidity 80 %) with a power smaller than that in an oxygen-rich environment.
Chapter 1 reference:
[1] J. A. Dagata, J. Schneir, H. H. Harary, C. J. Evans, M. T. Postek, and J. Bennet, Appl. Phys. Lett. 56, 2001 (1990)
[2] E. S. Snow and P. M. Campbell, Appl. Phys. Lett. 64, 1932 (1994)
[3] B. G. Park and T. D. Lee, IEEE Trans. Magn. 35, 2919 (1999)
[4] T. Miyazaki and N. Tezuka, J. Magn. Magn. Mater. 139, L231 (1995)
[5] J. Kolodzey, E. A. Chowdhury, T. N. Adam, G. Qui, I. Rau, J. O. Olowolafe, J. S.
Suehle, and Y. Chen, IEEE Trans. Electron Devices 47, 121 (2000)
[6] E. S. Snow, D. Park, and P. M. Campbell, Appl. Phys. Lett. 69, 269 (1996)
Chapter 2 reference:
[1] Handbook of Microscopy for Nanotechnology(chapter 5) Yao, Nan; Wang, Zhong Lin (Eds.) 2005,
[2]Stephane Davy, Michel Spajer / Apply Physic Letter 69, No. 22(1996)
[3]Steen Madsen / Apply Physic Letter 69, No. 4(1996) [4]Igor I. Smolyaninov, David L. Mazzoni, Christopher C. vis / Apply Physic Letter 67, No. 26(1995)
[5] S. I. Bozhevolnyi, I. I. Smolyaninov, and O. Keller / Appl. Opt. 34, 3793 (1995)
[6]E. S. Snow and P.M. Campbell / Apply Physic Letter 64, No.15 (1994)
[7]P. M. Campbell, E. S. Snow, and P. J. McMarr / Apply Physic Letter 66, No.11 (1995)
[8]E. S. Snow, and P. M. Campbell / SCIENCE, Vol. 270, 8 December (1995)
[9]J. A. Dagata / SCIENCE, Vol. 270, 8 December (1995) [10]E. S. Snow, D. Park, and P. M. Campbell / Apply Physic tter 69, No.2 (1996)
[11]Phaedon Avouris, Tobias Hertel, and Richard Martel / Apply Physic Letter 71, No.2 (1997)
[12]S. C. Minne, J. D. Adams, G. Yaralioglu, S. R. Manalis, A. Atalar, and C. F. Quate / Apply Physic Letter 73, No.12 (1998)
[13]Ricardo Garcia, and Montserrat Callejia / Apply Physic Letter 72, No.18 (1998)
[14]Monttserrat Calleja and Ricardo Garcia / Apply Physic Letter 76, No.23 (2000)
[15]J. A. Dagata / Apply Physic Letter 73, No.2 (1998)
[16]Y. R. Ma, C. Yu, Y. D. Yao, and S. F. Lee / Physical Review B 64, 195324 (2001)
[17]Z. J. Davis, G. Abadal, O. Hansen, X. Borise, N. Barniol, F. Perez-Murano, and A. Boisen / Science Direct, Ultramicroscopy 97, 467-472 (2003)
[18] S. C. Minne, G. Yaralioglu, S. R. Manalis, J. D. Adams, J. Zesch, A. Atalar and C. F. Quate, Apply Physic Letter 72, 2340 (1998)
[19]J. A. Dagata, J. Schneir, H. H. Harary, C. J. Evans, M. T. Postek, and J. Bennett / Apply Physic Letter 56, No.20 (1990)
[20]Hiroyuki Sugumura, Tatsuya Uchida, Noboru Kitamura, and Hiroshi Masuhara / Apply Physic Letter 63, No.9 (1993)
[21]J. W. Lyding, T. C. Shen, J. S. Hubacek, J. R. Tucker, and G. C. Abeln / Apply Physic Letter 64, No.15 (1994)
[22]K. Matsumoto, M. Ishii, K. Segawa, and Y. Oka / Apply Physic Letter 68, No.1 (1996)
[23]D. Stievenard, P. A. Fontaine, and E. Dubois / Apply Physic Letter 70, No.24 (1997)
[24]J. W. Lyding, K. Hess, G. C. Abeln, D. S. Thompson, J. S. Moore, M. C. Hersam, E. T. Foley, J. Lee, Z. Chen, S. T. Hwang, H. Choi, Ph. Avouris, I. C. Kizilyalli / Applied Surface Science 130-132 (1998) 221-230
[25]M. C. Hersam, G. C. Abeln, and J. W. Lyding / Microelectronic Engineering 47 (1999) 235-237
[26] R. Franchy / Surface Science Reports 38 (2000) 195-294
[27] P.Gassmann et al. /Surface Science 319(1994)95-109
[28] R.-P. Blum, D. Ahlbehrendt, H. Niehus / Surface Science 366 (1996) 107-120
[29] D.R. Mullins, S.H. Overbury / Surface Science 199 (1988) 141-153
[30]Ralf-Peter Blum, Dirk Ahlbehrendt, Horst Niehus / Surface Science 396 (1998) 176-188
[31] R.-P. Blum, H. Niehus / Apply Physic. A 66, S529-S533 (1998)
[32] Nicolas Fremy, Vincent Maurice, and Philippe Marcus, J. Am. Cheram. Soc, 86, No. 4 (2003) 669-675
[33] R.C. Weast, M.J. Astle (Eds.), CRC Handbook of Chemistry and Physics, 59th Edition, CRC Press, Boca Raton, FL, 1978–1979
[34] M.S. Zei *, C.S. Lin, W.H. Wen, C.I. Chiang, M.F. Luo / Surface Science 600 (2006) 1942–1951
[35] N. P. Magtoto, C. Niu, B. M. Ekstrom, S. Addepalli, and J. A. Kelber / Applied Physics Letters 77, No.14 (2000)
[36] N. P. Magtoto, C. Niu, M. Anzaldua, J. A. Kelber, D. R. Jennison / Surface Science 472 (2001) L157-L163
[37] D. Haefliger, A. Stemmer / Science Direct, Ultramicroscopy 100 (2004) 457-464
Chapter 3 reference:
[1]真空技術與應用, VACUUM TECHNOLOGY & APPLICATION 行政院國家科學委員會精密儀器發展中心出版
[2] Hands Luth, Surfaces and Interfaces of Solids, 1993
[3] John B. Hudson, Surface Science An Introduction, 1998
[4] User’s guide of RHK-UHV 300
[5]G. Binnig, H. Rohrer, Ch. Gerber, E. Weibel: Appl. Phys. Lett. 40, 178(1982); Phys. Rev. Lett. 50, 120(1983)
[6]Stephen Gasiorowicz, Quantum Physic, 3rd edition, 2003
[7] SPECS, IQE 11/35 Ion Source Manual
[8] A. J. Melmed, J. Vac. Sci. B9, 601 (1991)
[9] J. P. Ibe, P. P. Bey, Jr., S. L. Brandow, R.A. Brizzolara, N.A. Burnham, D. P. DiLella, K.P. Lee, C. R. K. Marrian, and R. J. Colton, J. Vac. Sci.Technol.A 8 (1990) 4
Chapter 4 reference:
[1] C. Xu, D. W. Goodman / Chem. Phys. Lett. 263, 13-18 (1996)
[2] N. P. Magtoto, C. Niu, B. M. Ekstrom, S. Addepalli, and J. A. Kelber / Appl. Phys. Lett, Vol. 77, No. 14 (2000)
[3] N. P. Magtoto, C. Niu, B. M. Ekstrom, S. Addepalli, and J. A. Kelber / Surf. Sci. 472, L157-L163 (2001)
[4] Phaedon Avouris / Acc. Chem. Res. No.28, 95-102 (1995)
[5] B. N. J. Persson / Phys. Scripta. Vol. 38, 282-290 (1988)
[6] R. P. Blum, D. Ahlbehrendt, H. Niehus / Surf. Sci. 396, 176-188 (1998)
[7] Wikipedia / Water (data page)
[8] Wikipedia / Bond dissociation energy (Tabulated data)
[9] Mark Mostoller, R. M. Nicklow, and D. M. Zehner / Physical review B, Vol. 40, No. 5, 2856-2872 (1989)
[10] R. M. Koros, J. M. Deckers, R. P. Andres and M. Boudart / Chemical Engineering Science, Vol. 21, issue 10, 941-950 (1966)
[11] A. N. Artsyukhovich, V. A. Ukraintsev, I. Harrison / Surface Science 347, 303-318 (1996)
[12] H. Steininger, S. Lehwald and H. Ibach / Surf. Sci. 123 (1982) 1.