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研究生： 陳裕仁
Yu-Ren Chen
論文名稱： 利用導納軌跡圖做膜成長的光學監控
Optical monitoring of thin-film through admittance diagram
指導教授： 李正中
Cheng-Chung Lee
口試委員:
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Optics and Photonics
畢業學年度： 92
語文別： 中文
論文頁數： 51
中文關鍵詞： 薄膜 、補償 、監控 、光學監控 、導納軌跡
外文關鍵詞： monitoring, optical monitoring, admittance, thin-film, compensation
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    • 本研究試圖在薄膜成長的光學監控中另闢道路，不以一般Runsheet圖監控，而改以導納軌跡圖。
    Runsheet圖監控除了有極值點判斷不易的缺點，其圖形特性也只能看出光強度的變化，對於膜成長的變化亦無法有效掌握。導納軌跡圖本身的圖形特性不僅彌補了這述缺點，關於薄膜的相厚度的觀察更是其獨有。
    論文中將以數學及實驗驗證上述特性，並利用其觀察相厚度的特性即時做膜厚補償。

    Optical monitoring is the main method for determinating film thickness. Unlike monitoring by runsheet diagram, we raise a new method by admittance diagram.
    Runsheet has some popular defects such as diffcult to determinate the extreme point and ineffectiveness of observing film growth. Admittance diagram not only overcome these defects, but can oberve the variation of phase thickness.
    In this thesis, we vertify these qualities mathematically and by experiment. And real-time compensating by the property observing phase

    英文摘要.................................................................................................................I 中文目錄 ...............................................................................................................II 目錄.........................................................................................................................III 圖目錄.....................................................................................................................V 表目錄.....................................................................................................................VII 第一章 緒論.......................................................................................................1 第二章 原理.......................................................................................................2 2-1 基本物理量的建立...............................................................................2 2-1 單介面穿透與反射...............................................................................4 2-3 單層膜的等效導納與折射率...............................................................5 2-4 多層膜的等效導納與穿透率...............................................................7 2-5 導納軌跡圖...........................................................................................8 第三章 各種監控方式的比較...........................................................................11 3-1 石英監控...............................................................................................11 3-2 計時法監控...........................................................................................12 3-3 間接監控與直接監控...........................................................................12 3-4 反射式與穿透式...................................................................................13 3-5 光譜法...................................................................................................13 3-6 極值點法與定值監控法.......................................................................14 3-7 Overshoot Turning Point monitoring (OTPM)...........................................16 3-8 導納軌跡圖監控法...............................................................................17 第四章 導納軌跡圖監控...................................................................................18 4-1 圖形原理...............................................................................................18 4-2 靈敏度— Sensitivity................................................................................19 4-3 從穿透率推算等效導納.......................................................................22 4-4 導納軌跡法的膜厚補償.......................................................................25 4-4-1 抗反射膜補償..............................................................................25 4-4-2 四分之一膜堆補償......................................................................28 4-4-3 熱鏡的補償..................................................................................30 第五章 設備與實驗...........................................................................................32 5-1 實驗設備與硬體架設...........................................................................32 5-2 訊號評價...............................................................................................34 5-3 實驗結果...............................................................................................35 5-3-1 單層Ta2O5 ...................................................................................35 5-3-2 單層Ta2O5 加雜訊......................................................................37 5-3-3 抗反射膜......................................................................................38 第六章 結論.......................................................................................................41 參考資料 ...............................................................................................................42

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