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| 研究生： |
呂榮峰 Reng-Fen Lu |
|---|---|
| 論文名稱： |
BaTiO3填充床電漿反應器破壞CF4之初步研究 CF4 Abatement by Packed Bed Plasma Reactors |
| 指導教授： |
張木彬
Moo-Been Chang |
| 口試委員: | |
| 學位類別： |
碩士 Master |
| 系所名稱： |
工學院 - 環境工程研究所 Graduate Institute of Environmental Engineering |
| 畢業學年度： | 89 |
| 語文別： | 中文 |
| 論文頁數： | 102 |
| 中文關鍵詞： | 四氟甲烷 、全氟化物 、電漿 、填充床 、鈦酸鋇 |
| 外文關鍵詞： | CF4, PFCs, Plasma, Packed Bed, BaTiO3 |
| 相關次數： | 點閱：5 下載：0 |
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碳氟化物(PFCs, Perfluorinated Compounds)為全球溫暖化潛勢極高之氣體，且存活於大氣中之時間達千年以上，因此對於可能造成之地球溫暖化問題逐漸受到重視；而為有效控制日益嚴重之全球溫暖化現象，於1997年12月日本京都所召開的溫室效應氣體管制會議中，便將包括PFCs及CO2、CH4、HPFCs、N2O等氣體列為管制項目。PFCs的排放控制方式除了提高製程中之利用率外，尚可採用替代化學物、回收再利用和破壞削減等方法；而相較於替代化學物開發的不易、回收再利用的高成本，破壞削減是現階段控制PFCs之主要方法。本研究嘗試以實驗室規模之填充床式電漿反應系統，針對PFCs中最為穩定之物種CF4，進行非熱電漿處理，並藉由反應氣體組成、反應器形式(平行板式反應器及線管式反應器)、供電電壓及供電頻率等重要參數之控制，探討填充床式電漿技術對CF4轉化率、產物分佈及生成量的影響，並初步評估放電系統的能量利用效率，以提供未來實廠化操作之參考。配合半導體製程本研究中實驗設計之氣體組成為：CF4=500 ppm、Ar=4,000 ppm、O2=20%以及N2為balance，氣體總流量為300 sccm，於初步測試中瞭解Ar濃度的提高將有助於CF4之轉化效率，因此後續實驗中將Ar視為一添加氣體，提升其濃度至40%。實驗結果顯示平行板式反應器各操作參數(電極間距、電場分佈、施加電壓及輸入能量)間關係複雜，各參數間的變化彼此關連相繫，對於轉化CF4效率最佳操作點為電極間距落於1.4~2.0 cm間，其去除CF4之最佳效率可達33.5%，配合添加劑乙烯則可提高至42.6%；於線管式反應器中，發現增加填充BaTiO3之長度具有較佳之CF4轉化效率，且由於線管式反應器之放電能量較高，使得CF4之去除率可達48%，當添加劑乙烯加入系統中時則可提升至66.6%。就生成物之分布而言，CF4轉化反應之主要生成產物以CO2、COF2及CO為主，本研究已證實藉由BaTiO3填充床電漿反應器配合碳氫化合物添加劑(C2H2及C2H4)破壞CF4之技術深具發展潛力。
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