V頻段與W頻段微波光子通信系統中積體漸進式開槽天線之研製

簡易檢索 / 詳目顯示

回結果列表

研究生：	莊肇堂 Chao-Tang Chuang
論文名稱：	V頻段與W頻段微波光子通信系統中積體漸進式開槽天線之研製 Design and fabrication of V-band and W-band integrated tapered slot antennas for microwave photonic communication systems
指導教授：	陳念偉 Nan-Wei Chen
口試委員:
學位類別：	碩士 Master
系所名稱：	資訊電機學院 - 電機工程學系 Department of Electrical Engineering
畢業學年度：	94
語文別：	中文
論文頁數：	57
中文關鍵詞：	黃光微影、帶通濾波器、微波光子通信系統、共平面波導、漸進式開槽天線
外文關鍵詞：	microwave photonic communications, photolithography, coplanar waveguide, bandpass filter, tapered slot antenna
相關次數：	點閱：25 下載：0
分享至:	分享至facebook 分享至twitter

查詢本校圖書館目錄查詢臺灣博碩士論文知識加值系統勘誤回報

本論文主要研製可應用於微波光子通信系統之V頻段(50-75 GHz)與W頻段(75-110 GHz)積體漸進式開槽天線(tapered slot antennas)。在天線設計方面透過三種方法，分別為皺摺邊緣結構(corrugated edges)、蝕刻部份基板、蒸鍍週期性金屬條結構於蝕刻後之基板背面，改善製作於較厚基板上該類天線遠場特性。此外，基於量測與實際應用考量，透過所設計之V頻段與W頻段共平面波導(coplanar waveguide,CPW)至槽線轉接器，將天線饋入方式轉成CPW型式。在天線實作方面，使用半導體製程方法包括黃光微影、薄膜沉積、蝕刻技術、晶片研磨與拋光等技術實現此天線，並透過量測驗證模擬結果。最後，將天線與所設計之共平面波導帶通濾波器結合而成一天線模組，並分析該天線模組之特性。

In this thesis, novel V-band (50-75 GHz) and W-band (75-110 GHz) linear tapered slot antennas (LTSAs) that can find applications in microwave photonic communication systems are proposed and developed. In contrast to the traditional approach, the proposed LTSAs can be fabricated on electrically thick substrates without characteristics deterioration via the following avenues, viz. the corrugated side edges, the grooved substrate, and the periodic metal strips imprinted on the grooved substrate. Regarding its compatibility with measurement facilities and integrated circuits, the antenna feeding structure is transformed from the slotline (SL) to coplanar waveguide (CPW) through a SL to CPW transition. The proposed CPW-fed LTSAs are fabricated on silicon substrates via the monolithic integrated circuit processes, such as photolithography, thin film deposition, and wet etch. The measurement results are compared against the simulation results for design verification. Finally, V-band and W-band CPW filters are proposed and integrated with the LTSAs. The simulation results of the integrated antenna modules are demonstrated.

摘要.....................................................................i
致謝...................................................................iii
目錄....................................................................iv
圖目錄..................................................................vi
表目錄...................................................................x
第一章 序論..............................................................1
1.1 研究動機與目的.......................................................1
1.2 論文概述............................................................2
第二章 漸進式開槽天線....................................................3
2.1槽線的特性....................................................3
2.2 漸進式開槽天線的基本特性.....................................5
2.2.1 天線的幾何結構.........................................5
2.2.2 漸進式開槽天線之分析方法...............................7
第三章 漸進式開槽天線之設計..............................................9
3.1 天線基本設計準則.............................................9
3.1.1 基板厚度與介電係數.....................................9
3.1.2 天線型態..............................................11
3.1.3 天線長度..............................................12
3.1.4 天線開口寬度..........................................13
3.1.5 天線開口邊緣至基板邊緣寬度............................14
3.2 皺摺邊緣結構................................................16
3.3 蝕刻部分基板................................................21
3.4 週期性金屬條結構............................................24
3.5 饋入方法....................................................28
3.5.1 共平面波導至槽線轉換器................................29
3.5.2 轉接器與天線整合......................................30
第四章 天線製作與量測...................................................35
4.1 製程技術....................................................35
4.1.1 清洗試片..............................................35
4.1.2 黃光微影技術..........................................36
4.1.3薄膜製程...............................................37
4.1.4 蝕刻技術..............................................37
4.2 製作流程....................................................39
4.3 天線量測....................................................41
第五章 共平面波導帶通濾波器.............................................42
5.1 Ribbon-of-Brick-Wall共平面波導帶通濾波器....................42
5.2 濾波器與天線之整合..........................................45
第六章 結論.............................................................48
參考文獻................................................................49
附錄....................................................................53

                                

[1] A. Hirata, M. Harada, and T. Nagatsuma,“Multi-Gigabit/s Wireless Links Using Millimeter-Wave Photonic Techniques,”in Tech. Dig. Microwave Photonics 2001, pp.77-80, 2001.
[2] G. A. Chakam and W. Freude, “Coplanar phased array antenna with optical feeder and photonic bandgap structure,”in Microwave Photon. Technol. Dig., 1999, pp. 1-4.
[3] A. Hirata, H. Ishii, and T. Nagatsuma,“Design and Characterization of a 120-GHz Millimeter-Wave Antenna for Integrated Photonic Transmitters,”IEEE Transactions on Microwave Theory and Techniques, Vol. 49, No. 11, pp. 2157-2162, November 2001.
[4] D. Ferling, W. Heinrich, W. Kuebart, G. Luz, and F. Buchali,“Hybrid integrated fiber-amplifier-antenna module for radio applications at 60GHz,”in IEEE MTT-S. Int. Microwave Symp. Dig., 1999, pp. 457-460.
[5] K. Takahata, Y. Muramoto, S. Fukushima, T. Furuta, T. Furuta, and H. Ito,“Monolithically integrated millimeter-wave photonic emitter for 60-GHz fiber-radio application,”in Microwave Photon. Technol. Dig., 2000, pp. 229-232.
[6] K. C. Gupta Ramesh Garg, and I. J. Bahl, Microstrip Lines and Slotlines, Artech House, 1979.
[7] K. S. Yngvesson, D. H. Schaubert, T. L. Korzeniowski, E. L. Kolberg, T. Thungren, and J. F. Johansson,“Endfire Tapered Slot Antennas on Dielectric Substrate,”IEEE Trans. Antennas Prograt., Vol. AP-33, No. 12, pp. 1392-1400, 1985.
[8] R. Janaswamy, and D. H. Schaubert,“Analysis of the Tapered Slot Antennas,”IEEE Trans. Antennas Propagat., Vol. AP-35, No. 9, pp. 1058-1065, 1987.
[9] K. F. Lee, and W. Chen, Advances in Microstrip and Printed Antennas, John Wiley & Sons, New York, 1997. Chapter 9, p. 443.
[10] S. Sugawara, Y. Maita, K. Adachi, K. Mizuno,“A mm-wave tapered slot antenna with improved radiation pattern,”IEEE MTT-S IMS Dig., Vol. 2, pp. 959-962, 1997.
[11] S. Sugawara, Y. Maita, K. Adachi, K. Mizuno,“Characteristics of a mm-wave tapered slot antenna with corrugated edges,”IEEE MTT-S IMS Dig., Vol. 2, pp. 533-536, June 1998.
[12] T. G. Lim, H. N. Ang, I. D. Robertson and B. L. Weiss,“Tapered slot antenna using photonic bandgap structure to reduce substrate effects,”Electronics Letters., Vol. 41, No. 7, pp. 393-394, 2005.
[13] T. Q. Ho, and S. M. Hart,“A Broad-Band Coplanar Waveguide To Slotline Transition,”IEEE Microwave and Guide Wave Letter, Vol. 2, No. 10, pp. 415-416, October 1992.
[14] C. H. Ho, L. Fan, and K. Chang,“Experimental Investigations of CPW-Slotline Transitions for Uniplanar Microwave Circuits,”IEEE MTT-S IMS Dig., Vol. 2, pp. 877-880, June 1993.
[15] F. L. Lin, C. W. Chiu, and R. B. Wu,“Coplanar Waveguide Bandpass Filter—A Ribbon-of-Brick-Wall Design,”IEEE Transactions on Microwave Theory and Techniques, Vol. 43, No. 7, pp. 1589-1996, July 1995.
[16] K. S. Yngvesson, T. L. Korzeniowski, Y. S. Kim, E. L. Kollberg and J. F. Johansson,“The Tapered Slot Antenna–A New Integrated Element for MM Wave Applications,”IEEE Trans. Microwave Theory and Tech., Vol. 37, No. 2, pp. 365-374, Feb. 1989.
[17] S. N. Prasad and S. Mahapatra,“A New MIC Slot-Line Aerial,”IEEE Trans. Ant. Propagat., Vol. AP-31, No. 3, pp. 525-527, 1983.
[18] F. J. Zacker,“Surface- and Leaky-Wave Antennas,”in Antenna Engineering Handbook, Editor: H. Jasik, McGraw-Hill, New York, 1961.
[19] F. Ndagijimana, P. Saguet and M. Bouthinon,“Tapered Slot Antenna Analysis with 3-D TLM Method,”Electron. Lett., Vol. 26, No. 7, pp. 468-470, 1990.
[20] R. Janaswamy,“An Accurate Moment Method for the Tapered Slot Antenna,”IEEE Trans. Antennas Propagat., Vol.37, No. 12, pp. 1523-1528, 1989.
[21] J. F. Johansson,“A Moment Method Analysis of Linearly Tapered Slot Antennas,”in 1989 IEEE AP-S International Symposium, Vol.1, San Jose, CA, pp. 383- 386, 1989.
[22] A. Koksal and F. Kauffman,“Moment Method Analysis of Linearly Tapered Slot Antennas,”in 1991 IEEE AP-S International Symposium, Vol. 1, London, Ontario, pp. 314-317, 1991.
[23] X. H. Yang and W. X. Zhang,“An Equivalent Source Analysis for Tapered Slot Antennas,”in International Symposium on Antennas (JINA), pp. 96-99, 1990.
[24] P. R. Acharya, H. Ekstrom, S. S. Gearhart, S. Jacobsson, J. F. Johansson, E. L. Kollberg, and G. M. Rebeiz,“Tapered Slotline Antennas at 802 GHz,”IEEE Trans. Microwave Theory Tech., Vol. 41, No. 10, pp. 1715-1719, 1993.
[25] M. F. Catedra and J. A. Alcaraz,“Analysis of Microstrip and Vivaldi Antennas Using a CGFFT Scheme That Allows the Study of Finite Dielectric Sheets with Arbitrary Metallization on Both Sides,”in 1989 IEEE AP-S International Symposium, Vol. 3, San Jose, CA, pp. 1332-1335, 1989.
[26] E. Thiele and A. Taflove,“FDTD Analysis of Vivaldi Flared Horn Antennas and Arrays,”IEEE Trans. Antennas Propagat., Vol. 42, No. 5, pp. 633-641, 1994.
[27] J. B. Rizk and G. M. Rebeiz,“Millimeter-Wave Fermi Tapered Slot Antennas on Micromachined Silicon Substrates,”IEEE Trans. Antennas Propagat., Vol. 50, No. 3, pp. 379-383, 2002.
[28] U. Kotthaus and B. Vowinkel,“Investigation of Planar Antennas for Submillimeter Receivers,”IEEE Trans. Microwave Theory and Tech., Vol. 37, No. 2, pp. 375-380, Feb. 1989.
[29] I. K. Kim, N. Kidera, S. Pinel, J. Papapolymerou, J. Laskar, J. G. Yook, and M. M. Tentzeris, “Linear Tapered Cavity-Backed Slot Antenna for Millimeter-Wave LTCC Modules,”IEEE Antennas and Wireless Propagation Letters, Vol. 5, pp.175-178, 2006.
[30] D. F. Williams and S. E. Schqarz,“Design and performance of coplanar waveguide bandpass filters,”IEEE Trans. Microwave Theory Tech., Vol. 37 MTT-31, pp. 558-566, July 1983.
[31] C. Nguyen,“Broadside-coupled coplanar waveguide and their end-coupled band-pass filter applications,”IEEE Trans. Microwave Theory Tech., Vol. MTT-40, pp. 2181-2189, Dec. 1992.

簡易檢索 / 詳目顯示

相關論文