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研究生： 曾耀騰
Yao-teng Tseng
論文名稱： 雙波長影像式橢圓儀之建立
Development of Dual-wavelength Imaging Ellipsometer
指導教授： 徐桂珠
Kuei-chu Hsu
周晟
Chien Chou
口試委員:
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Optics and Photonics
畢業學年度： 99
語文別： 中文
論文頁數： 80
中文關鍵詞： 影像式橢圓儀 、扭轉向列型液晶 、單式光學系統
外文關鍵詞： unitary optical system, TN-LC, imaging ellipsometer
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    • 本論文利用光學橢圓儀的量測系統，利用兩種不同的波長光源與基本的P-S-A 架構來量測扭轉向列型液晶TN-LC的二維光學與物理製程參數的影像，藉由液晶樣品單式光學系統的特性結合橢圓雙折射等效性定理，透過穆勒矩陣與瓊斯矩陣的數學運算方法，計算出液晶的橢圓雙折射參數與等效線性雙折射與圓雙折射的光學參數。根據所量測到的光學二維參數再進一步計算出TN-LC的物理製程參數，包含非扭轉相位延遲、液晶導軸扭轉角的二維影像數據。利用最小二乘方的數學優化方法找出液晶樣品的分子預傾角與液晶單元間隙。利用本實驗理論與方法求得的TN-LC 二維影像與樣品的實際理論值獲得非常好的一致性。

    In this thesis, we proposed that the two-dimensional measurement of the cell parameters of a twisted nematic liquid crystal (TN-LC) can be achieved by using a polarizer-sample-analyzer ellipsometric configuration with two-wavelength illuminations. We measure the elliptical birefringence of a TN-LC by equivalently decomposing it as the combination of a linear phase retarder and a polarization rotator based on the equivalence theorem of a unitary optical system. Therefore, the analytical expression between the characteristic parameters and cell parameters are derived using the Jones and Mueller calculus. Furthermore, we numerically find out the pretilt angle and cell gap of a TN-LC by least-squares fitting method. We experimentally demonstrate that our proposed method provides high measurement accuracy since our measured results close to given values.

    中文提要………………………………………………………………………i Abstract………………………………………………………………………ii 致謝……………………………………………………………………………iii 目錄……………………………………………………………………………v 圖目錄…………………………………………………………………………vii 表目錄…………………………………………………………………………ix 一、緒論…………………………………………………………………………1 1-1 橢圓儀簡介……………………………………………………………1 1-2 研究動機及目的………………………………………………………1 1-3 文獻回顧………………………………………………………………2 1-4 論文架構………………………………………………………………3 二、實驗理論……………………………………………………………………4 2-1 極化光理論……………………………………………………………4 2-1-1 極化光簡介………………………………………………………4 2-1-2 瓊斯向量(Jones vector)…………………………………………7 2-1-3 瓊斯矩陣(Jones matrix)…………………………………………9 2-1-4 史托克向量(Stokes vector)與穆勒矩陣(Mueller matrix)………10 2-2 液晶簡介……………………………………………………………15 2-2-1 液晶種類…………………………………………………………16 2-2-2 液晶的光學特性…………………………………………………17 2-2-3 液晶的物理特性…………………………………………………19 2-2-4 液晶的分佈定向…………………………………………………21 2-2-5 液晶應用…………………………………………………………22 2-3 橢圓雙折射等效定理………………………………………………23 2-3-1 散射與吸收………………………………………………………23 2-3-2 線性雙折射與圓雙折射…………………………………………24 2-3-3 橢圓雙折射模型…………………………………………………24 2-3-4 橢圓雙折射等效定理……………………………………………26 2-3-5 TN-LC瓊斯矩陣數學模型………………………………………27 三、實驗方法……………………………………………………………………31 3-1 液晶樣品製作………………………………………………………31 3-2 實驗架構……………………………………………………………32 3-3 液晶色散方程式……………………………………………………35 3-4 系統穩定度與校正…………………………………………………36 3-4-1 雷射穩定度………………………………………………………36 3-4-2 系統測試校正……………………………………………………38 3-4-3 影像優化…………………………………………………………39 四、實驗數據與分析…………………………………………………………41 4-1算數平均數、標準差與相對誤差…………………………………41 4-2 液晶光學參數數據…………………………………………………42 4-3 液晶物理參數解析解………………………………………………50 4-4 最小二乘方擬合法…………………………………………………52 五、結論………………………………………………………………………59 5-1 結論與討論…………………………………………………………59 5-2 未來展望……………………………………………………………60 參考文獻………………………………………………………………………62 附錄一…………………………………………………………………………66 附錄二…………………………………………………………………………67

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