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研究生: 陳秀萍
Hsiu-Ping Chen
論文名稱: 微型化被動對準式4通道 x 2.5 Gbps光學連結模組之接收端研究
Research of Receiving Part for Compact and Passive-Alignment 4-channel x 2.5 Gbps Optical Interconnect Module
指導教授: 伍茂仁
Mount-Learn Wu
口試委員:
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程學系
Department of Optics and Photonics
畢業學年度: 97
語文別: 中文
論文頁數: 76
中文關鍵詞: 45 度反射面接收端模組光學連結模組
外文關鍵詞: 45 degree reflected mirror, receiving module, Optical Interconnect Module
相關次數: 點閱:4下載:0
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  • 近年來隨著網路通訊能力的日益進展,電腦的運算速度及系統的整合程度也日益提昇,而使傳統利用銅線傳遞電訊號的頻寬將不敷使用。於是,我們利用光連結技術來作為高速傳遞媒介,並將此技術大幅取代消費性電子產品中之各種訊號的連結。使用矽基材所製作之光連結模組將享有可微型化、散熱佳等優勢,且可套用標準半導體製程技術,來達到模組的高精度特性。
    在本論文中,我們所提出之微型化被動對準式光連結接收端模組,是利用一組含有45度反射斜面與V型凹槽陣列之矽基微光學平台,結合上4通道 ? 2.5 GHz的高頻傳輸線以及光檢測器元件之矽基光學模組,它是適合發展於板對板光學連接(Board-to-board Optical Interconnect)或晶片對晶片(Chip-to-chip)光學連接用途之矽基光學連接模組。在架構上,這個矽基微型化被動對準式光連結接收端模組包含有幾個重要的製程技術,如: 矽基微光學平台製程技術、高頻傳輸線製程技術、錫金焊料墊高製程技術以及模組整合封裝製程技術。
    微型化被動對準式光連結接收端模組已達成2.5 Gbps / channel的傳輸速度,尺寸在5 ´ 5 mm2之下。在經由光學追跡模擬的結果顯示,其接收端的響應度為-2 dB,而鄰近通道之串音雜訊在-49 dB之下。


    With the computing speed of computers up to several GHz and above, the telecommunications bandwidth through the traditional copper wire will be inadequate. Thus, incorporating optical light as a transmitting media will substantially improve most current interconnect technology due to its high transmission speed. Silicon optical bench technology for optical interconnect applications provides specific characteristics of miniaturized sizes, a good heat spreading, and so on. In addition, the fabrication process can be achieved by employing a standard semiconductor process technology. Therefore, it provides assembly with highly precise alignment, and mass-production possibilities.
    In this thesis, the compact and passive-alignment 4-channel ? 2.5 Gbps optical interconnect receiving module includes a silicon-based 45-degree micro-reflector, V-groove arrays, high-frequency transmission lines of 4-channel ? 2.5 GHz, and bonding pads with Au-Sn eutectic solder. It’s a free-space optical interconnect technology serving as a board to board or chip-to-chip interconnect, which is realized by assembling active and passive optical devices on a silicon optical bench(SiOB).
    The compact and passive-alignment optical interconnect receiving module includes some important fabrication technology, ex: fabrication of SiOB、fabrication of high frequency transmission line、fabrication of bonding pads and fabrication of module assembly.
    The transmission speed 2.5 Gbps / channel is achieved by the compact and passive-alignment optical interconnect receiving module and the size of SiOB can be only 5´5 mm2 for 4-channel interconnect. The optical performance simulated by the ray-tracing method, the coupling efficiency between multimode fiber and photo detector can reaches up to -2 dB. The cross-talk between neighboring channels can be suppressed down to -49 dB.

    摘要 ……………………………………………………… i Abstract ……………………………………………………… ii 目錄 ……………………………………………………… iv 圖目錄 ……………………………………………………… vi 表目錄 ……………………………………………………… ix 第一章 序論………………………………………………… 1 1-1 前言………………………………………………… 1 1-2 研究動機及目的…………………………………… 5 1-3 論文架構…………………………………………… 6 第二章 微型化被動對準式光連結模組之接收端製程整合技術開發…………………………………………… 7 2-1 微型化被動對準式之光連結接收端模組之光學設計…………………………………………………… 12 2-2 矽基微光學平台之製程技術……………………… 16 2-3 微型化被動對準式光連結接收端模組之高頻傳輸線特性與結構設計………………………………… 25 2-4 微型化被動對準式光連結接收端模組之高頻傳輸線製程技術………………………………………… 28 2-4.1 高速傳輸之雙層高頻傳輸線製程技術開發……… 30 2-5 光檢測器元件封裝之金屬墊高製程……………… 33 2-6 微型化被動對準式光連結接收端模組之封裝整合 38 2-6.1 光檢測元件之覆晶封裝法………………………… 38 2-6.2 接收端模組之光纖架設封裝方法………………… 39 第三章 微型化被動對準式光連結接收端模組之量測理論分析………………………………………………… 47 3-1 矽基微光學平台之高頻傳輸線特性量測………… 48 3-1.1 矽基平台之高速傳輸雙層高頻傳輸線特性量測… 51 3-2 微型化被動對準式光連結接收端模組之光學設計驗證………………………………………………… 54 3-3 微型化被動對準式光連結接收端模組之高頻特性量測分析…………………………………………… 60 第四章 結論與未來展望…………………………………… 63 參考文獻………………………………………………………… 66

    [1] Andrew C. Alduino, San Jose, CA(US); Mario J. Paniccia, Santa Clara, CA(US), “Method and apparatus providing an electrical-optical coupler”, (US patent NO. 7,306,378, USA, 2007)
    [2] 蕭旭良,“應用於光學連結模組之矽基光學連結技術”, (中央大學光電所碩士論文, 台灣, 2008)
    [3] Yasuhiko Aoki, Toshio Kato, Rogerio Jun Mizuno, Kenichi Iga,“Micro-optical bench for alignment-free optical coupling”, (OSA,Applied Physics,1999)
    [4] Kenji Tokoro et al., “Anisotropic Etching Properties of Silicon inKOH and TMAH Solutions”, IEEE International Symposium on Micromechatronics and Human Science,1998, p.65-69.
    [5] I. Zubel, “Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions”, Sensors and Actuators A: Physical, 84, p. 116-125,2000
    [6] I. Zubel, “Silicon anisotropic etching in alkaline solutions IV – The effect of organic and inorganic agents on silicon anisotropic etching process”, Sensors and Actuators A: Physical, 87, p. 163-171,2001
    [7] I. Zubel, “The effect of isopropyl alcohol on etching rate and roughness of (100) Si surface etched in KOH and TMAH solutions”, Sensors and Actuators A: Physical, 93, p. 138-147,2001
    [8] J. M. Lai, W. H. Chieng, Y-C Huang, “Precision alignment of mask etching with respect to crystal orientation”, (J. Micromech. Microeng B, p.327-329,1998)
    [9] 沈育星,“多層傳輸線應用在共平面波導到共平面帶狀線寬頻轉接的研製”, (中央大學電機所碩士論文, 台灣, 2002)

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