摘要
在研究可靠度問題時，可以分為兩類：1.設計參數方面以及2.壽命方面。本文所討論的是研磨精度在機械研磨製程參數變異下的可靠度問題，以期規劃最佳製程參數的選擇。
本文的主要架構，建立以狀態函數配合蒙地卡羅法，分析研磨精度之可靠度，並以機械研磨為實例分析有關研磨系統參數設計的可靠度，並做出成本分析。
在機械研磨中，如何得到良好的均勻度的是提升品質的重要指標，轉速更是影響生產成本的重要製程參數，轉速越快將使產能提高，但伴隨而來的可能是品質的下滑。其中加工條件(定位誤差)、材料特性(砥粒大小分佈)、表面粗糙度(接觸面積百分比)等是影響品質的重要參數。然而這些參數在機械研磨中扮演什麼角色，由於牽扯到誤差變異的影響，所以此類研究有其複雜性；實際上這些參數對機械研磨中的移除率以及均勻度具有相當的重要性。
本研究利用砥粒機械刮蝕移除率模型，針對加工條件(定位誤差)、材料特性(砥粒大小分佈)、表面粗糙度(接觸面積百分比)等的變異利用蒙地卡羅法模擬，並建立不同的表面粗糙度移除模式，期望能夠對機械研磨移除率與均勻度之提升有幫助。並以可靠度的觀點去評估不同的參數變異對機械研磨之影響，最後再以成本分析去選擇最佳製程轉速。

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