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研究生: 梁忠熙
Jones Liang
論文名稱: 高溫超導微波濾波器之研製與特性量測分析
指導教授: 葉則亮
Tse-Liang Yeh
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
畢業學年度: 91
語文別: 中文
論文頁數: 70
中文關鍵詞: 高溫超導微波濾波器高溫超導濾波器特性量測
外文關鍵詞: HTS Filter, HTS
相關次數: 點閱:5下載:0
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  • 摘 要
    本論文主要是利用高溫超導材料釔鋇銅氧(YBCO)薄膜,配合半導體製程與封裝技術,實現中心頻率為3GHz,1.3%BW窄頻的五極髮夾型帶通濾波器(5-Pole Hairpin BPF)的電路。根據實驗之需求,建立真空低溫冷卻系統與改裝微波模組測試設備;並針對超導材料特性與超導濾波器微波特性,建立超導特性參數之量測系統與分析技術,並驗證軟體模擬電路之結果。


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    目 錄 摘要 I 誌謝 II 目錄 III 第一章 前言 1 1.1 高溫超導體(HTS)之應用發展 1 1.2 論文架構 2 第二章 超導體材料與特性 3 2.1 超導體現象 3 2.2 超導材料之進展 5 2.3 溫度、電流、磁場對超導體之影響 6 2.4 超導體在微波應用之優勢 7 第三章 高溫超導濾波器(HTS Filter) 8 3.1 濾波器之型式 8 3.2 濾波器之規格(Specification) 10 3.3 高溫超導濾波器之設計概念 12 第四章 量測原理與量測系統之建立 17 4.1 超導材料特性之量測 17 4.1.1 臨界溫度(Critical Temperature) Tc之量測 17 4.1.2 臨界電流密度(Critical Current Density) Jc之量測 18 4.1.3 接觸電阻率(Specific Contact Resistance) ρC之量測 19 4.1.4 材料特性試片的光罩圖案(Mask Pattern)之設計 20 4.2 超導濾波器微波特性之量測 21 4.2.1 S參數(S Parameter)之量測 21 4.2.2 品質係數(Quality Factor) Q之量測 22 4.2.3 表面電阻(Surface Resistance) Rs之量測 23 4.3 量測系統之建立 24 4.3.1 量測儀器之架構 24 4.3.2 真空低溫系統(Vacuum Cryosystem) 25 第五章 製程與封裝技術 30 5.1 製程(Process) 30 5.2 封裝(Package) 32 第六章 實驗結果與分析 34 6.1 超導材料特性之量測分析 34 6.1.1 臨界溫度Tc 34 6.1.2 臨界電流密度Jc 38 6.1.3 接觸電阻率ρC 47 6.2 超導濾波器微波特性之量測分析 53 6.2.1 S參數 53 6.2.2 品質係數Q 60 6.2.3 表面電阻Rs 64 第七章 結論與展望 65 7.1 結論 65 7.2 展望 67 參考文獻 68

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