論文摘要
本論文主要為利用微機電以及半導體製程的技術，製作出靜態的微光柵和結合梳狀致動器與光柵之可動式光柵；成功製作後，可加電壓致動梳狀致動器來拉動光柵，使得兩光柵輪廓間有一相對位置的改變，因而造成此雙光柵等效輪廓(Effective profile)的變化，進而改變入射此雙光柵之雷射光的繞射現像；而透過雙光柵的不同設計，可使此元件作為光調制器以及光開關，並提供各種不同的需求。
在本文中，將製作分別以石英(Quartz)、氮化矽薄膜(Si3N4 Thin Filn)、矽(Silicon)為基材的靜態微光柵；另外，也將製作梳狀致動器並量測其致動情形以及量測石英雙光柵探討本文中理論的可行性；最後則將分別製作結合梳狀致動器與矽光柵、以及結合梳狀致動器與氮化矽薄膜光柵的元件，並分別探討微機電矽雙光柵及氮化矽薄膜雙光柵的特性；而由於本文中之元件是以矽為基板並以微光機電的技術所製作，因此可達到微小化及大量製造節省成本的優點。

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