表面電漿共振(surface plasmon resonance，SPR)生物感測器之運用在生物科技上已經愈來愈廣泛，但廣為使用之傳統SPR感測器其偵測極限只達1pg/mm2表面生物分子的覆蓋度，如何提高SPR感測器的偵測極限一直是相關研究學者所努力的目標。本論文主要以共濺鍍(co-sputter)的方式製作具有金奈米團簇( nanocluster)之二氧化矽複合膜層，藉由控制不同之鍍膜參數來比較不同金屬粒子分佈情形之混鍍膜層對於感測介質變化的靈敏度。利用等效介質理論(effective media theory)來模擬混鍍膜層於不同角度之強度反射光譜。量測方面主要以實驗室自行開發之衰逝全反射(attenuated total reflection，ATR)生醫感測儀來量測反射光強對應不同入射角度之曲線，並以氮氣和氬氣的SPR角差異量來分析感測器之靈敏度，另外，搭配穿透式電子顯微鏡(transmission electric microscopy，TEM)來觀測金屬粒子在混鍍膜層之分佈情況。並以能量分散光譜(energy dispersive spectroscopy，EDS)來量測試片所包含的元素以及半定量的分析。由於入射光激化混鍍膜層中之奈米團簇，產生粒子電漿子(particle plasmons，PPs)，造成局域電磁波強化現象，對於感測層介質變化有靈敏度提高之效應。利用此試片對去氧核糖核酸之雜交反應分析，與傳統之SPR生醫感測器比較。相較於傳統之SPR晶片，本論文中所製作之混鍍膜層SPR感測器在氣體偵測上靈敏度提高至10倍以上。

Surface plasmon resonance (SPR) biosensor has been widely used in biotechnology. Currently, the detection limit of traditional SPR biosensor is about 1pg/mm2. How to improve the detection limit of SPR biosensor is the most interesting issue for the researchers in the biosensor area. In the thesis, gold nano-clusters embedded in silica composite thin film is made to improve the detection limit by using a co-sputter deposition. We control the deposition parameters to get different particle sizes and volume fractions. The different SPR angle of helium and argon are detected by home-made attenuated total refraction (ATR) sensing instrument. The distribution of gold nanoclusters embedded in silica thin film, which is detected by transmission electric microscopy (TEM), results in the ATR spectra different from the one that is counted by effective media theory. Energy dispersive spectroscopy (EDS) is used to detect the characteristics of the composite thin film. When the gold nanoclusters embedded in silica thin film is illuminated by the incident light, the local electro-magnetic field will be enhanced through the excitation of the localized surface plasmons (LSPs), or so-called particle plasmons (PPs). This sample is also used to detect DNA hybridization. In contrast with traditional SPR sensor, the sensitivity of the SPR sensor with the composite thin film is achieved up to at least ten-fold in the gas detection.

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