本論文以乾式接著劑之雙面膠帶快速密封微流道基板，達成高接合強度與高品質之微流體系統。接合製程於微流體系統中的流道完整性相關聯，除了乾式膠帶以外的結合方法都必須在高溫高壓或是使用溶劑的條件下才能完成，這會降低成功率及耗費高成本。膠帶接合法容易操作且可於常溫、低壓及短時間內達成有效接合，然而製程簡易的條件下選用合適的膠帶與優化的接合參數對於微流體系統的品質可有效提升。具黏彈性膠帶與基材性質使接合介面有氣泡，進而影響接合強度，且不僅氣泡帶來影響，膠帶厚度亦是影響強度的因素，但較少學者詳細探討膠帶接合法中之接合影響因素，因此本論文針對膠帶接合法作相關探討。
為了製備高接合強度高品質的微流體系統，本論文探討雙面膠帶厚度、接合時間和覆蓋層性質三種影響性能的接合參數，使用30μm、50μm、60μm和80μm四種厚度的雙面膠及0秒(手壓)、5秒和15秒的接合時間，並分別接合不可撓覆蓋層和可撓覆蓋層。以顯微影像分析接合後之介面氣泡率與測量接合強度，並觀察流道橫切面形貌，結果以60μm雙面膠帶接合15秒時間有高的接合強度及好的介面形貌，分別接合不可撓覆蓋層之平均氣泡率為0.47±0.18%，比手動壓合減少了約7.97%，使接合強度增加約2.07 bar至11.26±1.49 bar；接合可撓覆蓋層透過緩壓操作之平均氣泡率為0.25±0.06%，與0秒相比下降約2.11%，使接合強度提升約0.97 bar至3.93±0.36 bar。不可撓覆蓋層因具有較好的剛性使強度遠大於可撓覆蓋層約7.3 bar，但可撓覆蓋層亦有足夠高的接合強度應用於微流體系統。
流道橫切面形貌可驗證接合介面中的黏著劑沒有被擠壓進入流道空間內，能夠保持完整的流道形貌不變形不堵塞。另外為觀察接合品質穩定性將接合完成之微流道裝置存放於大氣環境中30和60天，結果顯示放置時間對高強度裝置影響小。可為膠帶接合法製備微流體系統提供接合參數與膠帶選擇的參考依據，可幫助提升製程良率並適用於未來大量生產需求。

In this study, the microchannel sealed with double-sided adhesive tape to achieve high bonding strength and high-quality microfluidic system. Bonding process was related to the microchannel integrity in the microfluidic system. Besides the dry adhesive tape bonding, it must be fabricated with the high temperature and pressure or via solvent conditions, which lead to low yield and high cost. The tape bonding is simple to operate, and the material is easily obtainable. Moreover, an effective bonding can be achieved at room temperature, low pressure and short bonding time. However, selecting suitable tapes and optimized bonding parameters in the simple manufacturing process can effectively improve the quality of the microfluidic chip. Due to the viscoelasticity of adhesive tape and substrate properties to produce the bubble phenomenon, the bonding strength will be affected. The bonding strength is influenced by two factors: the bubble and thickness of the tape. Few scholars discuss in detail the bonding strength factors with the tape bonding method. Therefore, we focus on investigating dry-adhesive bonding in this thesis.
In order to fabricate high bonding strength and high-quality microfluidic chips, this study discusses three parameters that affect the performance: tape thickness, bonding time, and properties of cover layer. This is achieved using 30μm, 50μm, 60μm, and 80μm thick double-sided tape and 0sec (hand press), 5sec, and 15sec bonding time, and bonding with inflexible cover layer and flexible cover layer respectively. The bubble ratio was analyzed by microscopic image, the bonding strength was measured, and the cross-section morphology of the channel was observed. The results were obtained by bonding with 60μm double-sided tape with 15sec bonding time of high bonding strength and competent interface morphology. The average bubble ratio of the inflexible cover layer is 0.47±0.18%, which is 7.97% lower than 0sec bonding time, and the bonding strength is increased by 2.07 bar to 11.26±1.49 bar; the average bubble ratio of the flexible cover layer is 0.25±0.06%, decreased about 2.11% compared to 0sec, and increases the bonding strength of about 0.97 bar to 3.93±0.36 bar. The inflexible cover layer is stronger than the flexible cover layer since the bonding strength increased 7.3 bar due to its better rigidity. Though the flexible cover layer also has enough bonding strength for the microfluidic chip.
The cross-section of the channel can verify the interface adhesive is not squeezed into the channel, and the shape of the channel remains constant without deformation or clogging. In addition, the devices were stored in the atmosphere for 30 and 60 days to observe the bonding-quality stability. The results show that the storage time does not significantly effect high-strength devices. It can be a reference for the preparation of microfluidic system by tape bonding process and the selection of tapes, which can improve the process yield and apply to mass production requirements in the future.

[1] A. Manz, N. Graber, and H. á. Widmer, "Miniaturized total chemical analysis systems: a novel concept for chemical sensing," Sensors and actuators B: Chemical, vol. 1, no. 1-6, pp. 244-248, 1990.
[2] E. K. Sackmann, A. L. Fulton, and D. J. Beebe, "The present and future role of microfluidics in biomedical research," Nature, vol. 507, no. 7491, pp. 181-9, Mar 13 2014.
[3] R. H. Liu, K. Dill, H. S. Fuji, and A. McShea, "Integrated microfluidic biochips for DNA microarray analysis," Expert review of molecular diagnostics, vol. 6, no. 2, pp. 253-261, 2006.
[4] S. E. Weigum, P. N. Floriano, N. Christodoulides, and J. T. McDevitt, "Cell-based sensor for analysis of EGFR biomarker expression in oral cancer," Lab Chip, vol. 7, no. 8, pp. 995-1003, Aug 2007.
[5] K. Liu and Z. H. Fan, "Thermoplastic microfluidic devices and their applications in protein and DNA analysis," Analyst, vol. 136, no. 7, pp. 1288-1297, 2011.
[6] O. Skurtys and J. Aguilera, "Applications of microfluidic devices in food engineering," Food Biophysics, vol. 3, no. 1, pp. 1-15, 2008.
[7] S. Neethirajan, I. Kobayashi, M. Nakajima, D. Wu, S. Nandagopal, and F. Lin, "Microfluidics for food, agriculture and biosystems industries," Lab on a Chip, vol. 11, no. 9, pp. 1574-1586, 2011.
[8] C.-W. Tsao, "Polymer Microfluidics: Simple, Low-Cost Fabrication Process Bridging Academic Lab Research to Commercialized Production," Micromachines, vol. 7, no. 12, p. 225, 2016.
[9] C.-W. Tsao and D. L. DeVoe, "Bonding of thermoplastic polymer microfluidics," Microfluidics and Nanofluidics, vol. 6, no. 1, pp. 1-16, 2008.
[10] X. Zhu, G. Liu, Y. Guo, and Y. Tian, "Study of PMMA thermal bonding," Microsystem Technologies, vol. 13, no. 3-4, pp. 403-407, 2006.
[11] D. S. Kim, H. S. Lee, J. Han, S. H. Lee, C. H. Ahn, and T. H. Kwon, "Collapse-free thermal bonding technique for large area microchambers in plastic lab-on-a-chip applications," Microsystem Technologies, vol. 14, no. 2, pp. 179-184, 2007.
[12] C. W. Tsao, L. Hromada, J. Liu, P. Kumar, and D. L. DeVoe, "Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment," Lab Chip, vol. 7, no. 4, pp. 499-505, Apr 2007.
[13] H. Shinohara, J. Mizuno, and S. Shoji, "Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer," Sensors and Actuators A: Physical, vol. 165, no. 1, pp. 124-131, 2011.
[14] D. A. Mair, M. Rolandi, M. Snauko, R. Noroski, F. Svec, and J. M. Fréchet, "Room-temperature bonding for plastic high-pressure microfluidic chips," Analytical chemistry, vol. 79, no. 13, pp. 5097-5102, 2007.
[15] N. Keller et al., "Tacky cyclic olefin copolymer: a biocompatible bonding technique for the fabrication of microfluidic channels in COC," Lab Chip, vol. 16, no. 9, pp. 1561-4, Apr 26 2016.
[16] S. P. Ng, F. E. Wiria, and N. B. Tay, "Low Distortion Solvent Bonding of Microfluidic Chips," Procedia Engineering, vol. 141, pp. 130-137, 2016.
[17] M. Tolunay, P. Dawson, and K. Wang, "Heating and bonding mechanisms in ultrasonic welding of thermoplastics," Polymer Engineering & Science, vol. 23, no. 13, pp. 726-733, 1983.
[18] A. Yousefpour, M. Hojjati, and J.-P. Immarigeon, "Fusion bonding/welding of thermoplastic composites," Journal of Thermoplastic composite materials, vol. 17, no. 4, pp. 303-341, 2004.
[19] K. Kistrup, C. E. Poulsen, M. F. Hansen, and A. Wolff, "Ultrasonic welding for fast bonding of self-aligned structures in lab-on-a-chip systems," Lab on a Chip, vol. 15, no. 9, pp. 1998-2001, 2015.
[20] Z. Zhang, Y. Luo, X. Wang, Y. Zheng, Y. Zhang, and L. Wang, "A low temperature ultrasonic bonding method for PMMA microfluidic chips," Microsystem technologies, vol. 16, no. 4, pp. 533-541, 2010.
[21] M. Diaz-Gonzalez and A. Baldi, "Fabrication of biofunctionalized microfluidic structures by low-temperature wax bonding," Anal Chem, vol. 84, no. 18, pp. 7838-44, Sep 18 2012.
[22] L. Riegger, O. Strohmeier, B. Faltin, R. Zengerle, and P. Koltay, "Adhesive bonding of microfluidic chips: influence of process parameters," Journal of Micromechanics and Microengineering, vol. 20, no. 8, p. 087003, 2010.
[23] P.-C. Chen, Y.-M. Liu, and H.-C. Chou, "An adhesive bonding method with microfabricating micro pillars to prevent clogging in a microchannel," Journal of Micromechanics and Microengineering, vol. 26, no. 4, p. 045003, 2016.
[24] P.-C. Chen and C.-C. Chen, "Addition of structural features and two-step adhesive bond method to improve bonding quality of thermoplastic microfiltration chip," Sensors and Actuators A: Physical, vol. 258, pp. 105-114, 2017.
[25] 吳文政. 科學新知-接著劑原理. Available: http://tify15.weebly.com/uploads/5/9/2/9/59296227/%E7%A7%91%E5%AD%B8%E6%96%B0%E7%9F%A5-%E6%8E%A5%E8%91%97%E5%8A%91%E5%8E%9F%E7%90%86.pdf
[26] F. Dang et al., "High-performance genetic analysis on microfabricated capillary array electrophoresis plastic chips fabricated by injection molding," Analytical chemistry, vol. 77, no. 7, pp. 2140-2146, 2005.
[27] C. S. Goh, S. C. Tan, K. T. May, C. Z. Chan, and S. H. Ng, "Adhesive bonding of polymeric microfluidic devices," 11th Electronics Packaging Technology Conference, 2009.
[28] J. Kim, R. Surapaneni, and B. K. Gale, "Rapid prototyping of microfluidic systems using a PDMS/polymer tape composite," Lab Chip, vol. 9, no. 9, pp. 1290-3, May 07 2009.
[29] H. Y. Tan, W. K. Loke, and N.-T. Nguyen, "A reliable method for bonding polydimethylsiloxane (PDMS) to polymethylmethacrylate (PMMA) and its application in micropumps," Sensors and Actuators B: Chemical, vol. 151, no. 1, pp. 133-139, 2010.
[30] C. S. Thompson and A. R. Abate, "Adhesive-based bonding technique for PDMS microfluidic devices," Lab Chip, vol. 13, no. 4, pp. 632-5, Feb 21 2013.
[31] P. Nath, D. Fung, Y. A. Kunde, A. Zeytun, B. Branch, and G. Goddard, "Rapid prototyping of robust and versatile microfluidic components using adhesive transfer tapes," Lab Chip, vol. 10, no. 17, pp. 2286-91, Sep 7 2010.
[32] B. J. Kim, D. Lee, J. Lee, and S. Yang, "A novel method to fabricate parylene-based flexible microfluidic platforms with commercial adhesive tape," Journal of Micromechanics and Microengineering, vol. 25, no. 1, p. 017003, 2015.
[33] J. Moral-Vico et al., "Dual chronoamperometric detection of enzymatic biomarkers using magnetic beads and a low-cost flow cell," Biosens Bioelectron, vol. 69, pp. 328-36, Jul 15 2015.
[34] P. Khashayar et al., "Rapid prototyping of microfluidic chips using laser-cut double-sided tape for electrochemical biosensors," Journal of the Brazilian Society of Mechanical Sciences and Engineering, vol. 39, no. 5, pp. 1469-1477, 2016.
[35] V. Zamora et al., "Laser-Microstructured Double-Sided Adhesive Tapes for Integration of a Disposable Biochip," Proceedings, vol. 1, no. 4, p. 606, 2017.
[36] J. Li, C. Liang, H. Zhang, and C. Liu, "Reliable and high quality adhesive bonding for microfluidic devices," Micro & Nano Letters, vol. 12, no. 2, pp. 90-94, 2017.
[37] M. Serra, I. Pereiro, A. Yamada, J. L. Viovy, S. Descroix, and D. Ferraro, "A simple and low-cost chip bonding solution for high pressure, high temperature and biological applications," Lab Chip, vol. 17, no. 4, pp. 629-634, Feb 14 2017.
[38] J. Kim, Y. Shin, S. Song, J. Lee, and J. Kim, "Rapid prototyping of multifunctional microfluidic cartridges for electrochemical biosensing platforms," Sensors and Actuators B: Chemical, vol. 202, pp. 60-66, 2014.
[39] I. Vedarethinam, P. Shah, M. Dimaki, Z. Tumer, N. Tommerup, and W. E. Svendsen, "Metaphase FISH on a chip: miniaturized microfluidic device for fluorescence in situ hybridization," Sensors, vol. 10, no. 11, pp. 9831-9846, 2010.
[40] F. He and S. R. Nugen, "Automating fluid delivery in a capillary microfluidic device using low-voltage electrowetting valves," Microfluidics and nanofluidics, vol. 16, no. 5, pp. 879-886, 2014.
[41] X. Huang et al., "Clam-inspired nanoparticle immobilization method using adhesive tape as microchip substrate," Sensors and Actuators B: Chemical, vol. 222, pp. 106-111, 2016.
[42] X. Zhang, Z. Zhu, Z. Ni, N. Xiang, and H. Yi, "Inexpensive, rapid fabrication of polymer-film microfluidic autoregulatory valve for disposable microfluidics," Biomedical microdevices, vol. 19, no. 2, p. 21, 2017.
[43] 3M. (2017). Technical data of the adhesive tape. Available: https://www.3m.com/3M/en_US/company-us/
[44] M. Dekker, "Pressure sensitive adhesives and applications," 2004.
[45] P. Saffman, "PG Saffman and GI Taylor, Proc. R. Soc. London, Ser. A 245, 312 (1958)," Proc. R. Soc. London, Ser. A, vol. 245, p. 312, 1958.
[46] J.-M. Vanden-Broeck, "Fingers in a Hele–Shaw Cell with surface tension," Physics of Fluids, vol. 26, no. 8, p. 2033, 1983.
[47] G. M. Homsy, "Viscous fingering in porous media," Annual review of fluid mechanics, vol. 19, no. 1, pp. 271-311, 1987.
[48] Y. Lastra, L. Moulton, R. Anazco, and L. Kondic, "The Hele-Shaw cell/ Saffman Taylor instabilities: Theoretical and experimental comparison of Newtonian fluids," 2014.