This paper focuses on the design and realization of an application framework to develop Manufacturing Execution System (MES) for semiconductor fab to optimize production activities in shop floor and on rapid response for changeful conditions. MES is the accumulation of the methods and tools used to complete production activity from planned order launch to finished goods, which integrates the accurate and up-to-date information even to the decision-making management. As for a semiconductor industry, it is a complex production which needs high automatic and accurate equipments or devices. Besides, the intelligent information systems for administer. These systems include MES, Enterprise Resource Planning (ERP), Advanced Planning and Scheduling (APS), Supervisor Control And Data Acquisition (SCADA), Human Machine Interface (HMI) and so on. It is another issue to interoperate among these systems. In this paper, we put emphasis on the communication between MES and ERP/APS (Planning layer) and SCADA/HMI (Control layer).
We utilize activity diagrams and state diagrams of UML to construct the behavior representations of MES in semiconductor fabrication. This paper mainly presents production flow definition with activity diagrams. Moreover, we further construct the material flow model along with information flow to illustrate MES applied in the actual semiconductor fabrication plant floor. Certainly, the interoperability among the aforementioned systems is also constructed by activity diagrams. In addition to UML, we also apply GTST-MLD (Goal Tree Success Tree and Master Logic Diagram) to validate whether the activity diagrams are corresponded to the eleven functionalities which are defined by MESA International.

[1] APICS, Dictionary, APICS, Falls Church (USA), 8th edition, 1995.
[2] Barry, J., Aparicio, M., Gilman, C., Lam, H., and Ramnath, R., “NIIIP-SMART: An Investigation of Distributed Object Approaches to Support MES Development and Deployment in a Virtual Enterprise,” In The Proceedings of The Second International Enterprise Distributed Computing Workshop (EDOC98), 2-5 Nov, 1998.
[3] Benaissa, M. and Benabdehafid, A., “The integration of the supervision in the MES environment within the framework of the Extend Enterprise,” Proceeding 14th Europe Simulation Symposium, SCS Europe BVBA, 2002.
[4] Bennett S., McRobb S., and Farmer R., Object-oriented systems analysis and design using UML, 2e., McGraw-Hill, New York, 2003.
[5] Booch, G., Rumbaugh, J., and Jacobson, I., The Unified Modeling Language User Guide, Addison-Wesley, Reading, MA, 1998
[6] Cheng, F.T. and Lin, M.T., “Enhancement of Semiconductor Equipment Communications Using a Web-Enabled Equipment Driver,” IEEE Transactions on Semiconductor Manufacturing, Vol. 14, No. 4, Nov. 2001: 372-380.
[7] Cheng, F.T., Lin, M.T., and Lee, R.S., “Developing a Web-enabled Equipment Driver for Semiconductor Equipment Communications,” Proceedings of the 2000 IEEE International Conference on Robotics & Automation, San Francisco, 2000: 2203-2210.
[8] Cheng, F.T., Shen, E., Deng, J.Y., and Nguyen, K., “Development of a Distributed Object-Oriented Systems Framework for the Computer-Integrated Manufacturing Execution Systems,” Proceedings of the 1998 IEEE International Conference on Robotics & Automation, Leuven, Belgium, May 1998.
[9] Cheng, F.T., Shen, E., Deng, J.Y., and Nguyen K., “Development of a system framework for the computer-integrated manufacturing execution system: a distributed object-oriented approach,” Int. J. Computer Integrated Manufacturing, 1999, Vol. 12, No. 5: 384-402.
[10] Cheng, F.T. and Teng, C.Y., “A object-based controller for equipment communications in semiconductor manufacturing,” Robotics and Computer Integrated Manufacturing, 18 (2002): 387-402.
[11] Cheng, F.T., Yang, H.C., and Lin, J.Y., “Development of Holonic Information Coordination Systems With Failure-Recovery Considerations,” IEEE Transactions on Automation Science and Engineering, Vol. 1, NO.1, July 2004.
[12] Cheng, F.T., Wu, S.L., and Chang, C.F., “Systematic Approach for Developing Holonic Manufacturing Execution Systems,” IECON’01: The 27th Annual Conference of the IEEE Industrial Electronics Society, 2001: 261-266.
[13] Cheng, F.T., Yang, H.C., Kuo, T.L., Feng, C., and Jeng, M.D., “Modeling and Analysis of Equipment Managers in Manufacturing Execution Systems for Semiconductor Packaging,” IEEE Transactions on Systems, Man, And Cybernetics—Part B: Cybernetics, Vol. 30, No. 5, 2000: 772-782.
[14] Choi, B.K. and Kim, B.H., “MES (manufacturing execution system) architecture for FMS compatible to ERP (enterprise planning system),” Int. J. Computer Integrated Manufacturing, Vol. 15, No.3, 2002: 274-284.
[15] Chung, S.L. and Jeng, M.D., “An Overview of Semiconductor Fab Automation Systems,” Proceedings of the 2003 IEEE, International Conference on Robotics & Automation, Taipei, Taiwan, 2003:1050-1055.
[16] Chung, S.L. and Jeng, M.D., “Manufacturing Execution System (MES) for Semiconductor Manufacturing,” IEEE and SMC, 2002.
[17] Feng, S.C., “Manufacturing Planning and Execution Software Interfaces,” Journal of Manufacturing Systems, Vol. 19, No. 1, 2000:1-17.
[18] Fowler, M., UML Distilled: A Brief Guide to the Standard Object Modeling Language, 2e., Addison-Wesley, Reading, MA, 1999.
[19] Füricht, R., Prähofer, H., Hofinger, T., and Altmann, J., “A component-Based Application Framework for Manufacturing Execution Systems in C# and .NET,” 40th International Conference on Technology of Object-Oriented Languages and Systems (TOOLS Pacific 2002), Sidney, Australia, Vol. 10: 169-178.
[20] Hori, M., Kawamura T., and Okano, A., “OpenMES: Scalable Manufacturing Execution Framework Based on Distributed Object Computing,” Systems, Man, and Cybernetics, 1999. IEEE SMC ''99 Conference Proceedings, vol.6, pp. 398-403.
[21] Hu, Y.S. and Modarresa, M., “Evaluating system behavior through Dynamic Master Logic Diagram (DMLD) modeling,” Reliability Engineering and System Safety, 64 (1999): 241–269.
[22] Kellermayr K. H. and Konnerth Harald, “Mobile communication for supervisory control and data acquisition,” International Conference and Workshop: Telecommunications and Mobile Computing, tcmc2001, Graz University of Technology, Oct.15th-Oct.16th 2001.
[23] Koç, M., Ni, J., Lee, J., and Bandyopadhyay, P., “Introduction of e-Management,” NAMRC 2003 E-Manufacturing Panel, McMaster Univ. May 2003.
[24] Kuo, C.H. and Huang, H.P, “Modeling and Performance Evaluation of a Controlled IC Fab Using Distributed Colored Timed Petri Net,” Proceedings of the 2000 IEEE International Conference on Robotics & Automation, San Francisco, 2000.
[25] Lee, T.E. and Lee J.H., “An Integrated Application Framework for a Cluster Tool Controller for Semiconductor Manufacturing,” Proceeding of 2001 IEEE International Conference, 2001 Page(s):775 - 778 vol.2.
[26] Lesiecki, M. and Simington, B., “Development of National Skill Standards for Technicians Working in Highly Automated (300mm) Environments,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 2002: 231-233.
[27] Liu, W., Chua, T.J., Lam, J., Wang, F.Y., Cai, T.X., and Yin, X.F., “APS, ERP and MES systems integration for Semiconductor Backend Assembly,” Seventh International Conference on Control, Automation, Robotics and Vision (ICARCV’02), 2002, Singapore: 1403-1408.
[28] McClellan, M., Applying Manufacturing Execution Systems, McGraw-Hill, New York, 2000.
[29] McClellan, M., “Execution Systems: The Heart of Intelligent Manufacturing,” Intelligent Enterprise, 2004: 28-32.
[30] MESA International, “MES Functionalities & MRP to MES Data Flow Possibilities,” MESA International—White Paper Number 2, 1997.
[31] MESA International, “Controls Definition & MES to Controls Data Flow Possibilities,” MESA International—White Paper Number 3, 2000).
[32] MESA International, “MES Explained: A High Level Vision,” MESA International—White Paper Number 6, 1997.
[33] Morel, G., Panetto, H., Zaremba, M., and Mayer, F., “Manufacturing Enterprise Control and Management System Engineering: paradigms and open issues,” Annual Reviews in Control, 27 (2003): 199-209.
[34] Modarres M., “Functional modeling for integration of human-software-human in complex physical systems,” Proceedings of the Fourth International Workshop on Functional Modeling of Complex Technical Systems, Athens, Greece, 20-21 June 1996.
[35] Modarres, M., “Functional modeling of complex systems with applications,” Reliability and Maintainability Symposium, 1999. Proceedings. Annual 18-21 Jan. 1999 Page(s):418 - 425
[36] Modarresa, M. and Cheon, S.W., “Function-centered modeling of engineering systems using the goal tree–success tree technique and functional primitives,” Reliability Engineering and System Safety, 64 (1999): 181–200.
[37] Nadoli, G. and Pillai, D., “Simulation in automated material handling systems design for semiconductor manufacturing,” Proceedings of the 1994 Winter Simulation Conference, 892-899.
[38] Park, H.G., Baik, J.M., Park, S.B., and Lee, C.H., “A development of Object-Oriented Simulator for Manufacturing Execution Systems,” Computers & Industrial Engineering, 37 (1999): 239-242.
[39] Qiu, R., “Real-time Response and System Integration in A Back-end Semiconductor Manufacturing System,” Industry Applications Conference, 2002. 37th IAS Annual Meeting. Conference Record of the Volume 1, 2002, 622 - 627 vol.1
[40] Qiu, R. , Burda, R. and Chylak, R., “Distributed WIP Control in Advanced Semiconductor Manufacturing,” Accepted by the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Boston, MA, 2002.
[41] Qiu, R.G. and Zhou, M., “Moghty MESs: State-of-the-Art and Future Manufacturing Execution Systems,” Proceedings of the 2004 IEEE International of Conference om Robotics & Automation, March 2004: 19-25.
[42] Scott, D., “Comparative Advantage Through Manufacturing Execution Systems,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 1996: 179-184.
[43] Sheikh, K., Manufacturing Resource Planning (MRP II) with an introduction to ERP, SCM, and CRM, McGraw-Hill, New York, 2003.
[44] Sieberg, J. and Walter, R., “A Scheduling and Resource Optimising MES for the Semiconductor and MEMS Industry,” IEEE/SEMI Advanced Manufacturing Conference, 2003: 101-105.
[45] Smith, J.S., Hoberecht, W.C., and Joshi, S.B., “A shop-floor control architecture for computer-integrated manufacturing,” IIE Transactions, 28(1996): 783-794.
[46] TATA Consultancy Services, “Manufacturing Execution Systems—A Concept Note,” Manufacturing Practice, 2002.
[47] Tatsiopoulos, I.P., “An Order Release reference model as a link between production management and shop floor control software,” Computers in Industry, 33 (1997): 335-344.
[48] Vijayan, J., “Manufacturing execution systems,” Computerworld, 2000: 38.
[49] Wallace, E.K., “NIST Response to MES Request for Information,” NIST Response to RFI-3, 1999.
[50] Weygandt, S., “Getting the MES model—methods for systems analysis,” ISA Transactions, 35 (1996): 95-103.
[51] Xiao, H., Introduction to Semiconductor Manufacturing Technology, Prentice-Hall, New Jersey, 2001.
[52] Yang, H.C., Cheng, F.T., and Huang, D., “Development of a Generic Equipment Manager for Semiconductor Manufacturing,” Emerging Technologies and Factory Automation, 1999. Proceedings. ETFA ''99. 1999 7th IEEE International Conference, 1999: 727 – 732.
[53] Yu, C.Y. and Huang, H.P., “Development of the Order Fulfillment Process in the Foundry Fab by Applying Distributed Multi-Agents on a Generic Message-Passing Platform,” IEEE/ASME Transactions on Mechatronics, Vol.6, No. 4, 2001: 387-398.
[54] http://members.iinet.net.au/~ianw/primer.html
[55] http://www.iec.org/online/tutorials/hmi/