| 研究生: |
王曉琪 Xian-Qi Wang |
|---|---|
| 論文名稱: |
大面積矽偵測器寄生電容量測及分析 Measurement and Analysis on Parasitic Capacitances of Large-Area Silicon Detectors |
| 指導教授: |
林宗泰
Willis T. Lin |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 物理學系 Department of Physics |
| 畢業學年度: | 88 |
| 語文別: | 中文 |
| 論文頁數: | 61 |
| 中文關鍵詞: | 矽偵測器 |
| 相關次數: | 點閱:12 下載:0 |
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在PHOBOS的實驗中,利用相對重離子碰撞加速器(Relativistic Heavy-Ion Collider accelerator),藉著金原子和金原子的對撞,模擬這個最原始的狀態—夸克—膠子電漿態(Quark-Gluon Plasma)。為了能夠偵測到夸克—膠子電漿態(Quark-Gluon Plasma)的存在證據,PHOBOS實驗就以矽偵測器作為主要的偵測器。隨著實驗要求的不同,矽偵測器的幾何形狀也就有不同的設計,在PHOBOS的實驗中,所用的主要偵測器就是矽微條偵測器(Silicon Strip Detector,SSD)以及矽塊狀偵測器(Silicon Pad Detector,SPD)。而在本篇論文中,主要就是探討PHOBOS所用的SSD以及SPD的寄生電容(parasitic capacitance)的性質。
矽偵測器(SSD,SPD)的內部,寄生電容(parasitic capacitance)一直是受人討論的問題。因為它關係到這個偵測器的訊號和噪音的比例(signal-noise ratio),而且它很難從偵測器上直接地量測出來。為了能夠得到這些寄生電容的值,藉著K&S Model 4123點銲機讓欲測量P+塊狀區域的附近每個P+塊狀區域的偏壓電阻接地(bonding pad ground)。接著再用KEITHLEY Model 230電壓供應器以及KEITHLEY Model 590 CV Analyzer電容量測器,藉著Labview的整合,透過GPIB介面,控制電壓的輸出以及電容值的讀取。
經由一系列不同『接地』方式量測某一個單一P+塊狀區域的結果。結果得知,以訊號線(signal line)和第一層金屬(Metal_1)之間的電容和訊號線(signal line)和訊號線(signal line)之間的電容是構成寄生電容最主要的二個部分。為了能夠減少這二個部分的寄生電容,偵測器內部訊號線的設計以及Metal_1和Metal_2之間的絕緣層種類及厚度是必須要考慮的。
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