本研究乃是先以微能量放電加工微細槽，再藉電解拋光對微細槽進行精修加工的實驗。藉助於放電加工的加工速度快和電化學加工的表面平整之利，以期望快速得到表面佳且製作快速的微細元件。實驗中先由圓盤電極放電加工製造微細槽，再變換各種不同的電流波型、電流大小、電解液濃度等，以探討電解拋光對微細槽精修加工時之電解擴槽量、槽的形狀精度、表面粗糙度的影響，期望建立微細槽的精密加工技術，以供工業界參考。

This research is focusing on electrode discharge machinery using micro energy between the slit, and by using electro polishing to process the precise fabrication. Combining the benefits of EDM and electrochemical polishing, it is promising to present not only fast in processing, but also fine quality surface. In this experiment, started with using the technique of EDM by using round electrode disk to produce micro slit, and according to different current waves, current size, and the concentration of electrolyte to discuss their effects on slit expansion, slit shape precision and the roughness of the surface. In this experiment, the precise fabrication technique of establishes accurate micro slit is discussed for the related industrial reference.

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