工業自動化與半導體製造正迅速邁向高度整合與智慧化的發展階段，這一趨勢促使不同設備與系統之間的數據交換與協同運作變得尤為重要。特別是在製造業領域中，監控與數據採集系統（Supervisory Control and Data Acquisition,簡稱SCADA）與半導體設備通訊標準／通用設備模型（Semiconductor Equipment Communication Standard／Generic Equipment Model,簡稱SECS/GEM）作為兩大主流的通訊架構，廣泛應用於不同生產場域。這兩套系統在通訊協定、數據格式及應用場景上存在顯著差異，使得跨系統整合面臨諸多挑戰。為解決此問題，實現高效且可靠的跨系統通訊整合機制，成為工業智慧製造領域的重要研究議題。
本研究針對SCADA與SECS/GEM之間整合的難點，提出一種基於訊息佇列遙測傳輸協定（Message Queuing Telemetry Transport,簡稱MQTT）的跨系統整合架構。MQTT為一種輕量級且高效率的通訊協定，具有發佈／訂閱機制、低頻寬需求與高可靠性等特性，特別適合於分散式工業環境中應用。藉由MQTT作為通訊橋樑，可在不顯著更動既有系統架構的前提下，有效串接SCADA與SECS/GEM兩套系統，進而提升整體生產系統的效能與資訊透明度。
研究進行MQTT通訊協定的適應性分析，相較於傳統的通訊協定（如OPC UA或Modbus），MQTT具有更低的資源消耗與更高的彈性，能夠支援大規模設備連接與實時訊息推送。基於其階層式主題分類機制，系統可更有效地實現數據篩選與訂閱，提升資訊處理效率。
本研究設計一套基於MQTT的系統整合架構，該架構依據功能層級分為設備層、邊緣層、通訊層及應用層。設備層包含傳統SCADA終端與SECS/GEM控制設備，透過邊緣層進行初步資料彙整與轉換；通訊層以MQTT作為核心協定，負責跨系統數據傳輸與主題管理；應用層則包含用戶端介面與決策分析模組，提供即時監控與可視化功能。該架構旨在兼顧系統靈活性與擴充性，可依據不同場域需求進行模組化調整。
為解決SCADA與SECS/GEM間數據格式不一致問題，本文提出一個資料轉換與適配機制。此機制設計於通訊層與應用層之間，負責解析雙方系統特定通訊協定格式（如SCADA的標準Tag與SECS的Stream/Function對應訊息），並將其映射至MQTT通用主題格式。此過程同時結合MQTT的品質服務等級（Quality of Service,簡稱QoS）機制，確保資料在傳輸過程中具備重送與確認機制，進而提升資料的完整性與可靠性。
研究透過實驗與案例驗證所提出架構之效能與實用性。在模擬實驗中，針對系統封包丟失率與資源使用情況進行評估，結果顯示MQTT整合架構在維持高可靠性同時具備良好的傳輸效率。在實際應用案例中，選定某工業製造現場進行部署測試，成功實現SCADA系統與SECS/GEM設備的資料互通，並透過視覺化界面即時反映設備狀態與製程資訊，顯著提升作業效率與管理透明度。

As industrial automation and semiconductor manufacturing rapidly advance toward higher levels of integration and intelligence, the need for seamless data exchange and system interoperability has become increasingly critical. In the manufacturing sector, Supervisory Control and Data Acquisition (SCADA) systems and the Semiconductor Equipment Communication Standard/Generic Equipment Model (SECS/GEM) serve as two major communication frameworks widely deployed across different production environments. However, due to significant differences in communication protocols, data formats, and application scenarios, integrating these systems poses substantial challenges. Addressing these issues and achieving reliable cross-system communication has thus emerged as a key research focus in the field of smart manufacturing.
This study proposes a cross-system integration architecture based on the Message Queuing Telemetry Transport (MQTT) protocol to bridge the gap between SCADA and SECS/GEM systems. MQTT is a lightweight and efficient communication protocol that features a publish/subscribe model, low bandwidth requirements, and high reliability, making it especially suitable for distributed industrial environments. By using MQTT as a communication bridge, it is possible to interconnect SCADA and SECS/GEM systems without major modifications to existing infrastructures, thereby improving overall system performance and data transparency.
The study begins with an adaptability analysis of MQTT, comparing it to traditional communication protocols such as OPC UA and Modbus. MQTT demonstrates lower resource consumption and greater flexibility, supporting large-scale device connectivity and real-time message delivery. Its hierarchical topic-based structure further enhances data filtering and subscription efficiency.
The study introduces a layered MQTT-based system integration architecture, which includes the device layer, edge layer, communication layer, and application layer. The device layer consists of traditional SCADA terminals and SECS/GEM-controlled equipment. The edge layer handles initial data aggregation and transformation. The communication layer, centered on MQTT, manages data transmission and topic coordination across systems. The application layer includes user interfaces and decision-making modules, enabling real-time monitoring and visualization. The architecture is modular and scalable, allowing adaptation to various industrial environments.
To address inconsistencies in data formats between SCADA and SECS/GEM, the study also presents a data conversion and adaptation mechanism. Positioned between the communication and application layers, this mechanism parses protocol-specific formats—such as SCADA tags and SECS Stream/Function messages—and maps them to a unified MQTT topic structure. It also incorporates MQTT's Quality of Service (QoS) features to ensure reliable data transmission through message delivery guarantees and retransmission mechanisms, enhancing data integrity.
The proposed architecture is evaluated through simulations and real-world case studies. Experimental assessments focus on packet loss rates and resource utilization, demonstrating that the MQTT-based integration framework offers both high reliability and efficient data transmission. A field deployment in an industrial manufacturing site successfully enabled data interoperability between SCADA and SECS/GEM systems. Real-time equipment status and process information were visualized through dashboards, significantly improving operational efficiency and management transparency.

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