彎曲波導耦合表面電漿子研究｜國立中央大學博碩士論文系統

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研究生：	張雅茹 Ya-Ju Chang
論文名稱：	彎曲波導耦合表面電漿子研究 Surface Plasmon Generation on Curved Waveguides
指導教授：	陳啟昌 Chii-Chang Chen
口試委員:
學位類別：	碩士 Master
系所名稱：	理學院 - 光電科學與工程學系 Department of Optics and Photonics
論文出版年：	2017
畢業學年度：	105
語文別：	中文
論文頁數：	101
中文關鍵詞：	彎曲波導、表面電漿、感測器
外文關鍵詞：	curved waveguide, Surface Plasmon, sensor
相關次數：	點閱：7 下載：0
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本論文中，我們提出利用彎曲波導耦合表面電漿於金屬微米半環上，透
過改變微米金屬環與彎曲波導的相對位置，獲得能夠在金屬微米環上增強
表面電漿共振的結構，並使用使用限時域差分法 (Finite-Difference Time-
Domain Method, FDTD)來模擬實際電磁波於波導內傳播及耦合到金屬環上
產生表面電漿共振模態的行為。
本論文藉由改變波導使用的材料，將傳統稜鏡耦合使用的折射率為1.5
的玻璃提升到具有較高折射率為1.7 的波導，而此結構可利用鍺(Ge)氧化物
來實現，這樣的改進使光場能更好的局限於波導內，使更多能量能夠耦合到
金屬環上並增強表面電漿耦合，使該結構具對環境變化具有較高靈敏度，使
用光偵測器結合本元件可將靈敏度提高至10-10RIU。

In this thesis, we launched a light in TM mode into a curved waveguide to generate surface plasmon polariton on a metallic micro-ring made by gold in Otto configuration. By changing the location of metallic micro-ring to curved waveguide, we can enhance the strength of the surface plasmon resonance. The structure is analyzed by the Finite-Difference Time-Domain Method. The refractive index of the curved waveguide is changed from 1.5 to 1.7. The confinement ability of the waveguide is improved. The energy coupled on metallic micro-ring is used to excite the surface plasmon polariton. The device shows a better sensitivity 10-10RIU.

目錄
中文摘要 ................................ ................................ ................................ ................ i
Abstract ................................ ................................ ................................ ................. ii
目錄 ................................ ................................ ................................ ...................... iii
圖目錄 ................................ ................................ ................................ .................. vi
表格目錄 ................................ ................................ ................................ ............... x
第一章 緒論 ................................ ................................ ................................ ......... 1
1-1 前言 ................................ ................................ ................................ ......... 1
1-2 表面電漿偏極子激發條件與耦合結構 ................................ ................ 3
1-2-1 稜鏡 耦合 (prism coupler) ................................ ................................ .... 4
Otto架構 (Otto configuration)[6] ................................ ............................ 4
Kretschmann架構 (Kretschmann configuration)[7] ............................... 6
1-3 積體化表面電漿子共振腔感測器發展回顧 ................................ ........ 7
1-4 研究架構 ................................ ................................ ............................... 11
1-5 彎曲波導耦合表面電漿................................ ................................ ... 12
1-6 研究動機 ................................ ................................ ............................... 14
1-7 論文架構 ................................ ................................ ............................... 14
1-8 結論 ................................ ................................ ................................ ....... 15
第二章 基本理論與模擬方法 ................................ ................................ ......... 16
iv
2-2 表面電漿介紹與理論 ................................ ................................ ........... 16
2-2-1 表面電漿簡介 ................................ ................................ ................... 16
2-2-2 金屬的光學反應................................ ................................ ............... 17
Drude model ................................ ................................ .......................... 19
2-2-3 金屬介面與電物質的表漿模態 ................................ ........... 23
TM極化電磁 波 ................................ ................................ .................... 24
輻射性表面電漿模態 ................................ ................................ ........... 27
非輻射性表面電漿模態 ................................ ................................ ....... 28
2-3 有限時域差分法 (Finite-difference time-domain method, FDTD) ... 30
FDTD數值模擬穩定性 ................................ ................................ ........ 35
2-4 保角轉換理論 (The conformal transformation)[37,38] ........................ 36
2-5 等效折射率分析法 (Effective index approximation) ........................... 44
2-6 結論 ................................ ................................ ................................ ..... 47
第三章 彎曲波導之設計與優化 ................................ ................................ ..... 48
3-1-1 以稜鏡架構產生表面電漿 ................................ ............................... 48
3-1-2 利用保角轉換及 Helmholtz equation決定波導尺寸 ..................... 54
3-2-1 彎曲波導寬度之優化 ................................ ................................ ....... 59
3-2-2 確認彎曲波導寬度................................ ................................ ........... 62
3-2 彎曲波導外圍光場損耗之處理與結構優化 ................................ ...... 64
3-3 結論 ................................ ................................ ................................ ....... 66
v
第四章 彎曲波導耦合表面電漿結構之設計與優化................................ ..... 67
4-1 偵測器 (monitor)設置 ................................ ................................ ........... 67
4-2 環境折射率改變對金屬吸收光能量的影響 ................................ ...... 70
4-3 波導折射率改變對輸出光強度的影響 ................................ .............. 74
4-3-1 波導材料為 1.5 ................................ ................................ ................. 75
4-4 結構對環境折射率改變之靈敏度測試 ................................ .............. 78
4-5 結論 ................................ ................................ ................................ ....... 81
第五章 結論與未來展望 ................................ ................................ ................... 83
5-1 論文總結 ................................ ................................ ............................... 83
5-2 未來工作 ................................ ................................ ............................... 85
參考文獻 ................................ ................................ ................................ ............. 86
                                

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