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研究生： 范智文
Zhi-wen Fan
論文名稱： 利用電化學加工製作微電極和微孔之研究與分析
The Analysis and Investigation on the Micro-electrode and Micro-hole Fabrication by Electrochemical Machining
指導教授： 洪勵吾
Lih-wu Hourng
口試委員:
學位類別： 博士
Doctor
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
畢業學年度： 98
語文別： 中文
論文頁數： 190
中文關鍵詞： 電雙層 、微孔 、脈衝電壓 、微電化學加工 、微電極
外文關鍵詞： Electrochemical micromachining, Micro electrode
相關次數： 點閱：13  下載：0 
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    • 摘要
    在眾多傳統加工中，電化學微細加工(EMM)又稱微電解加工，屬於特種加工的一種。其優點是可以加工任何金屬材料，並不受其硬度與強度的影響;且刀具電極不損耗，工件表面不含殘留應力，加工重複性較放電加工高，但其缺點在於微加工精度不高故本文針對以電化學加工法製作微電極和孔加工精度進行探討。
    微電極在非傳統加工中應用層面廣，但微電極的製作多半是由線放電研磨和雷射加工所製作，其成本花費很高且製作效率低，加上二者皆是採熱加工容易殘留應力，故本研究利用電拋光方式分別探討在直流和脈衝電源供應器下，其加工參數對於微電極製作之外型和尺寸的影響並搭配旋轉系統增加質傳效應。經由實驗發現到低電壓、高電解液濃度、加上合適的轉速，可製作出小於100 μm之微電極，且發現到加工之微電極轉速對於電極外型有很大的影響性。在搭配脈衝電源供應下製作微電極其以線性遞減操作電壓和加工能率的方式，可成功的製作出刃長為2 mm、3 mm、4 mm，電極直徑為100 μm的圓柱狀微電極，也利用此微電極進行深孔加工。
    在微電化學深孔加工中因為電極細小，不易使用中空管刀具進行排屑，故本研究採用旋轉刀具，改善電解液流動問題，且配合脈衝式直流電源，提供有規律的間歇供電進行間歇加工，以改善成品精度和增加孔深寬比。經由實驗可發現，在刀具轉速越高其加工深度可越深但高於某一轉速後其影響性降低，在使用50 μm的陰極刀具，且配合1000 RPM下其加工深度可達1000 μm(深寬比約1 : 9)，過切量為33.35 μm。而在極短脈衝電化學加工經由實驗發現脈衝頻率和過切關係不為線性以及氫氣泡對於加工的影響很高，在單一脈衝放電時間為30 ns下其可製作出深度為300 μm，孔過切量為13.75 μm的微孔。

    In numerous micromachining, electrochemical micro-machining (EMM) also called the electrolytic micro-machining that belong to the non conventional machining. It has more advantages such as any metal material regardless of its hardness can be machined, the cathode tool would not break in the machining process, the work piece after machining will not have any residual stress remained on its surface, the machining reproducibility was high than electro discharge machining. Due to the EMM that disadvantage was the low machining precision. In this paper we discussion the working parameters of EMM that how to effect the machining precision on the manufacture the micro-electrode and hole drilling.
    The mircro-electrode has high potential application in non-conventional machining, because the micro-electrode is very thin, generally they are fabricated by micro-electro discharge and laser machining. However, the corresponding equipments are very expensive and their machining efficient is very low. In this reseaech, we applied in the form of electrochemical polish to manufacture the micro-electrode. Under using the DC and pulsed voltage power supply we disscuss the working parameters that how to efeect the micro-electrode’s size and form. For increasing the mass diffusion effect, it added the rotational system in the experimet. Experimental results show that low applied voltage, high concentration electrolyte and an appropriate rotation of electrode are preferred to fabricate micro electrodes with diameter less than 100 μm. From the experiment, it found the rotational speed had critical affect in the form of micro-electrode. When processing the microelectrode by the pulsed voltage power supply, it could fabricate the 100 μm cylindrical tungsten microelectrode and length of 2 mm, 3 mm and 4 mm by linear decay of applied voltage or duty at different length, and we used the micro-electrode to process the electrochemical micro drilling.
    In the electrochemical machining of deep holes, especially for small holes, driving out the sludge is always difficult. The hollow tool electrode or lateral flow of the electrolyte cannot be applied to improve the machining precision anymore. In this paper, a rotational tool electrode and a high-frequency pulsed generator were applied herein to drive out the sludge, increase the machining precision and achieve the high aspect ratio hole. By the experiment, a high quality micro hole with a 33.35 μm overcut is drilled by a WC pin of diameter 50 μm on a 304 stainless steel plate of thickness 1000 μm(The hole aspect ratio reaches around 1 : 9.).It shows that a rotational tool can be utilized in the deep hole, electrochemical micro-drilling. In the electrochemical micro drilling with ultral short pulse voltage, by the experiment, it found the relationship between pulsed frequency and overcut was not linear and an excess amount of hydrogen gas bubbles would hinder hole machining, and reduce machining efficiency and precision. Under 30 ns pulsed on-time, a high-quality micro hole with a 13.75 μm overcut is drilled on a nickel plate of 300 μm thick.

    摘要 i Abstract iii 目錄 v 表目錄 ix 圖目錄 x 符號說明 xiv 第一章 序論 1 1-1 前言 1 1-2電化學加工製做微電極 4 1-3 微電化學孔加工 8 1-4 文獻回顧 9 1-4-1 電極製作 10 1-4-2電化學加工 15 1-5 研究目的 28 第二章 理論 31 2-1 電化學加工基本理論 31 2-2 極化(polarization) 32 2-3 液相質傳動力學 35 2-4 電解液導電度 37 2-5 電極直徑和加工時間的關係 37 2-6 電雙層理論 38 2-7 電流效率與電流密度 41 2-8 電極間距和加工時間的關係 42 第三章 實驗設備與步驟 45 3-1 實驗裝置 45 3-1-1 機台結構設計 45 3-1-2 刀具進給控制系統 46 3-1-3 電源供應系統 47 3-1-4 伺服馬達 48 3-1-5 導電度量測儀器 48 3-1-6 恆電位儀 49 3-1-7 恆溫加熱器 49 3-2 實驗材料 50 3-2-1以電化學加工法微電極製作 50 3-2-2脈衝電化學孔加工 51 3-3 實驗步驟 54 第四章 利用電化學加工製作微電極分析 58 4-1 電化學加工製作微電極 58 4-1-1轉速對微電極製作影響 59 4-1-2 加工電壓對微電極製作影響 62 4-1-3 電解液濃度對微電極製作影響 63 4-1-4 陰陽極浸入長度對微電極製作影響 64 4-1-5 電流大小對微電極製作影響 65 4-1-6 電極電極間距對微電極製作影響 66 4-1-7 圓柱電極製作之技術 66 4-2 脈衝電化學加工製作微電極 67 4-2-1脈衝電壓對微電極製作影響 69 4-2-2 脈衝週期對微電極製作影響 70 4-2-3 加工能率(Duty)對微電極製作影響 70 4-2-3-1 高加工能率 71 4-2-3-2 低加工能率 72 4-2-4 電解液溫度對微電極製作影響 73 4-2-5 線性電壓遞減對微電極製作影響 74 4-2-6 線性加工能率遞減對微電極製作影響 77 4-2-7 不同長度之類圓柱電極製作之技術 78 第五章 脈衝電化學孔加工 81 5-1 使用旋轉刀具之脈衝電化學深孔加工 81 5-1-1 脈衝電壓對孔加工精度的影響 83 5-1-2 電解液濃度對孔加工精度的影響 84 5-1-3 脈衝頻率對孔加工精度的影響 84 5-1-4 刀具尺寸對孔加工精度的影響 85 5-1-5 刀具進給速率對孔加工精度的影響 86 5-1-6 陰極刀具轉速對孔加工精度的影響 86 5-1-7 加工深度對孔加工精度的影響 88 5-1-8微孔元件製作 88 5-2 極短脈衝電化學孔加工 89 5-2-1 脈衝電壓對孔加工精度的影響 90 5-2-2 電解液濃度對孔加工精度的影響 91 5-2-3 脈衝頻率對孔加工精度的影響 92 5-2-4 脈衝放電時間對孔加工精度的影響 93 5-2-5 刀具進給速率對孔加工精度的影響 94 5-2-6 加工深度對孔加工精度的影響 95 5-2-7微孔和三維元件製作 96 第六章 結論 98 參考文獻 100 表目錄 表1 Ni200之化學組成表 116 表2 304SS之化學組成表 116 表3. NaOH電解液導電度 116 表4. NaNO3電解液導電度 116 表5. 不同線性遞減電壓下製作微電極之加工參數 117 表6. 不同線性遞減加工能率下製作微電極之加工參數 117 表7(a). 0.3 M HCL+NaCL導電度 118 表7(b). 0.1 M HCL+NaCL導電度 118 圖目錄 圖1-1. 電化學拋光之黏稠層 119 圖1-2. 電化學拋光之電壓－電流( V - I )曲線圖[7] 120 圖1-3. 微探針加工示意圖[13] 120 圖1-4. 動力法加工示意圖[14] 121 圖1-5. 加工時質量擴散層示意圖[16] 122 圖2-1.電雙層示意圖[20] 123 圖2-2. 加工之電雙層等效電路圖 124 圖3-1. 3-D懸臂式機械手臂示意圖 125 圖3-2. 實體加工機台 125 圖3-3. 數位示波器與脈衝產生器 126 圖3-4. ECM對純鐵加工之極化曲線和電極介面模型[48] 127 圖4-1. 微電極量測尺寸位置圖 128 圖4-2. 純鎢棒在不同NaOH電解液濃度下之電壓電流曲線圖 128 圖4-3. 微電極加工過程圖: (a)電極底部黏稠層狀況(2V,1000RPM) (b)氧氣泡貼附電極表面(1.6V, 0RPM) 129 圖4-4. Fluent模擬不同轉速的流場與壓力分佈之變化 130 圖4-5. 在不同轉速下所製作之微電極形狀 131 圖4-6. 不同轉速下電極外型變化 132 圖4-7. 不同轉速下加工600秒時,電極平均直徑差異 132 圖4-8. 不同加工電壓下電極外型變化 133 圖4-9. 在加工電壓1.2V下電極外型隨時間變化 133 圖4-10. 在不同加工電壓下電極表面 (a) 未加工，(b) 1.4V, 1000RPM， (c) 2.0V, 1000RPM 134 圖4-11. 不同電解液濃度下電極外型變化 135 圖4-12. 不同陰極面積下電極外型變化 135 圖4-13. 不同陽極浸入長度下電極外型變化 136 圖4-14. 不同時間下之電極尺寸和表面變化(電極長度3mm) 136 圖4-15. 不同電流下電極外型變化 137 圖4-16. 不同電極間距下電極外型變化 137 圖4-17. 在加工電壓1.4 V下: (a)電極外型(b)電極尺寸隨時間變化 138 圖4-18. 類圓柱電極製作 139 圖4-19. 實驗加工示意圖 140 圖4-20. 在不同脈衝電壓下直流電源和脈衝電源加工之金屬移除量 差異 141 圖4-21. 不同脈衝電壓下直流電源和脈衝電源加工下之電極外型 141 圖4-22. 不同脈衝電壓下電極外型變化 142 圖4-23. 不同脈衝週期下電極外型變化 143 圖4-24. 不同加工能率下電極外型變化 (50 %~80 %) 144 圖4-25. 不同加工能率下電極外型變化 (50 %~20 %) 145 圖4-26. 不同電解液溫度下電極外型變化 146 圖4-27. 不同線性遞減電壓下電極外型和尺寸變化 147 圖4-28. 不同線性遞減加工能率下電極外型和尺寸變化 148 圖4-29. 由線性遞減電壓所製作出不同長度之微電極 149 圖4-30. 使用所製作之微電極進行脈衝電化學孔加工 (100X) 150 圖5-1. 脈衝電化學孔加工示意圖 151 圖5-2. 不鏽鋼不同NaNO3電解液濃度下之電壓電流曲線圖 152 圖5-3. 不同脈衝放電時間下改變脈衝電壓之孔過切量變化 152 圖5-4. 不同脈衝電壓和脈衝放電時間所加工出的孔外型變化 (100X) 153 圖5-5. 不同脈衝放電時間下改變脈衝電壓之孔錐度變化 153 圖5-6. 不同脈衝放電時間下改變電解液濃度之孔過切量變化 154 圖5-7. 不同脈衝放電時間下改變電解液濃度之孔錐度變化 154 圖5-8. 不同脈衝頻率下改變脈衝電壓之孔過切量變化 155 圖5-9. 不同脈衝頻率下改變脈衝電壓之孔錐度變化 155 圖5-10. 不同脈衝放電時間下改變陰極刀具尺寸之孔過切量變化 156 圖5-11. 不同脈衝放電時間下改變陰極刀具尺寸之孔錐度變化 156 圖5-12. 不同脈衝放電時間下改變刀具進給速率之孔過切量變化 157 圖5-13. 不同脈衝放電時間下改變陰極刀具轉速之孔過切量變化 158 圖5-14. 不同加工深度下改變脈衝放電時間之孔過切量變化 159 圖5-15. 以脈衝電化學加工不同厚度工件之孔外型 (200X) 160 圖5-16. 不同脈衝頻率之輸出波形圖 161 圖5-17. 不同脈衝電壓下孔過切量變化 162 圖5-18. 在5V脈衝電壓下所加工之孔外型和氣泡阻礙情形 162 圖5-19. 不同脈衝電壓下孔錐度變化 163 圖5-20. 不同電解液濃度下孔過切量變化 163 圖5-21. 不同電解液濃度下孔錐度變化 164 圖5-22. 不同脈衝頻率下孔過切量變化 164 圖5-23. 不同脈衝頻率下孔錐度變化 165 圖5-24. 不同脈衝放電時間下孔過切量變化 165 圖5-25. 不同脈衝放電時間下孔錐度變化 166 圖5-26. 不同脈衝放電時間下所加工出的孔外型 166 圖5-27. 不同刀具進給速率下孔過切量變化 167 圖5-28. 不同刀具進給速率下孔錐度變化 167 圖5-29. 不同加工深度下孔過切量變化 168 圖5-30. 以極短脈衝電化學加工不同厚度工件之孔外型 168 圖5-31. 以極短脈衝電化學加工3D元件 169

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