本論文利用現有半導體製程技術與微光機電製程技術，製作矽基堆疊式微光學元件，應用於微型化光學讀取頭，使其簡單化、微小化及積體化。本光學讀取頭包含650nm雷射二極體、45o反射面鏡、光柵、全像光學元件與Fresnel lens等，以自由空間堆疊方式整合各光學元件，以達到將光束聚焦於光碟片上，並產生接近繞射極限的聚焦點，同時以三光束法與像散法產生聚焦及循軌誤差訊號，由光偵檢器接收其光訊號。
在各光學元件的製程方面，自由空間矽基堆疊式光學元件是利用低壓化學氣相沉積(LPCVD)的方法，在單晶矽基板上沉積低應力氮化矽薄膜，利用感應耦合電漿蝕刻機(ICP) 以乾式蝕刻的方式，控制氮化矽蝕刻的輪廓和深度；並以氮化矽薄膜作為保護層，利用氫氧化鉀水溶液以濕式蝕刻單晶矽的方法製作光通道。本光學系統採用半導體製程技術製作，因此可以整批大量製造來降低製造成本，以表面微加工技術與體型微加工技術來縮小系統尺寸、減輕系統重量。

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