本論文提出並建立一個二維量測樣本橢圓偏極參數的相移影像式橢圓儀，在相移影像式橢圓儀的光學架設中，我們使用了液晶可調相位延遲器可以達到快速相位延遲調控。
由於液晶可調相位延遲器的相位延遲取決於輸入電壓的調制訊號，所以校正液晶可調相位延遲器相位延遲在相移技術中是很重要的步驟，我們亦提出一個校準的程序，以準確地確定特定相位延遲所對應的輸入電壓值，因此橢圓偏極參數的空間分佈即可經由相移的轉換，並由CCD 照像機擷取光強度分佈影像推算出。
相移影像式橢圓儀量測系統能夠量測均向性與非均向性材料的物理特性，為我們發展之系統的一大特色，本論文提出以下兩個實驗：(1)量測矽基材上之二氧化矽薄膜分佈 (2)量測扭轉向列型液晶盒的扭轉角和單元間隙，分別做為均向性和非均向性材料的實驗驗證。最後實驗結果皆接近參考值，可以證實我們理論的正確性和實驗的量測精確度。

In this thesis, a phase shifting imaging ellipsometer (PSIE) is developed and set up for two-dimensionally measuring ellipsometric parameters of a tested specimen. In the optical setup of the PSIE, a liquid crystal variable retarder (LCVR) is employed to change the phase retardation at high speed.
The phase retardation adjustment of an LCVR, plays an important role in phase-shifting technique, where the phase retardation is dependent upon the applied voltage of modulation signal. We also propose a calibration process to
accurately determine the applied voltages relative to the specific retardations. Therefore, the spatial distributions of the ellipsometric parameters can be
calculated through the intensity images of phase shifting transformation, acquired by a CCD camera.
PSIE has ability to to measure the physical properties of both isotropic and anisotropic materials. This is one of the features of our developed system. We give the experimental verifications for characterizing them, which are done by (1) measuring the thickness distribution of a SiO2 thin film on the Si substrate and (2) measuring the twisted angle and cell thickness of a twisted nematic
liquid crystal cell, as the experimental demonstration for an isotropic and an anisotropic materials. The experimental results are all close to the given values,
shown that the correctness of our theory and measurement accuracy.

1. E. Collet：“ Polarized Light ”, (Marcel Dekker, New York, 1992).
2. M. Azzam, and N. M. Barshara, “Ellipsometry and Polarized Light”, North-Holland Amsterdam, 1980).
3. J. C. Kemp, “Piezo-Optical Birefringence Modulators：New Use for a Long-Known Effect”, J. Opt. Soc. Am. 8 (1969).
4. S. N. Jasperson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique”, Rev. Sci. Instrum. 40 (1969).
5.http://www.meadowlark.com/products/lcVariableRetarders.php
6. C. Y. Han and Y. F. Chao, “Photoelastic Modulated Imaging Ellipsometry by Stroboscopic Illumination Technique”, Rev. Sci. Instrum.77 (2006).
7. 李嘉倫，“光彈調變式影像橢圓偏光儀”，國立交通大學光電工程研究所碩士論文 (2005).
8. 鐘政英，“具液晶移相干涉術之適應光學系統”，國立中央大學機械工程研究所碩士論文 (2005).
9.http://www.meadowlark.com/products/lcDigitalInterfaceControllers.php
10. P. C. Yeh and C. Gu, “Optics of Liquid Crystal Displays”, (John Wiley and Sons, 1999).
11. S. T. Tang and H. S. Kwok, “3×3 Matrix for Unitary Optical Systems”, J. Opt. Soc. Am. 18 (2001).
12. C. J. Yu, C. E. Lin, Y. C. Li, L. D. Chou, J. S. Wu, C. C. Lee, and C. Chou,“Dual-Frequency Heterodyne Ellipsometer for Characterizing Generalized
Elliptically Birefringent Media”, Opt. Express 17 (2009)
13. C. Chou, Y. C. Huang, and M. Chang, “Effect of elliptical birefringence on the measurement of the phase retardation of a quartz wave plate by an optical
heterodyne polarimeter,” J. Opt. Soc. Am. A 14(6) (1997).
14. C. Chou, Y. C. Huang, and M. Chang, “Polarized common path optical heterodyne interferometer for measuring the elliptical birefringence of a quartz wave plate,” Jpn. J. Appl. Phys. 35(Part 1, No. 10) (1996).
15. 陳律融，“相移干涉影像式橢圓儀”，國立中央大學光電與工程研究所碩士論文 (2009).
16. 劉育承，“光彈調變式橢圓偏光儀對扭轉式液晶盒的量測”，國立交通大學電子物理研究所碩士論文 (2005).
17.http://www.andor.com/scientific_cameras/ixon_emccd_camera/
18.https://scholarsbank.uoregon.edu/xmlui/bitstream/handle/1794/4932/sinev-CCD_digitization.pdf?sequence=1
19. Step wafer ID 0153 from Mikropack GmbH, Germany. The calibration data sheet of step wafer SiO2 on Si serial number ID0153, by Dipl-Ing (FH) Michael Kaiser, Labor fur Mikrosystemtechnik FH-Munchen, Germany.
20. C. Chou, H. K. Teng, C. J. Yu, and H. S. Huang, “Polarization Modulation Imaging Ellipsometry for Thin Film Thickness Measurement”, Opt. Commun. 273 (2007).
21. 曾國銓，“穆勒矩陣偏振儀於液晶盒參數之量測”，逢甲大學光電研究所碩士論文 (2008).
22. 黃毓中，“利用調制式橢圓偏光術於研究光學參數、薄膜厚度與光學性質”，逢甲大學電子工程研究所碩士論文 (2002).
23. 李正中，“以相位偏移式橢圓儀測量薄膜光學常數之研究”，行政院國家科學委員會專題研究計畫成果報告 (1995).
24. 周晟，“二維橢圓參數量測之干涉式橢圓儀”，行政院國家科學委員會專題研究計畫成果報告 (2003).
25. C. Wells and J. C. Wyant, “A Phase Shifting Interferometric Imaging Ellipsometer”, SPIE Proceeding Vol. 3121 (1997).
26. W. Chegal, H. M. Cho, Y. J. Cho, Y. P. Kim, and H. S. Kim, “Imaging Ellipsometry Combined with Surface Plasmon Resonance for Real-Time Biospecific Interaction Analysis”, Proc. of SPIE Vol. 6008 (2005).
27. 陳奕璁、韓建遠，“影像式橢圓偏光術在表面電漿共振生物感測器之研究”，國立聯合大學光電工程學系金腦獎專題報告書 (2010).
28. G. Jin, Z. H. Wang, and Y. H. Meng, “Imaging Ellipsometry for the Visualization of Bio-Molecular Layers”, Proc. of the 20thAnnual International Conference of the IEEE Engineering in Medicine and Biology Society, Vol. 20, No 2 (1998).